10/26/2010	12:00:32 AM	Helium valve closed
10/26/2010	12:00:32 AM	H2 valve closed
10/26/2010	12:00:32 AM	BCl3 valve closed
10/26/2010	12:00:32 AM	PH3 valve closed
10/26/2010	12:00:32 AM	SiCl4 pre valve closed
10/26/2010	12:00:32 AM	SiCl4 post valve closed
10/26/2010	12:00:32 AM	Bubbler valve closed
10/26/2010	12:00:32 AM	Main Vac valve opened
10/26/2010	12:00:32 AM	Bypass valve opened
10/26/2010	12:00:32 AM	Helium MFC set to  0.000000
10/26/2010	12:00:32 AM	H2 MFC set to  0.000000
10/26/2010	12:00:32 AM	BCl3 MFC set to  0.000000
10/26/2010	12:00:32 AM	PHl3 MFC set to  0.000000
10/26/2010	12:00:32 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:00:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:00:32 AM	Tube furnace set to 0
10/26/2010	12:01:32 AM	H2 valve closed
10/26/2010	12:01:32 AM	BCl3 valve closed
10/26/2010	12:01:32 AM	PH3 valve closed
10/26/2010	12:01:32 AM	SiCl4 pre valve closed
10/26/2010	12:01:32 AM	SiCl4 post valve closed
10/26/2010	12:01:32 AM	Bubbler valve closed
10/26/2010	12:01:32 AM	Helium valve opened
10/26/2010	12:01:32 AM	Main Vac valve opened
10/26/2010	12:01:32 AM	Bypass valve opened
10/26/2010	12:01:32 AM	Helium MFC set to  100.000000
10/26/2010	12:01:32 AM	H2 MFC set to  0.000000
10/26/2010	12:01:32 AM	BCl3 MFC set to  0.000000
10/26/2010	12:01:32 AM	PHl3 MFC set to  0.000000
10/26/2010	12:01:32 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:01:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:01:33 AM	Tube furnace set to 0
10/26/2010	12:02:33 AM	Helium valve closed
10/26/2010	12:02:33 AM	H2 valve closed
10/26/2010	12:02:33 AM	BCl3 valve closed
10/26/2010	12:02:33 AM	PH3 valve closed
10/26/2010	12:02:33 AM	SiCl4 pre valve closed
10/26/2010	12:02:33 AM	SiCl4 post valve closed
10/26/2010	12:02:33 AM	Bubbler valve closed
10/26/2010	12:02:33 AM	Main Vac valve opened
10/26/2010	12:02:33 AM	Bypass valve opened
10/26/2010	12:02:33 AM	Helium MFC set to  0.000000
10/26/2010	12:02:33 AM	H2 MFC set to  0.000000
10/26/2010	12:02:33 AM	BCl3 MFC set to  0.000000
10/26/2010	12:02:33 AM	PHl3 MFC set to  0.000000
10/26/2010	12:02:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:02:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:02:33 AM	Tube furnace set to 0
10/26/2010	12:03:33 AM	H2 valve closed
10/26/2010	12:03:33 AM	BCl3 valve closed
10/26/2010	12:03:33 AM	PH3 valve closed
10/26/2010	12:03:33 AM	SiCl4 pre valve closed
10/26/2010	12:03:33 AM	SiCl4 post valve closed
10/26/2010	12:03:33 AM	Bubbler valve closed
10/26/2010	12:03:33 AM	Helium valve opened
10/26/2010	12:03:33 AM	Main Vac valve opened
10/26/2010	12:03:33 AM	Bypass valve opened
10/26/2010	12:03:33 AM	Helium MFC set to  100.000000
10/26/2010	12:03:33 AM	H2 MFC set to  0.000000
10/26/2010	12:03:33 AM	BCl3 MFC set to  0.000000
10/26/2010	12:03:33 AM	PHl3 MFC set to  0.000000
10/26/2010	12:03:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:03:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:03:33 AM	Tube furnace set to 0
10/26/2010	12:04:33 AM	Helium valve closed
10/26/2010	12:04:33 AM	H2 valve closed
10/26/2010	12:04:33 AM	BCl3 valve closed
10/26/2010	12:04:33 AM	PH3 valve closed
10/26/2010	12:04:33 AM	SiCl4 pre valve closed
10/26/2010	12:04:33 AM	SiCl4 post valve closed
10/26/2010	12:04:33 AM	Bubbler valve closed
10/26/2010	12:04:33 AM	Main Vac valve opened
10/26/2010	12:04:33 AM	Bypass valve opened
10/26/2010	12:04:33 AM	Helium MFC set to  0.000000
10/26/2010	12:04:33 AM	H2 MFC set to  0.000000
10/26/2010	12:04:33 AM	BCl3 MFC set to  0.000000
10/26/2010	12:04:33 AM	PHl3 MFC set to  0.000000
10/26/2010	12:04:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:04:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:04:33 AM	Tube furnace set to 0
10/26/2010	12:05:33 AM	H2 valve closed
10/26/2010	12:05:33 AM	BCl3 valve closed
10/26/2010	12:05:33 AM	PH3 valve closed
10/26/2010	12:05:33 AM	SiCl4 pre valve closed
10/26/2010	12:05:33 AM	SiCl4 post valve closed
10/26/2010	12:05:33 AM	Bubbler valve closed
10/26/2010	12:05:33 AM	Helium valve opened
10/26/2010	12:05:33 AM	Main Vac valve opened
10/26/2010	12:05:33 AM	Bypass valve opened
10/26/2010	12:05:33 AM	Helium MFC set to  100.000000
10/26/2010	12:05:33 AM	H2 MFC set to  0.000000
10/26/2010	12:05:33 AM	BCl3 MFC set to  0.000000
10/26/2010	12:05:33 AM	PHl3 MFC set to  0.000000
10/26/2010	12:05:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:05:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:05:33 AM	Tube furnace set to 0
10/26/2010	12:06:33 AM	Helium valve closed
10/26/2010	12:06:33 AM	H2 valve closed
10/26/2010	12:06:33 AM	BCl3 valve closed
10/26/2010	12:06:33 AM	PH3 valve closed
10/26/2010	12:06:33 AM	SiCl4 pre valve closed
10/26/2010	12:06:33 AM	SiCl4 post valve closed
10/26/2010	12:06:33 AM	Bubbler valve closed
10/26/2010	12:06:33 AM	Main Vac valve opened
10/26/2010	12:06:33 AM	Bypass valve opened
10/26/2010	12:06:33 AM	Helium MFC set to  0.000000
10/26/2010	12:06:33 AM	H2 MFC set to  0.000000
10/26/2010	12:06:33 AM	BCl3 MFC set to  0.000000
10/26/2010	12:06:33 AM	PHl3 MFC set to  0.000000
10/26/2010	12:06:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:06:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:06:34 AM	Tube furnace set to 0
10/26/2010	12:07:34 AM	H2 valve closed
10/26/2010	12:07:34 AM	BCl3 valve closed
10/26/2010	12:07:34 AM	PH3 valve closed
10/26/2010	12:07:34 AM	SiCl4 pre valve closed
10/26/2010	12:07:34 AM	SiCl4 post valve closed
10/26/2010	12:07:34 AM	Bubbler valve closed
10/26/2010	12:07:34 AM	Helium valve opened
10/26/2010	12:07:34 AM	Main Vac valve opened
10/26/2010	12:07:34 AM	Bypass valve opened
10/26/2010	12:07:34 AM	Helium MFC set to  100.000000
10/26/2010	12:07:34 AM	H2 MFC set to  0.000000
10/26/2010	12:07:34 AM	BCl3 MFC set to  0.000000
10/26/2010	12:07:34 AM	PHl3 MFC set to  0.000000
10/26/2010	12:07:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:07:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:07:34 AM	Tube furnace set to 0
10/26/2010	12:08:34 AM	Helium valve closed
10/26/2010	12:08:34 AM	H2 valve closed
10/26/2010	12:08:34 AM	BCl3 valve closed
10/26/2010	12:08:34 AM	PH3 valve closed
10/26/2010	12:08:34 AM	SiCl4 pre valve closed
10/26/2010	12:08:34 AM	SiCl4 post valve closed
10/26/2010	12:08:34 AM	Bubbler valve closed
10/26/2010	12:08:34 AM	Main Vac valve opened
10/26/2010	12:08:34 AM	Bypass valve opened
10/26/2010	12:08:34 AM	Helium MFC set to  0.000000
10/26/2010	12:08:34 AM	H2 MFC set to  0.000000
10/26/2010	12:08:34 AM	BCl3 MFC set to  0.000000
10/26/2010	12:08:34 AM	PHl3 MFC set to  0.000000
10/26/2010	12:08:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:08:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:08:34 AM	Tube furnace set to 0
10/26/2010	12:09:34 AM	H2 valve closed
10/26/2010	12:09:34 AM	BCl3 valve closed
10/26/2010	12:09:34 AM	PH3 valve closed
10/26/2010	12:09:34 AM	SiCl4 pre valve closed
10/26/2010	12:09:34 AM	SiCl4 post valve closed
10/26/2010	12:09:34 AM	Bubbler valve closed
10/26/2010	12:09:34 AM	Helium valve opened
10/26/2010	12:09:34 AM	Main Vac valve opened
10/26/2010	12:09:34 AM	Bypass valve opened
10/26/2010	12:09:34 AM	Helium MFC set to  100.000000
10/26/2010	12:09:34 AM	H2 MFC set to  0.000000
10/26/2010	12:09:34 AM	BCl3 MFC set to  0.000000
10/26/2010	12:09:34 AM	PHl3 MFC set to  0.000000
10/26/2010	12:09:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:09:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:09:34 AM	Tube furnace set to 0
10/26/2010	12:10:34 AM	Helium valve closed
10/26/2010	12:10:34 AM	H2 valve closed
10/26/2010	12:10:34 AM	BCl3 valve closed
10/26/2010	12:10:34 AM	PH3 valve closed
10/26/2010	12:10:34 AM	SiCl4 pre valve closed
10/26/2010	12:10:34 AM	SiCl4 post valve closed
10/26/2010	12:10:34 AM	Bubbler valve closed
10/26/2010	12:10:34 AM	Main Vac valve opened
10/26/2010	12:10:34 AM	Bypass valve opened
10/26/2010	12:10:34 AM	Helium MFC set to  0.000000
10/26/2010	12:10:34 AM	H2 MFC set to  0.000000
10/26/2010	12:10:34 AM	BCl3 MFC set to  0.000000
10/26/2010	12:10:34 AM	PHl3 MFC set to  0.000000
10/26/2010	12:10:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:10:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:10:34 AM	Tube furnace set to 0
10/26/2010	12:11:34 AM	H2 valve closed
10/26/2010	12:11:34 AM	BCl3 valve closed
10/26/2010	12:11:34 AM	PH3 valve closed
10/26/2010	12:11:34 AM	SiCl4 pre valve closed
10/26/2010	12:11:34 AM	SiCl4 post valve closed
10/26/2010	12:11:34 AM	Bubbler valve closed
10/26/2010	12:11:34 AM	Helium valve opened
10/26/2010	12:11:34 AM	Main Vac valve opened
10/26/2010	12:11:34 AM	Bypass valve opened
10/26/2010	12:11:34 AM	Helium MFC set to  100.000000
10/26/2010	12:11:34 AM	H2 MFC set to  0.000000
10/26/2010	12:11:34 AM	BCl3 MFC set to  0.000000
10/26/2010	12:11:34 AM	PHl3 MFC set to  0.000000
10/26/2010	12:11:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:11:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:11:34 AM	Tube furnace set to 0
10/26/2010	12:12:35 AM	Helium valve closed
10/26/2010	12:12:35 AM	H2 valve closed
10/26/2010	12:12:35 AM	BCl3 valve closed
10/26/2010	12:12:35 AM	PH3 valve closed
10/26/2010	12:12:35 AM	SiCl4 pre valve closed
10/26/2010	12:12:35 AM	SiCl4 post valve closed
10/26/2010	12:12:35 AM	Bubbler valve closed
10/26/2010	12:12:35 AM	Main Vac valve opened
10/26/2010	12:12:35 AM	Bypass valve opened
10/26/2010	12:12:35 AM	Helium MFC set to  0.000000
10/26/2010	12:12:35 AM	H2 MFC set to  0.000000
10/26/2010	12:12:35 AM	BCl3 MFC set to  0.000000
10/26/2010	12:12:35 AM	PHl3 MFC set to  0.000000
10/26/2010	12:12:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:12:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:12:35 AM	Tube furnace set to 0
10/26/2010	12:13:35 AM	H2 valve closed
10/26/2010	12:13:35 AM	BCl3 valve closed
10/26/2010	12:13:35 AM	PH3 valve closed
10/26/2010	12:13:35 AM	SiCl4 pre valve closed
10/26/2010	12:13:35 AM	SiCl4 post valve closed
10/26/2010	12:13:35 AM	Bubbler valve closed
10/26/2010	12:13:35 AM	Helium valve opened
10/26/2010	12:13:35 AM	Main Vac valve opened
10/26/2010	12:13:35 AM	Bypass valve opened
10/26/2010	12:13:35 AM	Helium MFC set to  100.000000
10/26/2010	12:13:35 AM	H2 MFC set to  0.000000
10/26/2010	12:13:35 AM	BCl3 MFC set to  0.000000
10/26/2010	12:13:35 AM	PHl3 MFC set to  0.000000
10/26/2010	12:13:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:13:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:13:35 AM	Tube furnace set to 0
10/26/2010	12:14:35 AM	Helium valve closed
10/26/2010	12:14:35 AM	H2 valve closed
10/26/2010	12:14:35 AM	BCl3 valve closed
10/26/2010	12:14:35 AM	PH3 valve closed
10/26/2010	12:14:35 AM	SiCl4 pre valve closed
10/26/2010	12:14:35 AM	SiCl4 post valve closed
10/26/2010	12:14:35 AM	Bubbler valve closed
10/26/2010	12:14:35 AM	Main Vac valve opened
10/26/2010	12:14:35 AM	Bypass valve opened
10/26/2010	12:14:35 AM	Helium MFC set to  0.000000
10/26/2010	12:14:35 AM	H2 MFC set to  0.000000
10/26/2010	12:14:35 AM	BCl3 MFC set to  0.000000
10/26/2010	12:14:35 AM	PHl3 MFC set to  0.000000
10/26/2010	12:14:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:14:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:14:35 AM	Tube furnace set to 0
10/26/2010	12:15:35 AM	H2 valve closed
10/26/2010	12:15:35 AM	BCl3 valve closed
10/26/2010	12:15:35 AM	PH3 valve closed
10/26/2010	12:15:35 AM	SiCl4 pre valve closed
10/26/2010	12:15:35 AM	SiCl4 post valve closed
10/26/2010	12:15:35 AM	Bubbler valve closed
10/26/2010	12:15:35 AM	Helium valve opened
10/26/2010	12:15:35 AM	Main Vac valve opened
10/26/2010	12:15:35 AM	Bypass valve opened
10/26/2010	12:15:35 AM	Helium MFC set to  100.000000
10/26/2010	12:15:35 AM	H2 MFC set to  0.000000
10/26/2010	12:15:35 AM	BCl3 MFC set to  0.000000
10/26/2010	12:15:35 AM	PHl3 MFC set to  0.000000
10/26/2010	12:15:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:15:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:15:35 AM	Tube furnace set to 0
10/26/2010	12:16:35 AM	Helium valve closed
10/26/2010	12:16:35 AM	H2 valve closed
10/26/2010	12:16:35 AM	BCl3 valve closed
10/26/2010	12:16:35 AM	PH3 valve closed
10/26/2010	12:16:35 AM	SiCl4 pre valve closed
10/26/2010	12:16:35 AM	SiCl4 post valve closed
10/26/2010	12:16:35 AM	Bubbler valve closed
10/26/2010	12:16:35 AM	Main Vac valve opened
10/26/2010	12:16:35 AM	Bypass valve opened
10/26/2010	12:16:35 AM	Helium MFC set to  0.000000
10/26/2010	12:16:35 AM	H2 MFC set to  0.000000
10/26/2010	12:16:35 AM	BCl3 MFC set to  0.000000
10/26/2010	12:16:35 AM	PHl3 MFC set to  0.000000
10/26/2010	12:16:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:16:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:16:35 AM	Tube furnace set to 0
10/26/2010	12:16:36 AM	Run finished at 12:16 AM
10/26/2010	12:16:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	12:20:38 AM	Bypass valve closed
10/26/2010	12:20:39 AM	Main Vac valve closed
10/26/2010	12:21:02 AM	Main Vac valve opened
10/26/2010	12:21:02 AM	Bypass valve opened
10/26/2010	12:21:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	12:21:16 AM	Recipe started at 12:21 AM
10/26/2010	12:21:16 AM	Helium valve closed
10/26/2010	12:21:16 AM	H2 valve closed
10/26/2010	12:21:16 AM	BCl3 valve closed
10/26/2010	12:21:16 AM	PH3 valve closed
10/26/2010	12:21:16 AM	SiCl4 pre valve closed
10/26/2010	12:21:16 AM	SiCl4 post valve closed
10/26/2010	12:21:16 AM	Main Vac valve closed
10/26/2010	12:21:16 AM	Bubbler valve closed
10/26/2010	12:21:16 AM	Bypass valve opened
10/26/2010	12:21:16 AM	Helium MFC set to  0.000000
10/26/2010	12:21:16 AM	H2 MFC set to  0.000000
10/26/2010	12:21:16 AM	BCl3 MFC set to  0.000000
10/26/2010	12:21:16 AM	PHl3 MFC set to  0.000000
10/26/2010	12:21:16 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:21:16 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:21:17 AM	Tube furnace set to 0
10/26/2010	12:21:17 AM	Helium valve closed
10/26/2010	12:21:17 AM	H2 valve closed
10/26/2010	12:21:17 AM	BCl3 valve closed
10/26/2010	12:21:17 AM	PH3 valve closed
10/26/2010	12:21:17 AM	SiCl4 pre valve closed
10/26/2010	12:21:17 AM	SiCl4 post valve closed
10/26/2010	12:21:17 AM	Bubbler valve closed
10/26/2010	12:21:17 AM	Main Vac valve opened
10/26/2010	12:21:17 AM	Bypass valve opened
10/26/2010	12:21:17 AM	Helium MFC set to  0.000000
10/26/2010	12:21:17 AM	H2 MFC set to  0.000000
10/26/2010	12:21:17 AM	BCl3 MFC set to  0.000000
10/26/2010	12:21:17 AM	PHl3 MFC set to  0.000000
10/26/2010	12:21:17 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:21:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:21:17 AM	Tube furnace set to 0
10/26/2010	12:22:17 AM	H2 valve closed
10/26/2010	12:22:17 AM	BCl3 valve closed
10/26/2010	12:22:17 AM	PH3 valve closed
10/26/2010	12:22:17 AM	SiCl4 pre valve closed
10/26/2010	12:22:17 AM	SiCl4 post valve closed
10/26/2010	12:22:17 AM	Bubbler valve closed
10/26/2010	12:22:17 AM	Helium valve opened
10/26/2010	12:22:17 AM	Main Vac valve opened
10/26/2010	12:22:17 AM	Bypass valve opened
10/26/2010	12:22:17 AM	Helium MFC set to  100.000000
10/26/2010	12:22:17 AM	H2 MFC set to  0.000000
10/26/2010	12:22:17 AM	BCl3 MFC set to  0.000000
10/26/2010	12:22:17 AM	PHl3 MFC set to  0.000000
10/26/2010	12:22:17 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:22:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:22:17 AM	Tube furnace set to 0
10/26/2010	12:23:17 AM	Helium valve closed
10/26/2010	12:23:17 AM	H2 valve closed
10/26/2010	12:23:17 AM	BCl3 valve closed
10/26/2010	12:23:17 AM	PH3 valve closed
10/26/2010	12:23:17 AM	SiCl4 pre valve closed
10/26/2010	12:23:17 AM	SiCl4 post valve closed
10/26/2010	12:23:17 AM	Bubbler valve closed
10/26/2010	12:23:17 AM	Main Vac valve opened
10/26/2010	12:23:17 AM	Bypass valve opened
10/26/2010	12:23:17 AM	Helium MFC set to  0.000000
10/26/2010	12:23:17 AM	H2 MFC set to  0.000000
10/26/2010	12:23:17 AM	BCl3 MFC set to  0.000000
10/26/2010	12:23:17 AM	PHl3 MFC set to  0.000000
10/26/2010	12:23:17 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:23:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:23:17 AM	Tube furnace set to 0
10/26/2010	12:24:17 AM	H2 valve closed
10/26/2010	12:24:17 AM	BCl3 valve closed
10/26/2010	12:24:17 AM	PH3 valve closed
10/26/2010	12:24:17 AM	SiCl4 pre valve closed
10/26/2010	12:24:17 AM	SiCl4 post valve closed
10/26/2010	12:24:17 AM	Bubbler valve closed
10/26/2010	12:24:17 AM	Helium valve opened
10/26/2010	12:24:17 AM	Main Vac valve opened
10/26/2010	12:24:17 AM	Bypass valve opened
10/26/2010	12:24:17 AM	Helium MFC set to  100.000000
10/26/2010	12:24:17 AM	H2 MFC set to  0.000000
10/26/2010	12:24:17 AM	BCl3 MFC set to  0.000000
10/26/2010	12:24:17 AM	PHl3 MFC set to  0.000000
10/26/2010	12:24:17 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:24:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:24:18 AM	Tube furnace set to 0
10/26/2010	12:25:18 AM	Helium valve closed
10/26/2010	12:25:18 AM	H2 valve closed
10/26/2010	12:25:18 AM	BCl3 valve closed
10/26/2010	12:25:18 AM	PH3 valve closed
10/26/2010	12:25:18 AM	SiCl4 pre valve closed
10/26/2010	12:25:18 AM	SiCl4 post valve closed
10/26/2010	12:25:18 AM	Bubbler valve closed
10/26/2010	12:25:18 AM	Main Vac valve opened
10/26/2010	12:25:18 AM	Bypass valve opened
10/26/2010	12:25:18 AM	Helium MFC set to  0.000000
10/26/2010	12:25:18 AM	H2 MFC set to  0.000000
10/26/2010	12:25:18 AM	BCl3 MFC set to  0.000000
10/26/2010	12:25:18 AM	PHl3 MFC set to  0.000000
10/26/2010	12:25:18 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:25:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:25:18 AM	Tube furnace set to 0
10/26/2010	12:26:18 AM	H2 valve closed
10/26/2010	12:26:18 AM	BCl3 valve closed
10/26/2010	12:26:18 AM	PH3 valve closed
10/26/2010	12:26:18 AM	SiCl4 pre valve closed
10/26/2010	12:26:18 AM	SiCl4 post valve closed
10/26/2010	12:26:18 AM	Bubbler valve closed
10/26/2010	12:26:18 AM	Helium valve opened
10/26/2010	12:26:18 AM	Main Vac valve opened
10/26/2010	12:26:18 AM	Bypass valve opened
10/26/2010	12:26:18 AM	Helium MFC set to  100.000000
10/26/2010	12:26:18 AM	H2 MFC set to  0.000000
10/26/2010	12:26:18 AM	BCl3 MFC set to  0.000000
10/26/2010	12:26:18 AM	PHl3 MFC set to  0.000000
10/26/2010	12:26:18 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:26:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:26:18 AM	Tube furnace set to 0
10/26/2010	12:27:18 AM	Helium valve closed
10/26/2010	12:27:18 AM	H2 valve closed
10/26/2010	12:27:18 AM	BCl3 valve closed
10/26/2010	12:27:18 AM	PH3 valve closed
10/26/2010	12:27:18 AM	SiCl4 pre valve closed
10/26/2010	12:27:18 AM	SiCl4 post valve closed
10/26/2010	12:27:18 AM	Bubbler valve closed
10/26/2010	12:27:18 AM	Main Vac valve opened
10/26/2010	12:27:18 AM	Bypass valve opened
10/26/2010	12:27:18 AM	Helium MFC set to  0.000000
10/26/2010	12:27:18 AM	H2 MFC set to  0.000000
10/26/2010	12:27:18 AM	BCl3 MFC set to  0.000000
10/26/2010	12:27:18 AM	PHl3 MFC set to  0.000000
10/26/2010	12:27:18 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:27:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:27:18 AM	Tube furnace set to 0
10/26/2010	12:28:18 AM	H2 valve closed
10/26/2010	12:28:18 AM	BCl3 valve closed
10/26/2010	12:28:18 AM	PH3 valve closed
10/26/2010	12:28:18 AM	SiCl4 pre valve closed
10/26/2010	12:28:18 AM	SiCl4 post valve closed
10/26/2010	12:28:18 AM	Bubbler valve closed
10/26/2010	12:28:18 AM	Helium valve opened
10/26/2010	12:28:18 AM	Main Vac valve opened
10/26/2010	12:28:18 AM	Bypass valve opened
10/26/2010	12:28:18 AM	Helium MFC set to  100.000000
10/26/2010	12:28:18 AM	H2 MFC set to  0.000000
10/26/2010	12:28:18 AM	BCl3 MFC set to  0.000000
10/26/2010	12:28:18 AM	PHl3 MFC set to  0.000000
10/26/2010	12:28:18 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:28:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:28:18 AM	Tube furnace set to 0
10/26/2010	12:29:18 AM	Helium valve closed
10/26/2010	12:29:18 AM	H2 valve closed
10/26/2010	12:29:18 AM	BCl3 valve closed
10/26/2010	12:29:18 AM	PH3 valve closed
10/26/2010	12:29:18 AM	SiCl4 pre valve closed
10/26/2010	12:29:18 AM	SiCl4 post valve closed
10/26/2010	12:29:18 AM	Bubbler valve closed
10/26/2010	12:29:18 AM	Main Vac valve opened
10/26/2010	12:29:18 AM	Bypass valve opened
10/26/2010	12:29:18 AM	Helium MFC set to  0.000000
10/26/2010	12:29:18 AM	H2 MFC set to  0.000000
10/26/2010	12:29:18 AM	BCl3 MFC set to  0.000000
10/26/2010	12:29:18 AM	PHl3 MFC set to  0.000000
10/26/2010	12:29:18 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:29:18 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:29:19 AM	Tube furnace set to 0
10/26/2010	12:30:19 AM	H2 valve closed
10/26/2010	12:30:19 AM	BCl3 valve closed
10/26/2010	12:30:19 AM	PH3 valve closed
10/26/2010	12:30:19 AM	SiCl4 pre valve closed
10/26/2010	12:30:19 AM	SiCl4 post valve closed
10/26/2010	12:30:19 AM	Bubbler valve closed
10/26/2010	12:30:19 AM	Helium valve opened
10/26/2010	12:30:19 AM	Main Vac valve opened
10/26/2010	12:30:19 AM	Bypass valve opened
10/26/2010	12:30:19 AM	Helium MFC set to  100.000000
10/26/2010	12:30:19 AM	H2 MFC set to  0.000000
10/26/2010	12:30:19 AM	BCl3 MFC set to  0.000000
10/26/2010	12:30:19 AM	PHl3 MFC set to  0.000000
10/26/2010	12:30:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:30:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:30:19 AM	Tube furnace set to 0
10/26/2010	12:31:19 AM	Helium valve closed
10/26/2010	12:31:19 AM	H2 valve closed
10/26/2010	12:31:19 AM	BCl3 valve closed
10/26/2010	12:31:19 AM	PH3 valve closed
10/26/2010	12:31:19 AM	SiCl4 pre valve closed
10/26/2010	12:31:19 AM	SiCl4 post valve closed
10/26/2010	12:31:19 AM	Bubbler valve closed
10/26/2010	12:31:19 AM	Main Vac valve opened
10/26/2010	12:31:19 AM	Bypass valve opened
10/26/2010	12:31:19 AM	Helium MFC set to  0.000000
10/26/2010	12:31:19 AM	H2 MFC set to  0.000000
10/26/2010	12:31:19 AM	BCl3 MFC set to  0.000000
10/26/2010	12:31:19 AM	PHl3 MFC set to  0.000000
10/26/2010	12:31:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:31:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:31:19 AM	Tube furnace set to 0
10/26/2010	12:32:19 AM	H2 valve closed
10/26/2010	12:32:19 AM	BCl3 valve closed
10/26/2010	12:32:19 AM	PH3 valve closed
10/26/2010	12:32:19 AM	SiCl4 pre valve closed
10/26/2010	12:32:19 AM	SiCl4 post valve closed
10/26/2010	12:32:19 AM	Bubbler valve closed
10/26/2010	12:32:19 AM	Helium valve opened
10/26/2010	12:32:19 AM	Main Vac valve opened
10/26/2010	12:32:19 AM	Bypass valve opened
10/26/2010	12:32:19 AM	Helium MFC set to  100.000000
10/26/2010	12:32:19 AM	H2 MFC set to  0.000000
10/26/2010	12:32:19 AM	BCl3 MFC set to  0.000000
10/26/2010	12:32:19 AM	PHl3 MFC set to  0.000000
10/26/2010	12:32:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:32:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:32:19 AM	Tube furnace set to 0
10/26/2010	12:33:19 AM	Helium valve closed
10/26/2010	12:33:19 AM	H2 valve closed
10/26/2010	12:33:19 AM	BCl3 valve closed
10/26/2010	12:33:19 AM	PH3 valve closed
10/26/2010	12:33:19 AM	SiCl4 pre valve closed
10/26/2010	12:33:19 AM	SiCl4 post valve closed
10/26/2010	12:33:19 AM	Bubbler valve closed
10/26/2010	12:33:19 AM	Main Vac valve opened
10/26/2010	12:33:19 AM	Bypass valve opened
10/26/2010	12:33:19 AM	Helium MFC set to  0.000000
10/26/2010	12:33:19 AM	H2 MFC set to  0.000000
10/26/2010	12:33:19 AM	BCl3 MFC set to  0.000000
10/26/2010	12:33:19 AM	PHl3 MFC set to  0.000000
10/26/2010	12:33:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:33:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:33:19 AM	Tube furnace set to 0
10/26/2010	12:34:19 AM	H2 valve closed
10/26/2010	12:34:19 AM	BCl3 valve closed
10/26/2010	12:34:19 AM	PH3 valve closed
10/26/2010	12:34:19 AM	SiCl4 pre valve closed
10/26/2010	12:34:19 AM	SiCl4 post valve closed
10/26/2010	12:34:19 AM	Bubbler valve closed
10/26/2010	12:34:19 AM	Helium valve opened
10/26/2010	12:34:19 AM	Main Vac valve opened
10/26/2010	12:34:19 AM	Bypass valve opened
10/26/2010	12:34:19 AM	Helium MFC set to  100.000000
10/26/2010	12:34:19 AM	H2 MFC set to  0.000000
10/26/2010	12:34:19 AM	BCl3 MFC set to  0.000000
10/26/2010	12:34:19 AM	PHl3 MFC set to  0.000000
10/26/2010	12:34:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:34:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:34:19 AM	Tube furnace set to 0
10/26/2010	12:35:20 AM	Helium valve closed
10/26/2010	12:35:20 AM	H2 valve closed
10/26/2010	12:35:20 AM	BCl3 valve closed
10/26/2010	12:35:20 AM	PH3 valve closed
10/26/2010	12:35:20 AM	SiCl4 pre valve closed
10/26/2010	12:35:20 AM	SiCl4 post valve closed
10/26/2010	12:35:20 AM	Bubbler valve closed
10/26/2010	12:35:20 AM	Main Vac valve opened
10/26/2010	12:35:20 AM	Bypass valve opened
10/26/2010	12:35:20 AM	Helium MFC set to  0.000000
10/26/2010	12:35:20 AM	H2 MFC set to  0.000000
10/26/2010	12:35:20 AM	BCl3 MFC set to  0.000000
10/26/2010	12:35:20 AM	PHl3 MFC set to  0.000000
10/26/2010	12:35:20 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:35:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:35:20 AM	Tube furnace set to 0
10/26/2010	12:36:20 AM	H2 valve closed
10/26/2010	12:36:20 AM	BCl3 valve closed
10/26/2010	12:36:20 AM	PH3 valve closed
10/26/2010	12:36:20 AM	SiCl4 pre valve closed
10/26/2010	12:36:20 AM	SiCl4 post valve closed
10/26/2010	12:36:20 AM	Bubbler valve closed
10/26/2010	12:36:20 AM	Helium valve opened
10/26/2010	12:36:20 AM	Main Vac valve opened
10/26/2010	12:36:20 AM	Bypass valve opened
10/26/2010	12:36:20 AM	Helium MFC set to  100.000000
10/26/2010	12:36:20 AM	H2 MFC set to  0.000000
10/26/2010	12:36:20 AM	BCl3 MFC set to  0.000000
10/26/2010	12:36:20 AM	PHl3 MFC set to  0.000000
10/26/2010	12:36:20 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:36:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:36:20 AM	Tube furnace set to 0
10/26/2010	12:37:20 AM	Helium valve closed
10/26/2010	12:37:20 AM	H2 valve closed
10/26/2010	12:37:20 AM	BCl3 valve closed
10/26/2010	12:37:20 AM	PH3 valve closed
10/26/2010	12:37:20 AM	SiCl4 pre valve closed
10/26/2010	12:37:20 AM	SiCl4 post valve closed
10/26/2010	12:37:20 AM	Bubbler valve closed
10/26/2010	12:37:20 AM	Main Vac valve opened
10/26/2010	12:37:20 AM	Bypass valve opened
10/26/2010	12:37:20 AM	Helium MFC set to  0.000000
10/26/2010	12:37:20 AM	H2 MFC set to  0.000000
10/26/2010	12:37:20 AM	BCl3 MFC set to  0.000000
10/26/2010	12:37:20 AM	PHl3 MFC set to  0.000000
10/26/2010	12:37:20 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:37:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:37:20 AM	Tube furnace set to 0
10/26/2010	12:38:20 AM	H2 valve closed
10/26/2010	12:38:20 AM	BCl3 valve closed
10/26/2010	12:38:20 AM	PH3 valve closed
10/26/2010	12:38:20 AM	SiCl4 pre valve closed
10/26/2010	12:38:20 AM	SiCl4 post valve closed
10/26/2010	12:38:20 AM	Bubbler valve closed
10/26/2010	12:38:20 AM	Helium valve opened
10/26/2010	12:38:20 AM	Main Vac valve opened
10/26/2010	12:38:20 AM	Bypass valve opened
10/26/2010	12:38:20 AM	Helium MFC set to  100.000000
10/26/2010	12:38:20 AM	H2 MFC set to  0.000000
10/26/2010	12:38:20 AM	BCl3 MFC set to  0.000000
10/26/2010	12:38:20 AM	PHl3 MFC set to  0.000000
10/26/2010	12:38:20 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:38:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:38:20 AM	Tube furnace set to 0
10/26/2010	12:39:20 AM	Helium valve closed
10/26/2010	12:39:20 AM	H2 valve closed
10/26/2010	12:39:20 AM	BCl3 valve closed
10/26/2010	12:39:20 AM	PH3 valve closed
10/26/2010	12:39:20 AM	SiCl4 pre valve closed
10/26/2010	12:39:20 AM	SiCl4 post valve closed
10/26/2010	12:39:20 AM	Bubbler valve closed
10/26/2010	12:39:20 AM	Main Vac valve opened
10/26/2010	12:39:20 AM	Bypass valve opened
10/26/2010	12:39:20 AM	Helium MFC set to  0.000000
10/26/2010	12:39:20 AM	H2 MFC set to  0.000000
10/26/2010	12:39:20 AM	BCl3 MFC set to  0.000000
10/26/2010	12:39:20 AM	PHl3 MFC set to  0.000000
10/26/2010	12:39:20 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:39:20 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:39:20 AM	Tube furnace set to 0
10/26/2010	12:40:20 AM	H2 valve closed
10/26/2010	12:40:20 AM	BCl3 valve closed
10/26/2010	12:40:20 AM	PH3 valve closed
10/26/2010	12:40:21 AM	SiCl4 pre valve closed
10/26/2010	12:40:21 AM	SiCl4 post valve closed
10/26/2010	12:40:21 AM	Bubbler valve closed
10/26/2010	12:40:21 AM	Helium valve opened
10/26/2010	12:40:21 AM	Main Vac valve opened
10/26/2010	12:40:21 AM	Bypass valve opened
10/26/2010	12:40:21 AM	Helium MFC set to  100.000000
10/26/2010	12:40:21 AM	H2 MFC set to  0.000000
10/26/2010	12:40:21 AM	BCl3 MFC set to  0.000000
10/26/2010	12:40:21 AM	PHl3 MFC set to  0.000000
10/26/2010	12:40:21 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:40:21 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:40:21 AM	Tube furnace set to 0
10/26/2010	12:41:21 AM	Helium valve closed
10/26/2010	12:41:21 AM	H2 valve closed
10/26/2010	12:41:21 AM	BCl3 valve closed
10/26/2010	12:41:21 AM	PH3 valve closed
10/26/2010	12:41:21 AM	SiCl4 pre valve closed
10/26/2010	12:41:21 AM	SiCl4 post valve closed
10/26/2010	12:41:21 AM	Bubbler valve closed
10/26/2010	12:41:21 AM	Main Vac valve opened
10/26/2010	12:41:21 AM	Bypass valve opened
10/26/2010	12:41:21 AM	Helium MFC set to  0.000000
10/26/2010	12:41:21 AM	H2 MFC set to  0.000000
10/26/2010	12:41:21 AM	BCl3 MFC set to  0.000000
10/26/2010	12:41:21 AM	PHl3 MFC set to  0.000000
10/26/2010	12:41:21 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:41:21 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:41:21 AM	Tube furnace set to 0
10/26/2010	12:41:22 AM	Run finished at 12:41 AM
10/26/2010	12:41:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	12:43:07 AM	Recipe started at 12:43 AM
10/26/2010	12:43:07 AM	Helium valve closed
10/26/2010	12:43:07 AM	BCl3 valve closed
10/26/2010	12:43:07 AM	PH3 valve closed
10/26/2010	12:43:07 AM	SiCl4 pre valve closed
10/26/2010	12:43:07 AM	SiCl4 post valve closed
10/26/2010	12:43:07 AM	Main Vac valve closed
10/26/2010	12:43:07 AM	Bypass valve closed
10/26/2010	12:43:07 AM	Bubbler valve closed
10/26/2010	12:43:07 AM	H2 valve opened
10/26/2010	12:43:07 AM	Helium MFC set to  0.000000
10/26/2010	12:43:07 AM	H2 MFC set to  500.000000
10/26/2010	12:43:07 AM	BCl3 MFC set to  0.000000
10/26/2010	12:43:07 AM	PHl3 MFC set to  0.000000
10/26/2010	12:43:07 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:43:07 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:43:07 AM	Tube furnace set to 0
10/26/2010	12:44:24 AM	Helium valve closed
10/26/2010	12:44:24 AM	BCl3 valve closed
10/26/2010	12:44:24 AM	PH3 valve closed
10/26/2010	12:44:24 AM	SiCl4 pre valve closed
10/26/2010	12:44:24 AM	SiCl4 post valve closed
10/26/2010	12:44:24 AM	Main Vac valve closed
10/26/2010	12:44:24 AM	Bypass valve closed
10/26/2010	12:44:24 AM	H2 valve opened
10/26/2010	12:44:24 AM	Bubbler valve opened
10/26/2010	12:44:24 AM	Helium MFC set to  0.000000
10/26/2010	12:44:24 AM	H2 MFC set to  500.000000
10/26/2010	12:44:24 AM	BCl3 MFC set to  0.000000
10/26/2010	12:44:24 AM	PHl3 MFC set to  0.000000
10/26/2010	12:44:24 AM	SiCl4 MFC set to  0.000000
10/26/2010	12:44:24 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:44:24 AM	Tube furnace set to 1000
10/26/2010	1:04:24 AM	Helium valve closed
10/26/2010	1:04:24 AM	BCl3 valve closed
10/26/2010	1:04:24 AM	Main Vac valve closed
10/26/2010	1:04:24 AM	Bypass valve closed
10/26/2010	1:04:24 AM	H2 valve opened
10/26/2010	1:04:24 AM	PH3 valve opened
10/26/2010	1:04:24 AM	SiCl4 pre valve opened
10/26/2010	1:04:24 AM	SiCl4 post valve opened
10/26/2010	1:04:24 AM	Bubbler valve opened
10/26/2010	1:04:24 AM	Helium MFC set to  0.000000
10/26/2010	1:04:24 AM	H2 MFC set to  500.000000
10/26/2010	1:04:24 AM	BCl3 MFC set to  0.000000
10/26/2010	1:04:24 AM	PHl3 MFC set to  1.000000
10/26/2010	1:04:24 AM	SiCl4 MFC set to  50.000000
10/26/2010	1:04:24 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:04:24 AM	Tube furnace set to 1000
10/26/2010	1:19:24 AM	H2 valve closed
10/26/2010	1:19:24 AM	BCl3 valve closed
10/26/2010	1:19:24 AM	PH3 valve closed
10/26/2010	1:19:24 AM	SiCl4 pre valve closed
10/26/2010	1:19:24 AM	SiCl4 post valve closed
10/26/2010	1:19:24 AM	Main Vac valve closed
10/26/2010	1:19:24 AM	Bypass valve closed
10/26/2010	1:19:24 AM	Helium valve opened
10/26/2010	1:19:24 AM	Bubbler valve opened
10/26/2010	1:19:24 AM	Helium MFC set to  500.000000
10/26/2010	1:19:24 AM	H2 MFC set to  0.000000
10/26/2010	1:19:24 AM	BCl3 MFC set to  0.000000
10/26/2010	1:19:24 AM	PHl3 MFC set to  0.000000
10/26/2010	1:19:24 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:19:24 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:19:24 AM	Tube furnace set to 0
10/26/2010	1:39:24 AM	Helium valve closed
10/26/2010	1:39:24 AM	H2 valve closed
10/26/2010	1:39:24 AM	BCl3 valve closed
10/26/2010	1:39:24 AM	PH3 valve closed
10/26/2010	1:39:24 AM	SiCl4 pre valve closed
10/26/2010	1:39:24 AM	SiCl4 post valve closed
10/26/2010	1:39:24 AM	Main Vac valve closed
10/26/2010	1:39:24 AM	Bypass valve closed
10/26/2010	1:39:24 AM	Bubbler valve closed
10/26/2010	1:39:24 AM	Helium MFC set to  0.000000
10/26/2010	1:39:24 AM	H2 MFC set to  0.000000
10/26/2010	1:39:24 AM	BCl3 MFC set to  0.000000
10/26/2010	1:39:24 AM	PHl3 MFC set to  0.000000
10/26/2010	1:39:24 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:39:24 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:39:24 AM	Tube furnace set to 0
10/26/2010	1:39:25 AM	Run finished at 1:39 AM
10/26/2010	1:54:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	1:54:17 AM	Recipe started at 1:54 AM
10/26/2010	1:54:17 AM	H2 valve closed
10/26/2010	1:54:17 AM	BCl3 valve closed
10/26/2010	1:54:17 AM	PH3 valve closed
10/26/2010	1:54:17 AM	SiCl4 pre valve closed
10/26/2010	1:54:17 AM	SiCl4 post valve closed
10/26/2010	1:54:17 AM	Main Vac valve closed
10/26/2010	1:54:17 AM	Bypass valve closed
10/26/2010	1:54:17 AM	Bubbler valve closed
10/26/2010	1:54:17 AM	Helium valve opened
10/26/2010	1:54:17 AM	Helium MFC set to  500.000000
10/26/2010	1:54:17 AM	H2 MFC set to  0.000000
10/26/2010	1:54:17 AM	BCl3 MFC set to  0.000000
10/26/2010	1:54:17 AM	PHl3 MFC set to  0.000000
10/26/2010	1:54:17 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:54:17 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:54:18 AM	Tube furnace set to 0
10/26/2010	1:54:22 AM	Helium valve closed
10/26/2010	1:54:22 AM	H2 valve closed
10/26/2010	1:54:22 AM	BCl3 valve closed
10/26/2010	1:54:22 AM	PH3 valve closed
10/26/2010	1:54:22 AM	SiCl4 pre valve closed
10/26/2010	1:54:22 AM	SiCl4 post valve closed
10/26/2010	1:54:22 AM	Main Vac valve closed
10/26/2010	1:54:22 AM	Bypass valve closed
10/26/2010	1:54:22 AM	Bubbler valve closed
10/26/2010	1:54:22 AM	Helium MFC set to  0.000000
10/26/2010	1:54:22 AM	H2 MFC set to  0.000000
10/26/2010	1:54:22 AM	BCl3 MFC set to  0.000000
10/26/2010	1:54:22 AM	PHl3 MFC set to  0.000000
10/26/2010	1:54:22 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:54:22 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:54:22 AM	Tube furnace set to 0
10/26/2010	1:54:22 AM	Run finished at 1:54 AM
10/26/2010	1:54:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	1:58:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	1:58:30 AM	Recipe started at 1:58 AM
10/26/2010	1:58:30 AM	Helium valve closed
10/26/2010	1:58:30 AM	H2 valve closed
10/26/2010	1:58:30 AM	BCl3 valve closed
10/26/2010	1:58:30 AM	PH3 valve closed
10/26/2010	1:58:30 AM	SiCl4 pre valve closed
10/26/2010	1:58:30 AM	SiCl4 post valve closed
10/26/2010	1:58:30 AM	Main Vac valve closed
10/26/2010	1:58:30 AM	Bubbler valve closed
10/26/2010	1:58:30 AM	Bypass valve opened
10/26/2010	1:58:30 AM	Helium MFC set to  0.000000
10/26/2010	1:58:30 AM	H2 MFC set to  0.000000
10/26/2010	1:58:30 AM	BCl3 MFC set to  0.000000
10/26/2010	1:58:30 AM	PHl3 MFC set to  0.000000
10/26/2010	1:58:30 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:58:30 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:58:30 AM	Tube furnace set to 0
10/26/2010	1:59:19 AM	Helium valve closed
10/26/2010	1:59:19 AM	H2 valve closed
10/26/2010	1:59:19 AM	BCl3 valve closed
10/26/2010	1:59:19 AM	PH3 valve closed
10/26/2010	1:59:19 AM	SiCl4 pre valve closed
10/26/2010	1:59:19 AM	SiCl4 post valve closed
10/26/2010	1:59:19 AM	Bubbler valve closed
10/26/2010	1:59:19 AM	Main Vac valve opened
10/26/2010	1:59:19 AM	Bypass valve opened
10/26/2010	1:59:19 AM	Helium MFC set to  0.000000
10/26/2010	1:59:19 AM	H2 MFC set to  0.000000
10/26/2010	1:59:19 AM	BCl3 MFC set to  0.000000
10/26/2010	1:59:19 AM	PHl3 MFC set to  0.000000
10/26/2010	1:59:19 AM	SiCl4 MFC set to  0.000000
10/26/2010	1:59:19 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:59:19 AM	Tube furnace set to 0
10/26/2010	1:59:19 AM	Run finished at 1:59 AM
10/26/2010	1:59:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	2:07:15 AM	Bypass valve closed
10/26/2010	2:07:16 AM	Main Vac valve closed
10/26/2010	2:07:33 AM	Main Vac valve opened
10/26/2010	2:07:34 AM	Bypass valve opened
10/26/2010	9:26:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	9:26:32 AM	Recipe started at 9:26 AM
10/26/2010	9:26:32 AM	H2 valve closed
10/26/2010	9:26:32 AM	BCl3 valve closed
10/26/2010	9:26:32 AM	PH3 valve closed
10/26/2010	9:26:32 AM	SiCl4 pre valve closed
10/26/2010	9:26:32 AM	SiCl4 post valve closed
10/26/2010	9:26:32 AM	Main Vac valve closed
10/26/2010	9:26:32 AM	Bypass valve closed
10/26/2010	9:26:32 AM	Bubbler valve closed
10/26/2010	9:26:32 AM	Helium valve opened
10/26/2010	9:26:32 AM	Helium MFC set to  500.000000
10/26/2010	9:26:32 AM	H2 MFC set to  0.000000
10/26/2010	9:26:32 AM	BCl3 MFC set to  0.000000
10/26/2010	9:26:32 AM	PHl3 MFC set to  0.000000
10/26/2010	9:26:32 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:26:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:26:32 AM	Tube furnace set to 0
10/26/2010	9:27:51 AM	Helium valve closed
10/26/2010	9:27:51 AM	H2 valve closed
10/26/2010	9:27:51 AM	BCl3 valve closed
10/26/2010	9:27:51 AM	PH3 valve closed
10/26/2010	9:27:51 AM	SiCl4 pre valve closed
10/26/2010	9:27:51 AM	SiCl4 post valve closed
10/26/2010	9:27:51 AM	Main Vac valve closed
10/26/2010	9:27:51 AM	Bypass valve closed
10/26/2010	9:27:51 AM	Bubbler valve closed
10/26/2010	9:27:51 AM	Helium MFC set to  0.000000
10/26/2010	9:27:51 AM	H2 MFC set to  0.000000
10/26/2010	9:27:51 AM	BCl3 MFC set to  0.000000
10/26/2010	9:27:51 AM	PHl3 MFC set to  0.000000
10/26/2010	9:27:51 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:27:51 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:27:52 AM	Tube furnace set to 0
10/26/2010	9:27:52 AM	Run finished at 9:27 AM
10/26/2010	9:27:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	9:41:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	9:41:08 AM	Recipe started at 9:41 AM
10/26/2010	9:41:08 AM	Helium valve closed
10/26/2010	9:41:08 AM	H2 valve closed
10/26/2010	9:41:08 AM	BCl3 valve closed
10/26/2010	9:41:08 AM	PH3 valve closed
10/26/2010	9:41:08 AM	SiCl4 pre valve closed
10/26/2010	9:41:08 AM	SiCl4 post valve closed
10/26/2010	9:41:08 AM	Main Vac valve closed
10/26/2010	9:41:08 AM	Bubbler valve closed
10/26/2010	9:41:08 AM	Bypass valve opened
10/26/2010	9:41:08 AM	Helium MFC set to  0.000000
10/26/2010	9:41:08 AM	H2 MFC set to  0.000000
10/26/2010	9:41:08 AM	BCl3 MFC set to  0.000000
10/26/2010	9:41:08 AM	PHl3 MFC set to  0.000000
10/26/2010	9:41:08 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:41:08 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:41:08 AM	Tube furnace set to 0
10/26/2010	9:41:57 AM	Helium valve closed
10/26/2010	9:41:57 AM	H2 valve closed
10/26/2010	9:41:57 AM	BCl3 valve closed
10/26/2010	9:41:57 AM	PH3 valve closed
10/26/2010	9:41:57 AM	SiCl4 pre valve closed
10/26/2010	9:41:57 AM	SiCl4 post valve closed
10/26/2010	9:41:57 AM	Bubbler valve closed
10/26/2010	9:41:57 AM	Main Vac valve opened
10/26/2010	9:41:57 AM	Bypass valve opened
10/26/2010	9:41:57 AM	Helium MFC set to  0.000000
10/26/2010	9:41:57 AM	H2 MFC set to  0.000000
10/26/2010	9:41:57 AM	BCl3 MFC set to  0.000000
10/26/2010	9:41:57 AM	PHl3 MFC set to  0.000000
10/26/2010	9:41:57 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:41:57 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:41:57 AM	Tube furnace set to 0
10/26/2010	9:41:58 AM	Run finished at 9:41 AM
10/26/2010	9:41:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	9:42:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	9:42:32 AM	Recipe started at 9:42 AM
10/26/2010	9:42:32 AM	Helium valve closed
10/26/2010	9:42:32 AM	H2 valve closed
10/26/2010	9:42:32 AM	BCl3 valve closed
10/26/2010	9:42:32 AM	PH3 valve closed
10/26/2010	9:42:32 AM	SiCl4 pre valve closed
10/26/2010	9:42:32 AM	SiCl4 post valve closed
10/26/2010	9:42:32 AM	Main Vac valve closed
10/26/2010	9:42:32 AM	Bubbler valve closed
10/26/2010	9:42:32 AM	Bypass valve opened
10/26/2010	9:42:32 AM	Helium MFC set to  0.000000
10/26/2010	9:42:32 AM	H2 MFC set to  0.000000
10/26/2010	9:42:32 AM	BCl3 MFC set to  0.000000
10/26/2010	9:42:32 AM	PHl3 MFC set to  0.000000
10/26/2010	9:42:32 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:42:32 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:42:33 AM	Tube furnace set to 0
10/26/2010	9:42:33 AM	Helium valve closed
10/26/2010	9:42:33 AM	H2 valve closed
10/26/2010	9:42:33 AM	BCl3 valve closed
10/26/2010	9:42:33 AM	PH3 valve closed
10/26/2010	9:42:33 AM	SiCl4 pre valve closed
10/26/2010	9:42:33 AM	SiCl4 post valve closed
10/26/2010	9:42:33 AM	Bubbler valve closed
10/26/2010	9:42:33 AM	Main Vac valve opened
10/26/2010	9:42:33 AM	Bypass valve opened
10/26/2010	9:42:33 AM	Helium MFC set to  0.000000
10/26/2010	9:42:33 AM	H2 MFC set to  0.000000
10/26/2010	9:42:33 AM	BCl3 MFC set to  0.000000
10/26/2010	9:42:33 AM	PHl3 MFC set to  0.000000
10/26/2010	9:42:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:42:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:42:33 AM	Tube furnace set to 0
10/26/2010	9:43:33 AM	H2 valve closed
10/26/2010	9:43:33 AM	BCl3 valve closed
10/26/2010	9:43:33 AM	PH3 valve closed
10/26/2010	9:43:33 AM	SiCl4 pre valve closed
10/26/2010	9:43:33 AM	SiCl4 post valve closed
10/26/2010	9:43:33 AM	Bubbler valve closed
10/26/2010	9:43:33 AM	Helium valve opened
10/26/2010	9:43:33 AM	Main Vac valve opened
10/26/2010	9:43:33 AM	Bypass valve opened
10/26/2010	9:43:33 AM	Helium MFC set to  100.000000
10/26/2010	9:43:33 AM	H2 MFC set to  0.000000
10/26/2010	9:43:33 AM	BCl3 MFC set to  0.000000
10/26/2010	9:43:33 AM	PHl3 MFC set to  0.000000
10/26/2010	9:43:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:43:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:43:33 AM	Tube furnace set to 0
10/26/2010	9:44:33 AM	Helium valve closed
10/26/2010	9:44:33 AM	H2 valve closed
10/26/2010	9:44:33 AM	BCl3 valve closed
10/26/2010	9:44:33 AM	PH3 valve closed
10/26/2010	9:44:33 AM	SiCl4 pre valve closed
10/26/2010	9:44:33 AM	SiCl4 post valve closed
10/26/2010	9:44:33 AM	Bubbler valve closed
10/26/2010	9:44:33 AM	Main Vac valve opened
10/26/2010	9:44:33 AM	Bypass valve opened
10/26/2010	9:44:33 AM	Helium MFC set to  0.000000
10/26/2010	9:44:33 AM	H2 MFC set to  0.000000
10/26/2010	9:44:33 AM	BCl3 MFC set to  0.000000
10/26/2010	9:44:33 AM	PHl3 MFC set to  0.000000
10/26/2010	9:44:33 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:44:33 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:44:33 AM	Tube furnace set to 0
10/26/2010	9:45:33 AM	H2 valve closed
10/26/2010	9:45:33 AM	BCl3 valve closed
10/26/2010	9:45:34 AM	PH3 valve closed
10/26/2010	9:45:34 AM	SiCl4 pre valve closed
10/26/2010	9:45:34 AM	SiCl4 post valve closed
10/26/2010	9:45:34 AM	Bubbler valve closed
10/26/2010	9:45:34 AM	Helium valve opened
10/26/2010	9:45:34 AM	Main Vac valve opened
10/26/2010	9:45:34 AM	Bypass valve opened
10/26/2010	9:45:34 AM	Helium MFC set to  100.000000
10/26/2010	9:45:34 AM	H2 MFC set to  0.000000
10/26/2010	9:45:34 AM	BCl3 MFC set to  0.000000
10/26/2010	9:45:34 AM	PHl3 MFC set to  0.000000
10/26/2010	9:45:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:45:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:45:34 AM	Tube furnace set to 0
10/26/2010	9:46:34 AM	Helium valve closed
10/26/2010	9:46:34 AM	H2 valve closed
10/26/2010	9:46:34 AM	BCl3 valve closed
10/26/2010	9:46:34 AM	PH3 valve closed
10/26/2010	9:46:34 AM	SiCl4 pre valve closed
10/26/2010	9:46:34 AM	SiCl4 post valve closed
10/26/2010	9:46:34 AM	Bubbler valve closed
10/26/2010	9:46:34 AM	Main Vac valve opened
10/26/2010	9:46:34 AM	Bypass valve opened
10/26/2010	9:46:34 AM	Helium MFC set to  0.000000
10/26/2010	9:46:34 AM	H2 MFC set to  0.000000
10/26/2010	9:46:34 AM	BCl3 MFC set to  0.000000
10/26/2010	9:46:34 AM	PHl3 MFC set to  0.000000
10/26/2010	9:46:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:46:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:46:34 AM	Tube furnace set to 0
10/26/2010	9:47:34 AM	H2 valve closed
10/26/2010	9:47:34 AM	BCl3 valve closed
10/26/2010	9:47:34 AM	PH3 valve closed
10/26/2010	9:47:34 AM	SiCl4 pre valve closed
10/26/2010	9:47:34 AM	SiCl4 post valve closed
10/26/2010	9:47:34 AM	Bubbler valve closed
10/26/2010	9:47:34 AM	Helium valve opened
10/26/2010	9:47:34 AM	Main Vac valve opened
10/26/2010	9:47:34 AM	Bypass valve opened
10/26/2010	9:47:34 AM	Helium MFC set to  100.000000
10/26/2010	9:47:34 AM	H2 MFC set to  0.000000
10/26/2010	9:47:34 AM	BCl3 MFC set to  0.000000
10/26/2010	9:47:34 AM	PHl3 MFC set to  0.000000
10/26/2010	9:47:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:47:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:47:34 AM	Tube furnace set to 0
10/26/2010	9:48:34 AM	Helium valve closed
10/26/2010	9:48:34 AM	H2 valve closed
10/26/2010	9:48:34 AM	BCl3 valve closed
10/26/2010	9:48:34 AM	PH3 valve closed
10/26/2010	9:48:34 AM	SiCl4 pre valve closed
10/26/2010	9:48:34 AM	SiCl4 post valve closed
10/26/2010	9:48:34 AM	Bubbler valve closed
10/26/2010	9:48:34 AM	Main Vac valve opened
10/26/2010	9:48:34 AM	Bypass valve opened
10/26/2010	9:48:34 AM	Helium MFC set to  0.000000
10/26/2010	9:48:34 AM	H2 MFC set to  0.000000
10/26/2010	9:48:34 AM	BCl3 MFC set to  0.000000
10/26/2010	9:48:34 AM	PHl3 MFC set to  0.000000
10/26/2010	9:48:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:48:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:48:34 AM	Tube furnace set to 0
10/26/2010	9:49:34 AM	H2 valve closed
10/26/2010	9:49:34 AM	BCl3 valve closed
10/26/2010	9:49:34 AM	PH3 valve closed
10/26/2010	9:49:34 AM	SiCl4 pre valve closed
10/26/2010	9:49:34 AM	SiCl4 post valve closed
10/26/2010	9:49:34 AM	Bubbler valve closed
10/26/2010	9:49:34 AM	Helium valve opened
10/26/2010	9:49:34 AM	Main Vac valve opened
10/26/2010	9:49:34 AM	Bypass valve opened
10/26/2010	9:49:34 AM	Helium MFC set to  100.000000
10/26/2010	9:49:34 AM	H2 MFC set to  0.000000
10/26/2010	9:49:34 AM	BCl3 MFC set to  0.000000
10/26/2010	9:49:34 AM	PHl3 MFC set to  0.000000
10/26/2010	9:49:34 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:49:34 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:49:34 AM	Tube furnace set to 0
10/26/2010	9:50:34 AM	Helium valve closed
10/26/2010	9:50:34 AM	H2 valve closed
10/26/2010	9:50:34 AM	BCl3 valve closed
10/26/2010	9:50:34 AM	PH3 valve closed
10/26/2010	9:50:34 AM	SiCl4 pre valve closed
10/26/2010	9:50:34 AM	SiCl4 post valve closed
10/26/2010	9:50:34 AM	Bubbler valve closed
10/26/2010	9:50:34 AM	Main Vac valve opened
10/26/2010	9:50:34 AM	Bypass valve opened
10/26/2010	9:50:34 AM	Helium MFC set to  0.000000
10/26/2010	9:50:34 AM	H2 MFC set to  0.000000
10/26/2010	9:50:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:50:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:50:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:50:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:50:35 AM	Tube furnace set to 0
10/26/2010	9:51:35 AM	H2 valve closed
10/26/2010	9:51:35 AM	BCl3 valve closed
10/26/2010	9:51:35 AM	PH3 valve closed
10/26/2010	9:51:35 AM	SiCl4 pre valve closed
10/26/2010	9:51:35 AM	SiCl4 post valve closed
10/26/2010	9:51:35 AM	Bubbler valve closed
10/26/2010	9:51:35 AM	Helium valve opened
10/26/2010	9:51:35 AM	Main Vac valve opened
10/26/2010	9:51:35 AM	Bypass valve opened
10/26/2010	9:51:35 AM	Helium MFC set to  100.000000
10/26/2010	9:51:35 AM	H2 MFC set to  0.000000
10/26/2010	9:51:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:51:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:51:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:51:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:51:35 AM	Tube furnace set to 0
10/26/2010	9:52:35 AM	Helium valve closed
10/26/2010	9:52:35 AM	H2 valve closed
10/26/2010	9:52:35 AM	BCl3 valve closed
10/26/2010	9:52:35 AM	PH3 valve closed
10/26/2010	9:52:35 AM	SiCl4 pre valve closed
10/26/2010	9:52:35 AM	SiCl4 post valve closed
10/26/2010	9:52:35 AM	Bubbler valve closed
10/26/2010	9:52:35 AM	Main Vac valve opened
10/26/2010	9:52:35 AM	Bypass valve opened
10/26/2010	9:52:35 AM	Helium MFC set to  0.000000
10/26/2010	9:52:35 AM	H2 MFC set to  0.000000
10/26/2010	9:52:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:52:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:52:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:52:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:52:35 AM	Tube furnace set to 0
10/26/2010	9:53:35 AM	H2 valve closed
10/26/2010	9:53:35 AM	BCl3 valve closed
10/26/2010	9:53:35 AM	PH3 valve closed
10/26/2010	9:53:35 AM	SiCl4 pre valve closed
10/26/2010	9:53:35 AM	SiCl4 post valve closed
10/26/2010	9:53:35 AM	Bubbler valve closed
10/26/2010	9:53:35 AM	Helium valve opened
10/26/2010	9:53:35 AM	Main Vac valve opened
10/26/2010	9:53:35 AM	Bypass valve opened
10/26/2010	9:53:35 AM	Helium MFC set to  100.000000
10/26/2010	9:53:35 AM	H2 MFC set to  0.000000
10/26/2010	9:53:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:53:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:53:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:53:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:53:35 AM	Tube furnace set to 0
10/26/2010	9:54:35 AM	Helium valve closed
10/26/2010	9:54:35 AM	H2 valve closed
10/26/2010	9:54:35 AM	BCl3 valve closed
10/26/2010	9:54:35 AM	PH3 valve closed
10/26/2010	9:54:35 AM	SiCl4 pre valve closed
10/26/2010	9:54:35 AM	SiCl4 post valve closed
10/26/2010	9:54:35 AM	Bubbler valve closed
10/26/2010	9:54:35 AM	Main Vac valve opened
10/26/2010	9:54:35 AM	Bypass valve opened
10/26/2010	9:54:35 AM	Helium MFC set to  0.000000
10/26/2010	9:54:35 AM	H2 MFC set to  0.000000
10/26/2010	9:54:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:54:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:54:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:54:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:54:35 AM	Tube furnace set to 0
10/26/2010	9:55:35 AM	H2 valve closed
10/26/2010	9:55:35 AM	BCl3 valve closed
10/26/2010	9:55:35 AM	PH3 valve closed
10/26/2010	9:55:35 AM	SiCl4 pre valve closed
10/26/2010	9:55:35 AM	SiCl4 post valve closed
10/26/2010	9:55:35 AM	Bubbler valve closed
10/26/2010	9:55:35 AM	Helium valve opened
10/26/2010	9:55:35 AM	Main Vac valve opened
10/26/2010	9:55:35 AM	Bypass valve opened
10/26/2010	9:55:35 AM	Helium MFC set to  100.000000
10/26/2010	9:55:35 AM	H2 MFC set to  0.000000
10/26/2010	9:55:35 AM	BCl3 MFC set to  0.000000
10/26/2010	9:55:35 AM	PHl3 MFC set to  0.000000
10/26/2010	9:55:35 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:55:35 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:55:36 AM	Tube furnace set to 0
10/26/2010	9:56:36 AM	Helium valve closed
10/26/2010	9:56:36 AM	H2 valve closed
10/26/2010	9:56:36 AM	BCl3 valve closed
10/26/2010	9:56:36 AM	PH3 valve closed
10/26/2010	9:56:36 AM	SiCl4 pre valve closed
10/26/2010	9:56:36 AM	SiCl4 post valve closed
10/26/2010	9:56:36 AM	Bubbler valve closed
10/26/2010	9:56:36 AM	Main Vac valve opened
10/26/2010	9:56:36 AM	Bypass valve opened
10/26/2010	9:56:36 AM	Helium MFC set to  0.000000
10/26/2010	9:56:36 AM	H2 MFC set to  0.000000
10/26/2010	9:56:36 AM	BCl3 MFC set to  0.000000
10/26/2010	9:56:36 AM	PHl3 MFC set to  0.000000
10/26/2010	9:56:36 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:56:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:56:36 AM	Tube furnace set to 0
10/26/2010	9:57:36 AM	H2 valve closed
10/26/2010	9:57:36 AM	BCl3 valve closed
10/26/2010	9:57:36 AM	PH3 valve closed
10/26/2010	9:57:36 AM	SiCl4 pre valve closed
10/26/2010	9:57:36 AM	SiCl4 post valve closed
10/26/2010	9:57:36 AM	Bubbler valve closed
10/26/2010	9:57:36 AM	Helium valve opened
10/26/2010	9:57:36 AM	Main Vac valve opened
10/26/2010	9:57:36 AM	Bypass valve opened
10/26/2010	9:57:36 AM	Helium MFC set to  100.000000
10/26/2010	9:57:36 AM	H2 MFC set to  0.000000
10/26/2010	9:57:36 AM	BCl3 MFC set to  0.000000
10/26/2010	9:57:36 AM	PHl3 MFC set to  0.000000
10/26/2010	9:57:36 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:57:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:57:36 AM	Tube furnace set to 0
10/26/2010	9:58:36 AM	Helium valve closed
10/26/2010	9:58:36 AM	H2 valve closed
10/26/2010	9:58:36 AM	BCl3 valve closed
10/26/2010	9:58:36 AM	PH3 valve closed
10/26/2010	9:58:36 AM	SiCl4 pre valve closed
10/26/2010	9:58:36 AM	SiCl4 post valve closed
10/26/2010	9:58:36 AM	Bubbler valve closed
10/26/2010	9:58:36 AM	Main Vac valve opened
10/26/2010	9:58:36 AM	Bypass valve opened
10/26/2010	9:58:36 AM	Helium MFC set to  0.000000
10/26/2010	9:58:36 AM	H2 MFC set to  0.000000
10/26/2010	9:58:36 AM	BCl3 MFC set to  0.000000
10/26/2010	9:58:36 AM	PHl3 MFC set to  0.000000
10/26/2010	9:58:36 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:58:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:58:36 AM	Tube furnace set to 0
10/26/2010	9:59:36 AM	H2 valve closed
10/26/2010	9:59:36 AM	BCl3 valve closed
10/26/2010	9:59:36 AM	PH3 valve closed
10/26/2010	9:59:36 AM	SiCl4 pre valve closed
10/26/2010	9:59:36 AM	SiCl4 post valve closed
10/26/2010	9:59:36 AM	Bubbler valve closed
10/26/2010	9:59:36 AM	Helium valve opened
10/26/2010	9:59:36 AM	Main Vac valve opened
10/26/2010	9:59:36 AM	Bypass valve opened
10/26/2010	9:59:36 AM	Helium MFC set to  100.000000
10/26/2010	9:59:36 AM	H2 MFC set to  0.000000
10/26/2010	9:59:36 AM	BCl3 MFC set to  0.000000
10/26/2010	9:59:36 AM	PHl3 MFC set to  0.000000
10/26/2010	9:59:36 AM	SiCl4 MFC set to  0.000000
10/26/2010	9:59:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	9:59:36 AM	Tube furnace set to 0
10/26/2010	10:00:36 AM	Helium valve closed
10/26/2010	10:00:36 AM	H2 valve closed
10/26/2010	10:00:36 AM	BCl3 valve closed
10/26/2010	10:00:36 AM	PH3 valve closed
10/26/2010	10:00:36 AM	SiCl4 pre valve closed
10/26/2010	10:00:36 AM	SiCl4 post valve closed
10/26/2010	10:00:36 AM	Bubbler valve closed
10/26/2010	10:00:36 AM	Main Vac valve opened
10/26/2010	10:00:36 AM	Bypass valve opened
10/26/2010	10:00:36 AM	Helium MFC set to  0.000000
10/26/2010	10:00:36 AM	H2 MFC set to  0.000000
10/26/2010	10:00:36 AM	BCl3 MFC set to  0.000000
10/26/2010	10:00:36 AM	PHl3 MFC set to  0.000000
10/26/2010	10:00:36 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:00:36 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:00:37 AM	Tube furnace set to 0
10/26/2010	10:01:37 AM	H2 valve closed
10/26/2010	10:01:37 AM	BCl3 valve closed
10/26/2010	10:01:37 AM	PH3 valve closed
10/26/2010	10:01:37 AM	SiCl4 pre valve closed
10/26/2010	10:01:37 AM	SiCl4 post valve closed
10/26/2010	10:01:37 AM	Bubbler valve closed
10/26/2010	10:01:37 AM	Helium valve opened
10/26/2010	10:01:37 AM	Main Vac valve opened
10/26/2010	10:01:37 AM	Bypass valve opened
10/26/2010	10:01:37 AM	Helium MFC set to  100.000000
10/26/2010	10:01:37 AM	H2 MFC set to  0.000000
10/26/2010	10:01:37 AM	BCl3 MFC set to  0.000000
10/26/2010	10:01:37 AM	PHl3 MFC set to  0.000000
10/26/2010	10:01:37 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:01:37 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:01:37 AM	Tube furnace set to 0
10/26/2010	10:02:37 AM	Helium valve closed
10/26/2010	10:02:37 AM	H2 valve closed
10/26/2010	10:02:37 AM	BCl3 valve closed
10/26/2010	10:02:37 AM	PH3 valve closed
10/26/2010	10:02:37 AM	SiCl4 pre valve closed
10/26/2010	10:02:37 AM	SiCl4 post valve closed
10/26/2010	10:02:37 AM	Bubbler valve closed
10/26/2010	10:02:37 AM	Main Vac valve opened
10/26/2010	10:02:37 AM	Bypass valve opened
10/26/2010	10:02:37 AM	Helium MFC set to  0.000000
10/26/2010	10:02:37 AM	H2 MFC set to  0.000000
10/26/2010	10:02:37 AM	BCl3 MFC set to  0.000000
10/26/2010	10:02:37 AM	PHl3 MFC set to  0.000000
10/26/2010	10:02:37 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:02:37 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:02:37 AM	Tube furnace set to 0
10/26/2010	10:02:38 AM	Run finished at 10:02 AM
10/26/2010	10:02:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	10:09:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	10:10:02 AM	Recipe started at 10:09 AM
10/26/2010	10:10:02 AM	Helium valve closed
10/26/2010	10:10:02 AM	H2 valve closed
10/26/2010	10:10:02 AM	BCl3 valve closed
10/26/2010	10:10:02 AM	PH3 valve closed
10/26/2010	10:10:02 AM	SiCl4 pre valve closed
10/26/2010	10:10:02 AM	SiCl4 post valve closed
10/26/2010	10:10:02 AM	Main Vac valve closed
10/26/2010	10:10:02 AM	Bubbler valve closed
10/26/2010	10:10:02 AM	Bypass valve opened
10/26/2010	10:10:02 AM	Helium MFC set to  0.000000
10/26/2010	10:10:02 AM	H2 MFC set to  0.000000
10/26/2010	10:10:02 AM	BCl3 MFC set to  0.000000
10/26/2010	10:10:02 AM	PHl3 MFC set to  0.000000
10/26/2010	10:10:02 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:10:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:10:02 AM	Tube furnace set to 0
10/26/2010	10:10:02 AM	Helium valve closed
10/26/2010	10:10:02 AM	H2 valve closed
10/26/2010	10:10:02 AM	BCl3 valve closed
10/26/2010	10:10:02 AM	PH3 valve closed
10/26/2010	10:10:02 AM	SiCl4 pre valve closed
10/26/2010	10:10:02 AM	SiCl4 post valve closed
10/26/2010	10:10:02 AM	Bubbler valve closed
10/26/2010	10:10:02 AM	Main Vac valve opened
10/26/2010	10:10:02 AM	Bypass valve opened
10/26/2010	10:10:02 AM	Helium MFC set to  0.000000
10/26/2010	10:10:02 AM	H2 MFC set to  0.000000
10/26/2010	10:10:02 AM	BCl3 MFC set to  0.000000
10/26/2010	10:10:02 AM	PHl3 MFC set to  0.000000
10/26/2010	10:10:02 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:10:02 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:10:03 AM	Tube furnace set to 0
10/26/2010	10:11:03 AM	H2 valve closed
10/26/2010	10:11:03 AM	BCl3 valve closed
10/26/2010	10:11:03 AM	PH3 valve closed
10/26/2010	10:11:03 AM	SiCl4 pre valve closed
10/26/2010	10:11:03 AM	SiCl4 post valve closed
10/26/2010	10:11:03 AM	Bubbler valve closed
10/26/2010	10:11:03 AM	Helium valve opened
10/26/2010	10:11:03 AM	Main Vac valve opened
10/26/2010	10:11:03 AM	Bypass valve opened
10/26/2010	10:11:03 AM	Helium MFC set to  100.000000
10/26/2010	10:11:03 AM	H2 MFC set to  0.000000
10/26/2010	10:11:03 AM	BCl3 MFC set to  0.000000
10/26/2010	10:11:03 AM	PHl3 MFC set to  0.000000
10/26/2010	10:11:03 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:11:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:11:03 AM	Tube furnace set to 0
10/26/2010	10:12:03 AM	Helium valve closed
10/26/2010	10:12:03 AM	H2 valve closed
10/26/2010	10:12:03 AM	BCl3 valve closed
10/26/2010	10:12:03 AM	PH3 valve closed
10/26/2010	10:12:03 AM	SiCl4 pre valve closed
10/26/2010	10:12:03 AM	SiCl4 post valve closed
10/26/2010	10:12:03 AM	Bubbler valve closed
10/26/2010	10:12:03 AM	Main Vac valve opened
10/26/2010	10:12:03 AM	Bypass valve opened
10/26/2010	10:12:03 AM	Helium MFC set to  0.000000
10/26/2010	10:12:03 AM	H2 MFC set to  0.000000
10/26/2010	10:12:03 AM	BCl3 MFC set to  0.000000
10/26/2010	10:12:03 AM	PHl3 MFC set to  0.000000
10/26/2010	10:12:03 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:12:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:12:03 AM	Tube furnace set to 0
10/26/2010	10:13:03 AM	H2 valve closed
10/26/2010	10:13:03 AM	BCl3 valve closed
10/26/2010	10:13:03 AM	PH3 valve closed
10/26/2010	10:13:03 AM	SiCl4 pre valve closed
10/26/2010	10:13:03 AM	SiCl4 post valve closed
10/26/2010	10:13:03 AM	Bubbler valve closed
10/26/2010	10:13:03 AM	Helium valve opened
10/26/2010	10:13:03 AM	Main Vac valve opened
10/26/2010	10:13:03 AM	Bypass valve opened
10/26/2010	10:13:03 AM	Helium MFC set to  100.000000
10/26/2010	10:13:03 AM	H2 MFC set to  0.000000
10/26/2010	10:13:03 AM	BCl3 MFC set to  0.000000
10/26/2010	10:13:03 AM	PHl3 MFC set to  0.000000
10/26/2010	10:13:03 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:13:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:13:03 AM	Tube furnace set to 0
10/26/2010	10:14:03 AM	Helium valve closed
10/26/2010	10:14:03 AM	H2 valve closed
10/26/2010	10:14:03 AM	BCl3 valve closed
10/26/2010	10:14:03 AM	PH3 valve closed
10/26/2010	10:14:03 AM	SiCl4 pre valve closed
10/26/2010	10:14:03 AM	SiCl4 post valve closed
10/26/2010	10:14:03 AM	Bubbler valve closed
10/26/2010	10:14:03 AM	Main Vac valve opened
10/26/2010	10:14:03 AM	Bypass valve opened
10/26/2010	10:14:03 AM	Helium MFC set to  0.000000
10/26/2010	10:14:03 AM	H2 MFC set to  0.000000
10/26/2010	10:14:03 AM	BCl3 MFC set to  0.000000
10/26/2010	10:14:03 AM	PHl3 MFC set to  0.000000
10/26/2010	10:14:03 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:14:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:14:03 AM	Tube furnace set to 0
10/26/2010	10:15:03 AM	H2 valve closed
10/26/2010	10:15:03 AM	BCl3 valve closed
10/26/2010	10:15:03 AM	PH3 valve closed
10/26/2010	10:15:03 AM	SiCl4 pre valve closed
10/26/2010	10:15:03 AM	SiCl4 post valve closed
10/26/2010	10:15:03 AM	Bubbler valve closed
10/26/2010	10:15:03 AM	Helium valve opened
10/26/2010	10:15:03 AM	Main Vac valve opened
10/26/2010	10:15:03 AM	Bypass valve opened
10/26/2010	10:15:03 AM	Helium MFC set to  100.000000
10/26/2010	10:15:03 AM	H2 MFC set to  0.000000
10/26/2010	10:15:03 AM	BCl3 MFC set to  0.000000
10/26/2010	10:15:03 AM	PHl3 MFC set to  0.000000
10/26/2010	10:15:03 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:15:03 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:15:04 AM	Tube furnace set to 0
10/26/2010	10:16:04 AM	Helium valve closed
10/26/2010	10:16:04 AM	H2 valve closed
10/26/2010	10:16:04 AM	BCl3 valve closed
10/26/2010	10:16:04 AM	PH3 valve closed
10/26/2010	10:16:04 AM	SiCl4 pre valve closed
10/26/2010	10:16:04 AM	SiCl4 post valve closed
10/26/2010	10:16:04 AM	Bubbler valve closed
10/26/2010	10:16:04 AM	Main Vac valve opened
10/26/2010	10:16:04 AM	Bypass valve opened
10/26/2010	10:16:04 AM	Helium MFC set to  0.000000
10/26/2010	10:16:04 AM	H2 MFC set to  0.000000
10/26/2010	10:16:04 AM	BCl3 MFC set to  0.000000
10/26/2010	10:16:04 AM	PHl3 MFC set to  0.000000
10/26/2010	10:16:04 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:16:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:16:04 AM	Tube furnace set to 0
10/26/2010	10:17:04 AM	H2 valve closed
10/26/2010	10:17:04 AM	BCl3 valve closed
10/26/2010	10:17:04 AM	PH3 valve closed
10/26/2010	10:17:04 AM	SiCl4 pre valve closed
10/26/2010	10:17:04 AM	SiCl4 post valve closed
10/26/2010	10:17:04 AM	Bubbler valve closed
10/26/2010	10:17:04 AM	Helium valve opened
10/26/2010	10:17:04 AM	Main Vac valve opened
10/26/2010	10:17:04 AM	Bypass valve opened
10/26/2010	10:17:04 AM	Helium MFC set to  100.000000
10/26/2010	10:17:04 AM	H2 MFC set to  0.000000
10/26/2010	10:17:04 AM	BCl3 MFC set to  0.000000
10/26/2010	10:17:04 AM	PHl3 MFC set to  0.000000
10/26/2010	10:17:04 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:17:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:17:04 AM	Tube furnace set to 0
10/26/2010	10:18:04 AM	Helium valve closed
10/26/2010	10:18:04 AM	H2 valve closed
10/26/2010	10:18:04 AM	BCl3 valve closed
10/26/2010	10:18:04 AM	PH3 valve closed
10/26/2010	10:18:04 AM	SiCl4 pre valve closed
10/26/2010	10:18:04 AM	SiCl4 post valve closed
10/26/2010	10:18:04 AM	Bubbler valve closed
10/26/2010	10:18:04 AM	Main Vac valve opened
10/26/2010	10:18:04 AM	Bypass valve opened
10/26/2010	10:18:04 AM	Helium MFC set to  0.000000
10/26/2010	10:18:04 AM	H2 MFC set to  0.000000
10/26/2010	10:18:04 AM	BCl3 MFC set to  0.000000
10/26/2010	10:18:04 AM	PHl3 MFC set to  0.000000
10/26/2010	10:18:04 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:18:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:18:04 AM	Tube furnace set to 0
10/26/2010	10:19:04 AM	H2 valve closed
10/26/2010	10:19:04 AM	BCl3 valve closed
10/26/2010	10:19:04 AM	PH3 valve closed
10/26/2010	10:19:04 AM	SiCl4 pre valve closed
10/26/2010	10:19:04 AM	SiCl4 post valve closed
10/26/2010	10:19:04 AM	Bubbler valve closed
10/26/2010	10:19:04 AM	Helium valve opened
10/26/2010	10:19:04 AM	Main Vac valve opened
10/26/2010	10:19:04 AM	Bypass valve opened
10/26/2010	10:19:04 AM	Helium MFC set to  100.000000
10/26/2010	10:19:04 AM	H2 MFC set to  0.000000
10/26/2010	10:19:04 AM	BCl3 MFC set to  0.000000
10/26/2010	10:19:04 AM	PHl3 MFC set to  0.000000
10/26/2010	10:19:04 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:19:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:19:04 AM	Tube furnace set to 0
10/26/2010	10:20:04 AM	Helium valve closed
10/26/2010	10:20:04 AM	H2 valve closed
10/26/2010	10:20:04 AM	BCl3 valve closed
10/26/2010	10:20:04 AM	PH3 valve closed
10/26/2010	10:20:04 AM	SiCl4 pre valve closed
10/26/2010	10:20:04 AM	SiCl4 post valve closed
10/26/2010	10:20:04 AM	Bubbler valve closed
10/26/2010	10:20:04 AM	Main Vac valve opened
10/26/2010	10:20:04 AM	Bypass valve opened
10/26/2010	10:20:04 AM	Helium MFC set to  0.000000
10/26/2010	10:20:04 AM	H2 MFC set to  0.000000
10/26/2010	10:20:04 AM	BCl3 MFC set to  0.000000
10/26/2010	10:20:04 AM	PHl3 MFC set to  0.000000
10/26/2010	10:20:04 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:20:04 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:20:04 AM	Tube furnace set to 0
10/26/2010	10:21:05 AM	H2 valve closed
10/26/2010	10:21:05 AM	BCl3 valve closed
10/26/2010	10:21:05 AM	PH3 valve closed
10/26/2010	10:21:05 AM	SiCl4 pre valve closed
10/26/2010	10:21:05 AM	SiCl4 post valve closed
10/26/2010	10:21:05 AM	Bubbler valve closed
10/26/2010	10:21:05 AM	Helium valve opened
10/26/2010	10:21:05 AM	Main Vac valve opened
10/26/2010	10:21:05 AM	Bypass valve opened
10/26/2010	10:21:05 AM	Helium MFC set to  100.000000
10/26/2010	10:21:05 AM	H2 MFC set to  0.000000
10/26/2010	10:21:05 AM	BCl3 MFC set to  0.000000
10/26/2010	10:21:05 AM	PHl3 MFC set to  0.000000
10/26/2010	10:21:05 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:21:05 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:21:05 AM	Tube furnace set to 0
10/26/2010	10:22:05 AM	Helium valve closed
10/26/2010	10:22:05 AM	H2 valve closed
10/26/2010	10:22:05 AM	BCl3 valve closed
10/26/2010	10:22:05 AM	PH3 valve closed
10/26/2010	10:22:05 AM	SiCl4 pre valve closed
10/26/2010	10:22:05 AM	SiCl4 post valve closed
10/26/2010	10:22:05 AM	Bubbler valve closed
10/26/2010	10:22:05 AM	Main Vac valve opened
10/26/2010	10:22:05 AM	Bypass valve opened
10/26/2010	10:22:05 AM	Helium MFC set to  0.000000
10/26/2010	10:22:05 AM	H2 MFC set to  0.000000
10/26/2010	10:22:05 AM	BCl3 MFC set to  0.000000
10/26/2010	10:22:05 AM	PHl3 MFC set to  0.000000
10/26/2010	10:22:05 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:22:05 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:22:05 AM	Tube furnace set to 0
10/26/2010	10:23:05 AM	H2 valve closed
10/26/2010	10:23:05 AM	BCl3 valve closed
10/26/2010	10:23:05 AM	PH3 valve closed
10/26/2010	10:23:05 AM	SiCl4 pre valve closed
10/26/2010	10:23:05 AM	SiCl4 post valve closed
10/26/2010	10:23:05 AM	Bubbler valve closed
10/26/2010	10:23:05 AM	Helium valve opened
10/26/2010	10:23:05 AM	Main Vac valve opened
10/26/2010	10:23:05 AM	Bypass valve opened
10/26/2010	10:23:05 AM	Helium MFC set to  100.000000
10/26/2010	10:23:05 AM	H2 MFC set to  0.000000
10/26/2010	10:23:05 AM	BCl3 MFC set to  0.000000
10/26/2010	10:23:05 AM	PHl3 MFC set to  0.000000
10/26/2010	10:23:05 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:23:05 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:23:05 AM	Tube furnace set to 0
10/26/2010	10:24:05 AM	Helium valve closed
10/26/2010	10:24:05 AM	H2 valve closed
10/26/2010	10:24:05 AM	BCl3 valve closed
10/26/2010	10:24:05 AM	PH3 valve closed
10/26/2010	10:24:05 AM	SiCl4 pre valve closed
10/26/2010	10:24:05 AM	SiCl4 post valve closed
10/26/2010	10:24:05 AM	Bubbler valve closed
10/26/2010	10:24:05 AM	Main Vac valve opened
10/26/2010	10:24:05 AM	Bypass valve opened
10/26/2010	10:24:05 AM	Helium MFC set to  0.000000
10/26/2010	10:24:05 AM	H2 MFC set to  0.000000
10/26/2010	10:24:05 AM	BCl3 MFC set to  0.000000
10/26/2010	10:24:05 AM	PHl3 MFC set to  0.000000
10/26/2010	10:24:05 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:24:05 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:24:05 AM	Tube furnace set to 0
10/26/2010	10:25:05 AM	H2 valve closed
10/26/2010	10:25:05 AM	BCl3 valve closed
10/26/2010	10:25:05 AM	PH3 valve closed
10/26/2010	10:25:05 AM	SiCl4 pre valve closed
10/26/2010	10:25:05 AM	SiCl4 post valve closed
10/26/2010	10:25:05 AM	Bubbler valve closed
10/26/2010	10:25:05 AM	Helium valve opened
10/26/2010	10:25:05 AM	Main Vac valve opened
10/26/2010	10:25:05 AM	Bypass valve opened
10/26/2010	10:25:05 AM	Helium MFC set to  100.000000
10/26/2010	10:25:05 AM	H2 MFC set to  0.000000
10/26/2010	10:25:05 AM	BCl3 MFC set to  0.000000
10/26/2010	10:25:05 AM	PHl3 MFC set to  0.000000
10/26/2010	10:25:05 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:25:05 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:25:05 AM	Tube furnace set to 0
10/26/2010	10:26:05 AM	Helium valve closed
10/26/2010	10:26:05 AM	H2 valve closed
10/26/2010	10:26:05 AM	BCl3 valve closed
10/26/2010	10:26:05 AM	PH3 valve closed
10/26/2010	10:26:06 AM	SiCl4 pre valve closed
10/26/2010	10:26:06 AM	SiCl4 post valve closed
10/26/2010	10:26:06 AM	Bubbler valve closed
10/26/2010	10:26:06 AM	Main Vac valve opened
10/26/2010	10:26:06 AM	Bypass valve opened
10/26/2010	10:26:06 AM	Helium MFC set to  0.000000
10/26/2010	10:26:06 AM	H2 MFC set to  0.000000
10/26/2010	10:26:06 AM	BCl3 MFC set to  0.000000
10/26/2010	10:26:06 AM	PHl3 MFC set to  0.000000
10/26/2010	10:26:06 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:26:06 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:26:06 AM	Tube furnace set to 0
10/26/2010	10:26:22 AM	H2 valve closed
10/26/2010	10:26:22 AM	BCl3 valve closed
10/26/2010	10:26:22 AM	PH3 valve closed
10/26/2010	10:26:22 AM	SiCl4 pre valve closed
10/26/2010	10:26:22 AM	SiCl4 post valve closed
10/26/2010	10:26:22 AM	Bubbler valve closed
10/26/2010	10:26:22 AM	Helium valve opened
10/26/2010	10:26:22 AM	Main Vac valve opened
10/26/2010	10:26:22 AM	Bypass valve opened
10/26/2010	10:26:22 AM	Helium MFC set to  100.000000
10/26/2010	10:26:22 AM	H2 MFC set to  0.000000
10/26/2010	10:26:22 AM	BCl3 MFC set to  0.000000
10/26/2010	10:26:22 AM	PHl3 MFC set to  0.000000
10/26/2010	10:26:22 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:26:22 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:26:23 AM	Tube furnace set to 0
10/26/2010	10:26:23 AM	Helium valve closed
10/26/2010	10:26:23 AM	H2 valve closed
10/26/2010	10:26:23 AM	BCl3 valve closed
10/26/2010	10:26:23 AM	PH3 valve closed
10/26/2010	10:26:23 AM	SiCl4 pre valve closed
10/26/2010	10:26:23 AM	SiCl4 post valve closed
10/26/2010	10:26:23 AM	Bubbler valve closed
10/26/2010	10:26:23 AM	Main Vac valve opened
10/26/2010	10:26:23 AM	Bypass valve opened
10/26/2010	10:26:23 AM	Helium MFC set to  0.000000
10/26/2010	10:26:23 AM	H2 MFC set to  0.000000
10/26/2010	10:26:23 AM	BCl3 MFC set to  0.000000
10/26/2010	10:26:23 AM	PHl3 MFC set to  0.000000
10/26/2010	10:26:23 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:26:23 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:26:24 AM	Tube furnace set to 0
10/26/2010	10:26:25 AM	H2 valve closed
10/26/2010	10:26:25 AM	BCl3 valve closed
10/26/2010	10:26:25 AM	PH3 valve closed
10/26/2010	10:26:25 AM	SiCl4 pre valve closed
10/26/2010	10:26:25 AM	SiCl4 post valve closed
10/26/2010	10:26:25 AM	Bubbler valve closed
10/26/2010	10:26:25 AM	Helium valve opened
10/26/2010	10:26:25 AM	Main Vac valve opened
10/26/2010	10:26:25 AM	Bypass valve opened
10/26/2010	10:26:25 AM	Helium MFC set to  100.000000
10/26/2010	10:26:25 AM	H2 MFC set to  0.000000
10/26/2010	10:26:25 AM	BCl3 MFC set to  0.000000
10/26/2010	10:26:25 AM	PHl3 MFC set to  0.000000
10/26/2010	10:26:25 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:26:25 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:26:25 AM	Tube furnace set to 0
10/26/2010	10:26:26 AM	Helium valve closed
10/26/2010	10:26:26 AM	H2 valve closed
10/26/2010	10:26:26 AM	BCl3 valve closed
10/26/2010	10:26:26 AM	PH3 valve closed
10/26/2010	10:26:26 AM	SiCl4 pre valve closed
10/26/2010	10:26:26 AM	SiCl4 post valve closed
10/26/2010	10:26:26 AM	Bubbler valve closed
10/26/2010	10:26:26 AM	Main Vac valve opened
10/26/2010	10:26:26 AM	Bypass valve opened
10/26/2010	10:26:26 AM	Helium MFC set to  0.000000
10/26/2010	10:26:26 AM	H2 MFC set to  0.000000
10/26/2010	10:26:26 AM	BCl3 MFC set to  0.000000
10/26/2010	10:26:26 AM	PHl3 MFC set to  0.000000
10/26/2010	10:26:26 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:26:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:26:26 AM	Tube furnace set to 0
10/26/2010	10:26:26 AM	Run finished at 10:26 AM
10/26/2010	10:26:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	10:29:26 AM	Recipe started at 10:29 AM
10/26/2010	10:29:26 AM	Helium valve closed
10/26/2010	10:29:26 AM	BCl3 valve closed
10/26/2010	10:29:26 AM	PH3 valve closed
10/26/2010	10:29:26 AM	SiCl4 pre valve closed
10/26/2010	10:29:26 AM	SiCl4 post valve closed
10/26/2010	10:29:26 AM	Main Vac valve closed
10/26/2010	10:29:26 AM	Bypass valve closed
10/26/2010	10:29:26 AM	Bubbler valve closed
10/26/2010	10:29:26 AM	H2 valve opened
10/26/2010	10:29:26 AM	Helium MFC set to  0.000000
10/26/2010	10:29:26 AM	H2 MFC set to  500.000000
10/26/2010	10:29:26 AM	BCl3 MFC set to  0.000000
10/26/2010	10:29:26 AM	PHl3 MFC set to  0.000000
10/26/2010	10:29:26 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:29:26 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:29:26 AM	Tube furnace set to 0
10/26/2010	10:30:49 AM	Helium valve closed
10/26/2010	10:30:49 AM	BCl3 valve closed
10/26/2010	10:30:49 AM	PH3 valve closed
10/26/2010	10:30:49 AM	SiCl4 pre valve closed
10/26/2010	10:30:49 AM	SiCl4 post valve closed
10/26/2010	10:30:49 AM	Main Vac valve closed
10/26/2010	10:30:49 AM	Bypass valve closed
10/26/2010	10:30:49 AM	H2 valve opened
10/26/2010	10:30:49 AM	Bubbler valve opened
10/26/2010	10:30:49 AM	Helium MFC set to  0.000000
10/26/2010	10:30:49 AM	H2 MFC set to  500.000000
10/26/2010	10:30:49 AM	BCl3 MFC set to  0.000000
10/26/2010	10:30:49 AM	PHl3 MFC set to  0.000000
10/26/2010	10:30:49 AM	SiCl4 MFC set to  0.000000
10/26/2010	10:30:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:30:49 AM	Tube furnace set to 1000
10/26/2010	10:50:49 AM	Helium valve closed
10/26/2010	10:50:49 AM	PH3 valve closed
10/26/2010	10:50:49 AM	Main Vac valve closed
10/26/2010	10:50:49 AM	Bypass valve closed
10/26/2010	10:50:49 AM	H2 valve opened
10/26/2010	10:50:49 AM	BCl3 valve opened
10/26/2010	10:50:49 AM	SiCl4 pre valve opened
10/26/2010	10:50:49 AM	SiCl4 post valve opened
10/26/2010	10:50:49 AM	Bubbler valve opened
10/26/2010	10:50:49 AM	Helium MFC set to  0.000000
10/26/2010	10:50:49 AM	H2 MFC set to  500.000000
10/26/2010	10:50:49 AM	BCl3 MFC set to  12.000000
10/26/2010	10:50:49 AM	PHl3 MFC set to  0.000000
10/26/2010	10:50:49 AM	SiCl4 MFC set to  50.000000
10/26/2010	10:50:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	10:50:49 AM	Tube furnace set to 1000
10/26/2010	11:10:49 AM	H2 valve closed
10/26/2010	11:10:49 AM	BCl3 valve closed
10/26/2010	11:10:49 AM	PH3 valve closed
10/26/2010	11:10:49 AM	SiCl4 pre valve closed
10/26/2010	11:10:49 AM	SiCl4 post valve closed
10/26/2010	11:10:49 AM	Main Vac valve closed
10/26/2010	11:10:49 AM	Bypass valve closed
10/26/2010	11:10:49 AM	Helium valve opened
10/26/2010	11:10:49 AM	Bubbler valve opened
10/26/2010	11:10:49 AM	Helium MFC set to  500.000000
10/26/2010	11:10:49 AM	H2 MFC set to  0.000000
10/26/2010	11:10:49 AM	BCl3 MFC set to  0.000000
10/26/2010	11:10:49 AM	PHl3 MFC set to  0.000000
10/26/2010	11:10:49 AM	SiCl4 MFC set to  0.000000
10/26/2010	11:10:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	11:10:49 AM	Tube furnace set to 0
10/26/2010	11:30:49 AM	Helium valve closed
10/26/2010	11:30:49 AM	H2 valve closed
10/26/2010	11:30:49 AM	BCl3 valve closed
10/26/2010	11:30:49 AM	PH3 valve closed
10/26/2010	11:30:49 AM	SiCl4 pre valve closed
10/26/2010	11:30:49 AM	SiCl4 post valve closed
10/26/2010	11:30:49 AM	Main Vac valve closed
10/26/2010	11:30:49 AM	Bypass valve closed
10/26/2010	11:30:49 AM	Bubbler valve closed
10/26/2010	11:30:49 AM	Helium MFC set to  0.000000
10/26/2010	11:30:49 AM	H2 MFC set to  0.000000
10/26/2010	11:30:49 AM	BCl3 MFC set to  0.000000
10/26/2010	11:30:49 AM	PHl3 MFC set to  0.000000
10/26/2010	11:30:49 AM	SiCl4 MFC set to  0.000000
10/26/2010	11:30:49 AM	Bypass solenoid MFC set to  0.000000
10/26/2010	11:30:49 AM	Tube furnace set to 0
10/26/2010	11:30:50 AM	Run finished at 11:30 AM
10/26/2010	12:20:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	12:20:12 PM	Recipe started at 12:20 PM
10/26/2010	12:20:12 PM	H2 valve closed
10/26/2010	12:20:12 PM	BCl3 valve closed
10/26/2010	12:20:12 PM	PH3 valve closed
10/26/2010	12:20:12 PM	SiCl4 pre valve closed
10/26/2010	12:20:12 PM	SiCl4 post valve closed
10/26/2010	12:20:12 PM	Main Vac valve closed
10/26/2010	12:20:12 PM	Bypass valve closed
10/26/2010	12:20:12 PM	Bubbler valve closed
10/26/2010	12:20:12 PM	Helium valve opened
10/26/2010	12:20:12 PM	Helium MFC set to  500.000000
10/26/2010	12:20:12 PM	H2 MFC set to  0.000000
10/26/2010	12:20:12 PM	BCl3 MFC set to  0.000000
10/26/2010	12:20:12 PM	PHl3 MFC set to  0.000000
10/26/2010	12:20:12 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:20:12 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:20:12 PM	Tube furnace set to 0
10/26/2010	12:20:15 PM	Helium valve closed
10/26/2010	12:20:15 PM	H2 valve closed
10/26/2010	12:20:15 PM	BCl3 valve closed
10/26/2010	12:20:15 PM	PH3 valve closed
10/26/2010	12:20:15 PM	SiCl4 pre valve closed
10/26/2010	12:20:15 PM	SiCl4 post valve closed
10/26/2010	12:20:15 PM	Main Vac valve closed
10/26/2010	12:20:15 PM	Bypass valve closed
10/26/2010	12:20:15 PM	Bubbler valve closed
10/26/2010	12:20:15 PM	Helium MFC set to  0.000000
10/26/2010	12:20:15 PM	H2 MFC set to  0.000000
10/26/2010	12:20:15 PM	BCl3 MFC set to  0.000000
10/26/2010	12:20:15 PM	PHl3 MFC set to  0.000000
10/26/2010	12:20:15 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:20:15 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:20:16 PM	Tube furnace set to 0
10/26/2010	12:20:16 PM	Run finished at 12:20 PM
10/26/2010	12:20:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	12:23:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	12:23:48 PM	Recipe started at 12:23 PM
10/26/2010	12:23:48 PM	Helium valve closed
10/26/2010	12:23:48 PM	H2 valve closed
10/26/2010	12:23:48 PM	BCl3 valve closed
10/26/2010	12:23:48 PM	PH3 valve closed
10/26/2010	12:23:48 PM	SiCl4 pre valve closed
10/26/2010	12:23:48 PM	SiCl4 post valve closed
10/26/2010	12:23:48 PM	Main Vac valve closed
10/26/2010	12:23:48 PM	Bubbler valve closed
10/26/2010	12:23:48 PM	Bypass valve opened
10/26/2010	12:23:48 PM	Helium MFC set to  0.000000
10/26/2010	12:23:48 PM	H2 MFC set to  0.000000
10/26/2010	12:23:48 PM	BCl3 MFC set to  0.000000
10/26/2010	12:23:48 PM	PHl3 MFC set to  0.000000
10/26/2010	12:23:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:23:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:23:48 PM	Tube furnace set to 0
10/26/2010	12:24:40 PM	Helium valve closed
10/26/2010	12:24:40 PM	H2 valve closed
10/26/2010	12:24:40 PM	BCl3 valve closed
10/26/2010	12:24:40 PM	PH3 valve closed
10/26/2010	12:24:40 PM	SiCl4 pre valve closed
10/26/2010	12:24:40 PM	SiCl4 post valve closed
10/26/2010	12:24:40 PM	Bubbler valve closed
10/26/2010	12:24:40 PM	Main Vac valve opened
10/26/2010	12:24:40 PM	Bypass valve opened
10/26/2010	12:24:40 PM	Helium MFC set to  0.000000
10/26/2010	12:24:40 PM	H2 MFC set to  0.000000
10/26/2010	12:24:40 PM	BCl3 MFC set to  0.000000
10/26/2010	12:24:40 PM	PHl3 MFC set to  0.000000
10/26/2010	12:24:40 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:24:40 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:24:40 PM	Tube furnace set to 0
10/26/2010	12:24:40 PM	Run finished at 12:24 PM
10/26/2010	12:24:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	12:31:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	12:31:50 PM	Recipe started at 12:31 PM
10/26/2010	12:31:50 PM	Helium valve closed
10/26/2010	12:31:50 PM	H2 valve closed
10/26/2010	12:31:50 PM	BCl3 valve closed
10/26/2010	12:31:50 PM	PH3 valve closed
10/26/2010	12:31:50 PM	SiCl4 pre valve closed
10/26/2010	12:31:50 PM	SiCl4 post valve closed
10/26/2010	12:31:50 PM	Main Vac valve closed
10/26/2010	12:31:50 PM	Bubbler valve closed
10/26/2010	12:31:50 PM	Bypass valve opened
10/26/2010	12:31:50 PM	Helium MFC set to  0.000000
10/26/2010	12:31:50 PM	H2 MFC set to  0.000000
10/26/2010	12:31:50 PM	BCl3 MFC set to  0.000000
10/26/2010	12:31:50 PM	PHl3 MFC set to  0.000000
10/26/2010	12:31:50 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:31:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:31:50 PM	Tube furnace set to 0
10/26/2010	12:31:51 PM	Helium valve closed
10/26/2010	12:31:51 PM	H2 valve closed
10/26/2010	12:31:51 PM	BCl3 valve closed
10/26/2010	12:31:51 PM	PH3 valve closed
10/26/2010	12:31:51 PM	SiCl4 pre valve closed
10/26/2010	12:31:51 PM	SiCl4 post valve closed
10/26/2010	12:31:51 PM	Bubbler valve closed
10/26/2010	12:31:51 PM	Main Vac valve opened
10/26/2010	12:31:51 PM	Bypass valve opened
10/26/2010	12:31:51 PM	Helium MFC set to  0.000000
10/26/2010	12:31:51 PM	H2 MFC set to  0.000000
10/26/2010	12:31:51 PM	BCl3 MFC set to  0.000000
10/26/2010	12:31:51 PM	PHl3 MFC set to  0.000000
10/26/2010	12:31:51 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:31:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:31:51 PM	Tube furnace set to 0
10/26/2010	12:32:51 PM	H2 valve closed
10/26/2010	12:32:51 PM	BCl3 valve closed
10/26/2010	12:32:51 PM	PH3 valve closed
10/26/2010	12:32:51 PM	SiCl4 pre valve closed
10/26/2010	12:32:51 PM	SiCl4 post valve closed
10/26/2010	12:32:51 PM	Bubbler valve closed
10/26/2010	12:32:51 PM	Helium valve opened
10/26/2010	12:32:51 PM	Main Vac valve opened
10/26/2010	12:32:51 PM	Bypass valve opened
10/26/2010	12:32:51 PM	Helium MFC set to  100.000000
10/26/2010	12:32:51 PM	H2 MFC set to  0.000000
10/26/2010	12:32:51 PM	BCl3 MFC set to  0.000000
10/26/2010	12:32:51 PM	PHl3 MFC set to  0.000000
10/26/2010	12:32:51 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:32:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:32:51 PM	Tube furnace set to 0
10/26/2010	12:33:51 PM	Helium valve closed
10/26/2010	12:33:51 PM	H2 valve closed
10/26/2010	12:33:51 PM	BCl3 valve closed
10/26/2010	12:33:51 PM	PH3 valve closed
10/26/2010	12:33:51 PM	SiCl4 pre valve closed
10/26/2010	12:33:51 PM	SiCl4 post valve closed
10/26/2010	12:33:51 PM	Bubbler valve closed
10/26/2010	12:33:51 PM	Main Vac valve opened
10/26/2010	12:33:51 PM	Bypass valve opened
10/26/2010	12:33:51 PM	Helium MFC set to  0.000000
10/26/2010	12:33:51 PM	H2 MFC set to  0.000000
10/26/2010	12:33:51 PM	BCl3 MFC set to  0.000000
10/26/2010	12:33:51 PM	PHl3 MFC set to  0.000000
10/26/2010	12:33:51 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:33:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:33:51 PM	Tube furnace set to 0
10/26/2010	12:34:51 PM	H2 valve closed
10/26/2010	12:34:51 PM	BCl3 valve closed
10/26/2010	12:34:51 PM	PH3 valve closed
10/26/2010	12:34:51 PM	SiCl4 pre valve closed
10/26/2010	12:34:51 PM	SiCl4 post valve closed
10/26/2010	12:34:51 PM	Bubbler valve closed
10/26/2010	12:34:51 PM	Helium valve opened
10/26/2010	12:34:51 PM	Main Vac valve opened
10/26/2010	12:34:51 PM	Bypass valve opened
10/26/2010	12:34:51 PM	Helium MFC set to  100.000000
10/26/2010	12:34:51 PM	H2 MFC set to  0.000000
10/26/2010	12:34:51 PM	BCl3 MFC set to  0.000000
10/26/2010	12:34:51 PM	PHl3 MFC set to  0.000000
10/26/2010	12:34:51 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:34:51 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:34:51 PM	Tube furnace set to 0
10/26/2010	12:35:51 PM	Helium valve closed
10/26/2010	12:35:51 PM	H2 valve closed
10/26/2010	12:35:51 PM	BCl3 valve closed
10/26/2010	12:35:51 PM	PH3 valve closed
10/26/2010	12:35:51 PM	SiCl4 pre valve closed
10/26/2010	12:35:51 PM	SiCl4 post valve closed
10/26/2010	12:35:51 PM	Bubbler valve closed
10/26/2010	12:35:52 PM	Main Vac valve opened
10/26/2010	12:35:52 PM	Bypass valve opened
10/26/2010	12:35:52 PM	Helium MFC set to  0.000000
10/26/2010	12:35:52 PM	H2 MFC set to  0.000000
10/26/2010	12:35:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:35:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:35:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:35:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:35:52 PM	Tube furnace set to 0
10/26/2010	12:36:52 PM	H2 valve closed
10/26/2010	12:36:52 PM	BCl3 valve closed
10/26/2010	12:36:52 PM	PH3 valve closed
10/26/2010	12:36:52 PM	SiCl4 pre valve closed
10/26/2010	12:36:52 PM	SiCl4 post valve closed
10/26/2010	12:36:52 PM	Bubbler valve closed
10/26/2010	12:36:52 PM	Helium valve opened
10/26/2010	12:36:52 PM	Main Vac valve opened
10/26/2010	12:36:52 PM	Bypass valve opened
10/26/2010	12:36:52 PM	Helium MFC set to  100.000000
10/26/2010	12:36:52 PM	H2 MFC set to  0.000000
10/26/2010	12:36:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:36:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:36:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:36:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:36:52 PM	Tube furnace set to 0
10/26/2010	12:37:52 PM	Helium valve closed
10/26/2010	12:37:52 PM	H2 valve closed
10/26/2010	12:37:52 PM	BCl3 valve closed
10/26/2010	12:37:52 PM	PH3 valve closed
10/26/2010	12:37:52 PM	SiCl4 pre valve closed
10/26/2010	12:37:52 PM	SiCl4 post valve closed
10/26/2010	12:37:52 PM	Bubbler valve closed
10/26/2010	12:37:52 PM	Main Vac valve opened
10/26/2010	12:37:52 PM	Bypass valve opened
10/26/2010	12:37:52 PM	Helium MFC set to  0.000000
10/26/2010	12:37:52 PM	H2 MFC set to  0.000000
10/26/2010	12:37:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:37:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:37:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:37:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:37:52 PM	Tube furnace set to 0
10/26/2010	12:38:52 PM	H2 valve closed
10/26/2010	12:38:52 PM	BCl3 valve closed
10/26/2010	12:38:52 PM	PH3 valve closed
10/26/2010	12:38:52 PM	SiCl4 pre valve closed
10/26/2010	12:38:52 PM	SiCl4 post valve closed
10/26/2010	12:38:52 PM	Bubbler valve closed
10/26/2010	12:38:52 PM	Helium valve opened
10/26/2010	12:38:52 PM	Main Vac valve opened
10/26/2010	12:38:52 PM	Bypass valve opened
10/26/2010	12:38:52 PM	Helium MFC set to  100.000000
10/26/2010	12:38:52 PM	H2 MFC set to  0.000000
10/26/2010	12:38:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:38:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:38:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:38:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:38:52 PM	Tube furnace set to 0
10/26/2010	12:39:52 PM	Helium valve closed
10/26/2010	12:39:52 PM	H2 valve closed
10/26/2010	12:39:52 PM	BCl3 valve closed
10/26/2010	12:39:52 PM	PH3 valve closed
10/26/2010	12:39:52 PM	SiCl4 pre valve closed
10/26/2010	12:39:52 PM	SiCl4 post valve closed
10/26/2010	12:39:52 PM	Bubbler valve closed
10/26/2010	12:39:52 PM	Main Vac valve opened
10/26/2010	12:39:52 PM	Bypass valve opened
10/26/2010	12:39:52 PM	Helium MFC set to  0.000000
10/26/2010	12:39:52 PM	H2 MFC set to  0.000000
10/26/2010	12:39:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:39:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:39:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:39:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:39:52 PM	Tube furnace set to 0
10/26/2010	12:40:52 PM	H2 valve closed
10/26/2010	12:40:52 PM	BCl3 valve closed
10/26/2010	12:40:52 PM	PH3 valve closed
10/26/2010	12:40:52 PM	SiCl4 pre valve closed
10/26/2010	12:40:52 PM	SiCl4 post valve closed
10/26/2010	12:40:52 PM	Bubbler valve closed
10/26/2010	12:40:52 PM	Helium valve opened
10/26/2010	12:40:52 PM	Main Vac valve opened
10/26/2010	12:40:52 PM	Bypass valve opened
10/26/2010	12:40:52 PM	Helium MFC set to  100.000000
10/26/2010	12:40:52 PM	H2 MFC set to  0.000000
10/26/2010	12:40:52 PM	BCl3 MFC set to  0.000000
10/26/2010	12:40:52 PM	PHl3 MFC set to  0.000000
10/26/2010	12:40:52 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:40:52 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:40:53 PM	Tube furnace set to 0
10/26/2010	12:41:53 PM	Helium valve closed
10/26/2010	12:41:53 PM	H2 valve closed
10/26/2010	12:41:53 PM	BCl3 valve closed
10/26/2010	12:41:53 PM	PH3 valve closed
10/26/2010	12:41:53 PM	SiCl4 pre valve closed
10/26/2010	12:41:53 PM	SiCl4 post valve closed
10/26/2010	12:41:53 PM	Bubbler valve closed
10/26/2010	12:41:53 PM	Main Vac valve opened
10/26/2010	12:41:53 PM	Bypass valve opened
10/26/2010	12:41:53 PM	Helium MFC set to  0.000000
10/26/2010	12:41:53 PM	H2 MFC set to  0.000000
10/26/2010	12:41:53 PM	BCl3 MFC set to  0.000000
10/26/2010	12:41:53 PM	PHl3 MFC set to  0.000000
10/26/2010	12:41:53 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:41:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:41:53 PM	Tube furnace set to 0
10/26/2010	12:42:53 PM	H2 valve closed
10/26/2010	12:42:53 PM	BCl3 valve closed
10/26/2010	12:42:53 PM	PH3 valve closed
10/26/2010	12:42:53 PM	SiCl4 pre valve closed
10/26/2010	12:42:53 PM	SiCl4 post valve closed
10/26/2010	12:42:53 PM	Bubbler valve closed
10/26/2010	12:42:53 PM	Helium valve opened
10/26/2010	12:42:53 PM	Main Vac valve opened
10/26/2010	12:42:53 PM	Bypass valve opened
10/26/2010	12:42:53 PM	Helium MFC set to  100.000000
10/26/2010	12:42:53 PM	H2 MFC set to  0.000000
10/26/2010	12:42:53 PM	BCl3 MFC set to  0.000000
10/26/2010	12:42:53 PM	PHl3 MFC set to  0.000000
10/26/2010	12:42:53 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:42:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:42:53 PM	Tube furnace set to 0
10/26/2010	12:43:53 PM	Helium valve closed
10/26/2010	12:43:53 PM	H2 valve closed
10/26/2010	12:43:53 PM	BCl3 valve closed
10/26/2010	12:43:53 PM	PH3 valve closed
10/26/2010	12:43:53 PM	SiCl4 pre valve closed
10/26/2010	12:43:53 PM	SiCl4 post valve closed
10/26/2010	12:43:53 PM	Bubbler valve closed
10/26/2010	12:43:53 PM	Main Vac valve opened
10/26/2010	12:43:53 PM	Bypass valve opened
10/26/2010	12:43:53 PM	Helium MFC set to  0.000000
10/26/2010	12:43:53 PM	H2 MFC set to  0.000000
10/26/2010	12:43:53 PM	BCl3 MFC set to  0.000000
10/26/2010	12:43:53 PM	PHl3 MFC set to  0.000000
10/26/2010	12:43:53 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:43:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:43:53 PM	Tube furnace set to 0
10/26/2010	12:44:53 PM	H2 valve closed
10/26/2010	12:44:53 PM	BCl3 valve closed
10/26/2010	12:44:53 PM	PH3 valve closed
10/26/2010	12:44:53 PM	SiCl4 pre valve closed
10/26/2010	12:44:53 PM	SiCl4 post valve closed
10/26/2010	12:44:53 PM	Bubbler valve closed
10/26/2010	12:44:53 PM	Helium valve opened
10/26/2010	12:44:53 PM	Main Vac valve opened
10/26/2010	12:44:53 PM	Bypass valve opened
10/26/2010	12:44:53 PM	Helium MFC set to  100.000000
10/26/2010	12:44:53 PM	H2 MFC set to  0.000000
10/26/2010	12:44:53 PM	BCl3 MFC set to  0.000000
10/26/2010	12:44:53 PM	PHl3 MFC set to  0.000000
10/26/2010	12:44:53 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:44:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:44:53 PM	Tube furnace set to 0
10/26/2010	12:45:53 PM	Helium valve closed
10/26/2010	12:45:53 PM	H2 valve closed
10/26/2010	12:45:53 PM	BCl3 valve closed
10/26/2010	12:45:53 PM	PH3 valve closed
10/26/2010	12:45:53 PM	SiCl4 pre valve closed
10/26/2010	12:45:53 PM	SiCl4 post valve closed
10/26/2010	12:45:53 PM	Bubbler valve closed
10/26/2010	12:45:53 PM	Main Vac valve opened
10/26/2010	12:45:53 PM	Bypass valve opened
10/26/2010	12:45:53 PM	Helium MFC set to  0.000000
10/26/2010	12:45:53 PM	H2 MFC set to  0.000000
10/26/2010	12:45:53 PM	BCl3 MFC set to  0.000000
10/26/2010	12:45:53 PM	PHl3 MFC set to  0.000000
10/26/2010	12:45:53 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:45:53 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:45:54 PM	Tube furnace set to 0
10/26/2010	12:46:54 PM	H2 valve closed
10/26/2010	12:46:54 PM	BCl3 valve closed
10/26/2010	12:46:54 PM	PH3 valve closed
10/26/2010	12:46:54 PM	SiCl4 pre valve closed
10/26/2010	12:46:54 PM	SiCl4 post valve closed
10/26/2010	12:46:54 PM	Bubbler valve closed
10/26/2010	12:46:54 PM	Helium valve opened
10/26/2010	12:46:54 PM	Main Vac valve opened
10/26/2010	12:46:54 PM	Bypass valve opened
10/26/2010	12:46:54 PM	Helium MFC set to  100.000000
10/26/2010	12:46:54 PM	H2 MFC set to  0.000000
10/26/2010	12:46:54 PM	BCl3 MFC set to  0.000000
10/26/2010	12:46:54 PM	PHl3 MFC set to  0.000000
10/26/2010	12:46:54 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:46:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:46:54 PM	Tube furnace set to 0
10/26/2010	12:47:54 PM	Helium valve closed
10/26/2010	12:47:54 PM	H2 valve closed
10/26/2010	12:47:54 PM	BCl3 valve closed
10/26/2010	12:47:54 PM	PH3 valve closed
10/26/2010	12:47:54 PM	SiCl4 pre valve closed
10/26/2010	12:47:54 PM	SiCl4 post valve closed
10/26/2010	12:47:54 PM	Bubbler valve closed
10/26/2010	12:47:54 PM	Main Vac valve opened
10/26/2010	12:47:54 PM	Bypass valve opened
10/26/2010	12:47:54 PM	Helium MFC set to  0.000000
10/26/2010	12:47:54 PM	H2 MFC set to  0.000000
10/26/2010	12:47:54 PM	BCl3 MFC set to  0.000000
10/26/2010	12:47:54 PM	PHl3 MFC set to  0.000000
10/26/2010	12:47:54 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:47:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:47:54 PM	Tube furnace set to 0
10/26/2010	12:48:54 PM	H2 valve closed
10/26/2010	12:48:54 PM	BCl3 valve closed
10/26/2010	12:48:54 PM	PH3 valve closed
10/26/2010	12:48:54 PM	SiCl4 pre valve closed
10/26/2010	12:48:54 PM	SiCl4 post valve closed
10/26/2010	12:48:54 PM	Bubbler valve closed
10/26/2010	12:48:54 PM	Helium valve opened
10/26/2010	12:48:54 PM	Main Vac valve opened
10/26/2010	12:48:54 PM	Bypass valve opened
10/26/2010	12:48:54 PM	Helium MFC set to  100.000000
10/26/2010	12:48:54 PM	H2 MFC set to  0.000000
10/26/2010	12:48:54 PM	BCl3 MFC set to  0.000000
10/26/2010	12:48:54 PM	PHl3 MFC set to  0.000000
10/26/2010	12:48:54 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:48:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:48:54 PM	Tube furnace set to 0
10/26/2010	12:49:54 PM	Helium valve closed
10/26/2010	12:49:54 PM	H2 valve closed
10/26/2010	12:49:54 PM	BCl3 valve closed
10/26/2010	12:49:54 PM	PH3 valve closed
10/26/2010	12:49:54 PM	SiCl4 pre valve closed
10/26/2010	12:49:54 PM	SiCl4 post valve closed
10/26/2010	12:49:54 PM	Bubbler valve closed
10/26/2010	12:49:54 PM	Main Vac valve opened
10/26/2010	12:49:54 PM	Bypass valve opened
10/26/2010	12:49:54 PM	Helium MFC set to  0.000000
10/26/2010	12:49:54 PM	H2 MFC set to  0.000000
10/26/2010	12:49:54 PM	BCl3 MFC set to  0.000000
10/26/2010	12:49:54 PM	PHl3 MFC set to  0.000000
10/26/2010	12:49:54 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:49:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:49:54 PM	Tube furnace set to 0
10/26/2010	12:50:54 PM	H2 valve closed
10/26/2010	12:50:54 PM	BCl3 valve closed
10/26/2010	12:50:54 PM	PH3 valve closed
10/26/2010	12:50:54 PM	SiCl4 pre valve closed
10/26/2010	12:50:54 PM	SiCl4 post valve closed
10/26/2010	12:50:54 PM	Bubbler valve closed
10/26/2010	12:50:54 PM	Helium valve opened
10/26/2010	12:50:54 PM	Main Vac valve opened
10/26/2010	12:50:54 PM	Bypass valve opened
10/26/2010	12:50:54 PM	Helium MFC set to  100.000000
10/26/2010	12:50:54 PM	H2 MFC set to  0.000000
10/26/2010	12:50:54 PM	BCl3 MFC set to  0.000000
10/26/2010	12:50:54 PM	PHl3 MFC set to  0.000000
10/26/2010	12:50:54 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:50:54 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:50:55 PM	Tube furnace set to 0
10/26/2010	12:51:55 PM	Helium valve closed
10/26/2010	12:51:55 PM	H2 valve closed
10/26/2010	12:51:55 PM	BCl3 valve closed
10/26/2010	12:51:55 PM	PH3 valve closed
10/26/2010	12:51:55 PM	SiCl4 pre valve closed
10/26/2010	12:51:55 PM	SiCl4 post valve closed
10/26/2010	12:51:55 PM	Bubbler valve closed
10/26/2010	12:51:55 PM	Main Vac valve opened
10/26/2010	12:51:55 PM	Bypass valve opened
10/26/2010	12:51:55 PM	Helium MFC set to  0.000000
10/26/2010	12:51:55 PM	H2 MFC set to  0.000000
10/26/2010	12:51:55 PM	BCl3 MFC set to  0.000000
10/26/2010	12:51:55 PM	PHl3 MFC set to  0.000000
10/26/2010	12:51:55 PM	SiCl4 MFC set to  0.000000
10/26/2010	12:51:55 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	12:51:55 PM	Tube furnace set to 0
10/26/2010	12:51:56 PM	Run finished at 12:51 PM
10/26/2010	12:51:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	1:08:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	1:08:21 PM	Recipe started at 1:08 PM
10/26/2010	1:08:21 PM	Helium valve closed
10/26/2010	1:08:21 PM	H2 valve closed
10/26/2010	1:08:21 PM	BCl3 valve closed
10/26/2010	1:08:21 PM	PH3 valve closed
10/26/2010	1:08:21 PM	SiCl4 pre valve closed
10/26/2010	1:08:21 PM	SiCl4 post valve closed
10/26/2010	1:08:21 PM	Main Vac valve closed
10/26/2010	1:08:21 PM	Bubbler valve closed
10/26/2010	1:08:21 PM	Bypass valve opened
10/26/2010	1:08:21 PM	Helium MFC set to  0.000000
10/26/2010	1:08:21 PM	H2 MFC set to  0.000000
10/26/2010	1:08:21 PM	BCl3 MFC set to  0.000000
10/26/2010	1:08:21 PM	PHl3 MFC set to  0.000000
10/26/2010	1:08:21 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:08:21 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:08:21 PM	Tube furnace set to 0
10/26/2010	1:08:21 PM	Helium valve closed
10/26/2010	1:08:21 PM	H2 valve closed
10/26/2010	1:08:21 PM	BCl3 valve closed
10/26/2010	1:08:21 PM	PH3 valve closed
10/26/2010	1:08:21 PM	SiCl4 pre valve closed
10/26/2010	1:08:21 PM	SiCl4 post valve closed
10/26/2010	1:08:21 PM	Bubbler valve closed
10/26/2010	1:08:21 PM	Main Vac valve opened
10/26/2010	1:08:21 PM	Bypass valve opened
10/26/2010	1:08:21 PM	Helium MFC set to  0.000000
10/26/2010	1:08:21 PM	H2 MFC set to  0.000000
10/26/2010	1:08:21 PM	BCl3 MFC set to  0.000000
10/26/2010	1:08:21 PM	PHl3 MFC set to  0.000000
10/26/2010	1:08:21 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:08:21 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:08:22 PM	Tube furnace set to 0
10/26/2010	1:09:22 PM	H2 valve closed
10/26/2010	1:09:22 PM	BCl3 valve closed
10/26/2010	1:09:22 PM	PH3 valve closed
10/26/2010	1:09:22 PM	SiCl4 pre valve closed
10/26/2010	1:09:22 PM	SiCl4 post valve closed
10/26/2010	1:09:22 PM	Bubbler valve closed
10/26/2010	1:09:22 PM	Helium valve opened
10/26/2010	1:09:22 PM	Main Vac valve opened
10/26/2010	1:09:22 PM	Bypass valve opened
10/26/2010	1:09:22 PM	Helium MFC set to  100.000000
10/26/2010	1:09:22 PM	H2 MFC set to  0.000000
10/26/2010	1:09:22 PM	BCl3 MFC set to  0.000000
10/26/2010	1:09:22 PM	PHl3 MFC set to  0.000000
10/26/2010	1:09:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:09:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:09:22 PM	Tube furnace set to 0
10/26/2010	1:10:22 PM	Helium valve closed
10/26/2010	1:10:22 PM	H2 valve closed
10/26/2010	1:10:22 PM	BCl3 valve closed
10/26/2010	1:10:22 PM	PH3 valve closed
10/26/2010	1:10:22 PM	SiCl4 pre valve closed
10/26/2010	1:10:22 PM	SiCl4 post valve closed
10/26/2010	1:10:22 PM	Bubbler valve closed
10/26/2010	1:10:22 PM	Main Vac valve opened
10/26/2010	1:10:22 PM	Bypass valve opened
10/26/2010	1:10:22 PM	Helium MFC set to  0.000000
10/26/2010	1:10:22 PM	H2 MFC set to  0.000000
10/26/2010	1:10:22 PM	BCl3 MFC set to  0.000000
10/26/2010	1:10:22 PM	PHl3 MFC set to  0.000000
10/26/2010	1:10:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:10:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:10:22 PM	Tube furnace set to 0
10/26/2010	1:11:22 PM	H2 valve closed
10/26/2010	1:11:22 PM	BCl3 valve closed
10/26/2010	1:11:22 PM	PH3 valve closed
10/26/2010	1:11:22 PM	SiCl4 pre valve closed
10/26/2010	1:11:22 PM	SiCl4 post valve closed
10/26/2010	1:11:22 PM	Bubbler valve closed
10/26/2010	1:11:22 PM	Helium valve opened
10/26/2010	1:11:22 PM	Main Vac valve opened
10/26/2010	1:11:22 PM	Bypass valve opened
10/26/2010	1:11:22 PM	Helium MFC set to  100.000000
10/26/2010	1:11:22 PM	H2 MFC set to  0.000000
10/26/2010	1:11:22 PM	BCl3 MFC set to  0.000000
10/26/2010	1:11:22 PM	PHl3 MFC set to  0.000000
10/26/2010	1:11:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:11:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:11:22 PM	Tube furnace set to 0
10/26/2010	1:12:22 PM	Helium valve closed
10/26/2010	1:12:22 PM	H2 valve closed
10/26/2010	1:12:22 PM	BCl3 valve closed
10/26/2010	1:12:22 PM	PH3 valve closed
10/26/2010	1:12:22 PM	SiCl4 pre valve closed
10/26/2010	1:12:22 PM	SiCl4 post valve closed
10/26/2010	1:12:22 PM	Bubbler valve closed
10/26/2010	1:12:22 PM	Main Vac valve opened
10/26/2010	1:12:22 PM	Bypass valve opened
10/26/2010	1:12:22 PM	Helium MFC set to  0.000000
10/26/2010	1:12:22 PM	H2 MFC set to  0.000000
10/26/2010	1:12:22 PM	BCl3 MFC set to  0.000000
10/26/2010	1:12:22 PM	PHl3 MFC set to  0.000000
10/26/2010	1:12:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:12:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:12:22 PM	Tube furnace set to 0
10/26/2010	1:13:22 PM	H2 valve closed
10/26/2010	1:13:22 PM	BCl3 valve closed
10/26/2010	1:13:22 PM	PH3 valve closed
10/26/2010	1:13:22 PM	SiCl4 pre valve closed
10/26/2010	1:13:22 PM	SiCl4 post valve closed
10/26/2010	1:13:22 PM	Bubbler valve closed
10/26/2010	1:13:22 PM	Helium valve opened
10/26/2010	1:13:22 PM	Main Vac valve opened
10/26/2010	1:13:22 PM	Bypass valve opened
10/26/2010	1:13:22 PM	Helium MFC set to  100.000000
10/26/2010	1:13:22 PM	H2 MFC set to  0.000000
10/26/2010	1:13:22 PM	BCl3 MFC set to  0.000000
10/26/2010	1:13:22 PM	PHl3 MFC set to  0.000000
10/26/2010	1:13:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:13:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:13:23 PM	Tube furnace set to 0
10/26/2010	1:14:23 PM	Helium valve closed
10/26/2010	1:14:23 PM	H2 valve closed
10/26/2010	1:14:23 PM	BCl3 valve closed
10/26/2010	1:14:23 PM	PH3 valve closed
10/26/2010	1:14:23 PM	SiCl4 pre valve closed
10/26/2010	1:14:23 PM	SiCl4 post valve closed
10/26/2010	1:14:23 PM	Bubbler valve closed
10/26/2010	1:14:23 PM	Main Vac valve opened
10/26/2010	1:14:23 PM	Bypass valve opened
10/26/2010	1:14:23 PM	Helium MFC set to  0.000000
10/26/2010	1:14:23 PM	H2 MFC set to  0.000000
10/26/2010	1:14:23 PM	BCl3 MFC set to  0.000000
10/26/2010	1:14:23 PM	PHl3 MFC set to  0.000000
10/26/2010	1:14:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:14:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:14:23 PM	Tube furnace set to 0
10/26/2010	1:15:23 PM	H2 valve closed
10/26/2010	1:15:23 PM	BCl3 valve closed
10/26/2010	1:15:23 PM	PH3 valve closed
10/26/2010	1:15:23 PM	SiCl4 pre valve closed
10/26/2010	1:15:23 PM	SiCl4 post valve closed
10/26/2010	1:15:23 PM	Bubbler valve closed
10/26/2010	1:15:23 PM	Helium valve opened
10/26/2010	1:15:23 PM	Main Vac valve opened
10/26/2010	1:15:23 PM	Bypass valve opened
10/26/2010	1:15:23 PM	Helium MFC set to  100.000000
10/26/2010	1:15:23 PM	H2 MFC set to  0.000000
10/26/2010	1:15:23 PM	BCl3 MFC set to  0.000000
10/26/2010	1:15:23 PM	PHl3 MFC set to  0.000000
10/26/2010	1:15:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:15:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:15:23 PM	Tube furnace set to 0
10/26/2010	1:16:23 PM	Helium valve closed
10/26/2010	1:16:23 PM	H2 valve closed
10/26/2010	1:16:23 PM	BCl3 valve closed
10/26/2010	1:16:23 PM	PH3 valve closed
10/26/2010	1:16:23 PM	SiCl4 pre valve closed
10/26/2010	1:16:23 PM	SiCl4 post valve closed
10/26/2010	1:16:23 PM	Bubbler valve closed
10/26/2010	1:16:23 PM	Main Vac valve opened
10/26/2010	1:16:23 PM	Bypass valve opened
10/26/2010	1:16:23 PM	Helium MFC set to  0.000000
10/26/2010	1:16:23 PM	H2 MFC set to  0.000000
10/26/2010	1:16:23 PM	BCl3 MFC set to  0.000000
10/26/2010	1:16:23 PM	PHl3 MFC set to  0.000000
10/26/2010	1:16:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:16:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:16:23 PM	Tube furnace set to 0
10/26/2010	1:17:23 PM	H2 valve closed
10/26/2010	1:17:23 PM	BCl3 valve closed
10/26/2010	1:17:23 PM	PH3 valve closed
10/26/2010	1:17:23 PM	SiCl4 pre valve closed
10/26/2010	1:17:23 PM	SiCl4 post valve closed
10/26/2010	1:17:23 PM	Bubbler valve closed
10/26/2010	1:17:23 PM	Helium valve opened
10/26/2010	1:17:23 PM	Main Vac valve opened
10/26/2010	1:17:23 PM	Bypass valve opened
10/26/2010	1:17:23 PM	Helium MFC set to  100.000000
10/26/2010	1:17:23 PM	H2 MFC set to  0.000000
10/26/2010	1:17:23 PM	BCl3 MFC set to  0.000000
10/26/2010	1:17:23 PM	PHl3 MFC set to  0.000000
10/26/2010	1:17:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:17:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:17:23 PM	Tube furnace set to 0
10/26/2010	1:18:23 PM	Helium valve closed
10/26/2010	1:18:23 PM	H2 valve closed
10/26/2010	1:18:23 PM	BCl3 valve closed
10/26/2010	1:18:23 PM	PH3 valve closed
10/26/2010	1:18:23 PM	SiCl4 pre valve closed
10/26/2010	1:18:23 PM	SiCl4 post valve closed
10/26/2010	1:18:23 PM	Bubbler valve closed
10/26/2010	1:18:23 PM	Main Vac valve opened
10/26/2010	1:18:23 PM	Bypass valve opened
10/26/2010	1:18:23 PM	Helium MFC set to  0.000000
10/26/2010	1:18:23 PM	H2 MFC set to  0.000000
10/26/2010	1:18:23 PM	BCl3 MFC set to  0.000000
10/26/2010	1:18:23 PM	PHl3 MFC set to  0.000000
10/26/2010	1:18:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:18:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:18:24 PM	Tube furnace set to 0
10/26/2010	1:19:24 PM	H2 valve closed
10/26/2010	1:19:24 PM	BCl3 valve closed
10/26/2010	1:19:24 PM	PH3 valve closed
10/26/2010	1:19:24 PM	SiCl4 pre valve closed
10/26/2010	1:19:24 PM	SiCl4 post valve closed
10/26/2010	1:19:24 PM	Bubbler valve closed
10/26/2010	1:19:24 PM	Helium valve opened
10/26/2010	1:19:24 PM	Main Vac valve opened
10/26/2010	1:19:24 PM	Bypass valve opened
10/26/2010	1:19:24 PM	Helium MFC set to  100.000000
10/26/2010	1:19:24 PM	H2 MFC set to  0.000000
10/26/2010	1:19:24 PM	BCl3 MFC set to  0.000000
10/26/2010	1:19:24 PM	PHl3 MFC set to  0.000000
10/26/2010	1:19:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:19:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:19:24 PM	Tube furnace set to 0
10/26/2010	1:20:24 PM	Helium valve closed
10/26/2010	1:20:24 PM	H2 valve closed
10/26/2010	1:20:24 PM	BCl3 valve closed
10/26/2010	1:20:24 PM	PH3 valve closed
10/26/2010	1:20:24 PM	SiCl4 pre valve closed
10/26/2010	1:20:24 PM	SiCl4 post valve closed
10/26/2010	1:20:24 PM	Bubbler valve closed
10/26/2010	1:20:24 PM	Main Vac valve opened
10/26/2010	1:20:24 PM	Bypass valve opened
10/26/2010	1:20:24 PM	Helium MFC set to  0.000000
10/26/2010	1:20:24 PM	H2 MFC set to  0.000000
10/26/2010	1:20:24 PM	BCl3 MFC set to  0.000000
10/26/2010	1:20:24 PM	PHl3 MFC set to  0.000000
10/26/2010	1:20:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:20:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:20:24 PM	Tube furnace set to 0
10/26/2010	1:21:24 PM	H2 valve closed
10/26/2010	1:21:24 PM	BCl3 valve closed
10/26/2010	1:21:24 PM	PH3 valve closed
10/26/2010	1:21:24 PM	SiCl4 pre valve closed
10/26/2010	1:21:24 PM	SiCl4 post valve closed
10/26/2010	1:21:24 PM	Bubbler valve closed
10/26/2010	1:21:24 PM	Helium valve opened
10/26/2010	1:21:24 PM	Main Vac valve opened
10/26/2010	1:21:24 PM	Bypass valve opened
10/26/2010	1:21:24 PM	Helium MFC set to  100.000000
10/26/2010	1:21:24 PM	H2 MFC set to  0.000000
10/26/2010	1:21:24 PM	BCl3 MFC set to  0.000000
10/26/2010	1:21:24 PM	PHl3 MFC set to  0.000000
10/26/2010	1:21:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:21:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:21:24 PM	Tube furnace set to 0
10/26/2010	1:22:24 PM	Helium valve closed
10/26/2010	1:22:24 PM	H2 valve closed
10/26/2010	1:22:24 PM	BCl3 valve closed
10/26/2010	1:22:24 PM	PH3 valve closed
10/26/2010	1:22:24 PM	SiCl4 pre valve closed
10/26/2010	1:22:24 PM	SiCl4 post valve closed
10/26/2010	1:22:24 PM	Bubbler valve closed
10/26/2010	1:22:24 PM	Main Vac valve opened
10/26/2010	1:22:24 PM	Bypass valve opened
10/26/2010	1:22:24 PM	Helium MFC set to  0.000000
10/26/2010	1:22:24 PM	H2 MFC set to  0.000000
10/26/2010	1:22:24 PM	BCl3 MFC set to  0.000000
10/26/2010	1:22:24 PM	PHl3 MFC set to  0.000000
10/26/2010	1:22:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:22:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:22:24 PM	Tube furnace set to 0
10/26/2010	1:23:24 PM	H2 valve closed
10/26/2010	1:23:24 PM	BCl3 valve closed
10/26/2010	1:23:24 PM	PH3 valve closed
10/26/2010	1:23:24 PM	SiCl4 pre valve closed
10/26/2010	1:23:24 PM	SiCl4 post valve closed
10/26/2010	1:23:24 PM	Bubbler valve closed
10/26/2010	1:23:24 PM	Helium valve opened
10/26/2010	1:23:24 PM	Main Vac valve opened
10/26/2010	1:23:24 PM	Bypass valve opened
10/26/2010	1:23:24 PM	Helium MFC set to  100.000000
10/26/2010	1:23:24 PM	H2 MFC set to  0.000000
10/26/2010	1:23:24 PM	BCl3 MFC set to  0.000000
10/26/2010	1:23:24 PM	PHl3 MFC set to  0.000000
10/26/2010	1:23:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:23:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:23:25 PM	Tube furnace set to 0
10/26/2010	1:24:25 PM	Helium valve closed
10/26/2010	1:24:25 PM	H2 valve closed
10/26/2010	1:24:25 PM	BCl3 valve closed
10/26/2010	1:24:25 PM	PH3 valve closed
10/26/2010	1:24:25 PM	SiCl4 pre valve closed
10/26/2010	1:24:25 PM	SiCl4 post valve closed
10/26/2010	1:24:25 PM	Bubbler valve closed
10/26/2010	1:24:25 PM	Main Vac valve opened
10/26/2010	1:24:25 PM	Bypass valve opened
10/26/2010	1:24:25 PM	Helium MFC set to  0.000000
10/26/2010	1:24:25 PM	H2 MFC set to  0.000000
10/26/2010	1:24:25 PM	BCl3 MFC set to  0.000000
10/26/2010	1:24:25 PM	PHl3 MFC set to  0.000000
10/26/2010	1:24:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:24:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:24:25 PM	Tube furnace set to 0
10/26/2010	1:25:25 PM	H2 valve closed
10/26/2010	1:25:25 PM	BCl3 valve closed
10/26/2010	1:25:25 PM	PH3 valve closed
10/26/2010	1:25:25 PM	SiCl4 pre valve closed
10/26/2010	1:25:25 PM	SiCl4 post valve closed
10/26/2010	1:25:25 PM	Bubbler valve closed
10/26/2010	1:25:25 PM	Helium valve opened
10/26/2010	1:25:25 PM	Main Vac valve opened
10/26/2010	1:25:25 PM	Bypass valve opened
10/26/2010	1:25:25 PM	Helium MFC set to  100.000000
10/26/2010	1:25:25 PM	H2 MFC set to  0.000000
10/26/2010	1:25:25 PM	BCl3 MFC set to  0.000000
10/26/2010	1:25:25 PM	PHl3 MFC set to  0.000000
10/26/2010	1:25:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:25:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:25:25 PM	Tube furnace set to 0
10/26/2010	1:26:25 PM	Helium valve closed
10/26/2010	1:26:25 PM	H2 valve closed
10/26/2010	1:26:25 PM	BCl3 valve closed
10/26/2010	1:26:25 PM	PH3 valve closed
10/26/2010	1:26:25 PM	SiCl4 pre valve closed
10/26/2010	1:26:25 PM	SiCl4 post valve closed
10/26/2010	1:26:25 PM	Bubbler valve closed
10/26/2010	1:26:25 PM	Main Vac valve opened
10/26/2010	1:26:25 PM	Bypass valve opened
10/26/2010	1:26:25 PM	Helium MFC set to  0.000000
10/26/2010	1:26:25 PM	H2 MFC set to  0.000000
10/26/2010	1:26:25 PM	BCl3 MFC set to  0.000000
10/26/2010	1:26:25 PM	PHl3 MFC set to  0.000000
10/26/2010	1:26:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:26:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:26:25 PM	Tube furnace set to 0
10/26/2010	1:26:58 PM	H2 valve closed
10/26/2010	1:26:58 PM	BCl3 valve closed
10/26/2010	1:26:58 PM	PH3 valve closed
10/26/2010	1:26:58 PM	SiCl4 pre valve closed
10/26/2010	1:26:58 PM	SiCl4 post valve closed
10/26/2010	1:26:58 PM	Bubbler valve closed
10/26/2010	1:26:58 PM	Helium valve opened
10/26/2010	1:26:58 PM	Main Vac valve opened
10/26/2010	1:26:58 PM	Bypass valve opened
10/26/2010	1:26:58 PM	Helium MFC set to  100.000000
10/26/2010	1:26:58 PM	H2 MFC set to  0.000000
10/26/2010	1:26:58 PM	BCl3 MFC set to  0.000000
10/26/2010	1:26:58 PM	PHl3 MFC set to  0.000000
10/26/2010	1:26:58 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:26:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:26:58 PM	Tube furnace set to 0
10/26/2010	1:26:59 PM	Helium valve closed
10/26/2010	1:26:59 PM	H2 valve closed
10/26/2010	1:26:59 PM	BCl3 valve closed
10/26/2010	1:26:59 PM	PH3 valve closed
10/26/2010	1:26:59 PM	SiCl4 pre valve closed
10/26/2010	1:26:59 PM	SiCl4 post valve closed
10/26/2010	1:26:59 PM	Bubbler valve closed
10/26/2010	1:26:59 PM	Main Vac valve opened
10/26/2010	1:26:59 PM	Bypass valve opened
10/26/2010	1:26:59 PM	Helium MFC set to  0.000000
10/26/2010	1:26:59 PM	H2 MFC set to  0.000000
10/26/2010	1:26:59 PM	BCl3 MFC set to  0.000000
10/26/2010	1:26:59 PM	PHl3 MFC set to  0.000000
10/26/2010	1:26:59 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:26:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:26:59 PM	Tube furnace set to 0
10/26/2010	1:27:00 PM	Run finished at 1:27 PM
10/26/2010	1:27:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	1:29:19 PM	Recipe started at 1:29 PM
10/26/2010	1:29:19 PM	Helium valve closed
10/26/2010	1:29:19 PM	BCl3 valve closed
10/26/2010	1:29:19 PM	PH3 valve closed
10/26/2010	1:29:19 PM	SiCl4 pre valve closed
10/26/2010	1:29:19 PM	SiCl4 post valve closed
10/26/2010	1:29:19 PM	Main Vac valve closed
10/26/2010	1:29:19 PM	Bypass valve closed
10/26/2010	1:29:19 PM	Bubbler valve closed
10/26/2010	1:29:19 PM	H2 valve opened
10/26/2010	1:29:19 PM	Helium MFC set to  0.000000
10/26/2010	1:29:19 PM	H2 MFC set to  500.000000
10/26/2010	1:29:19 PM	BCl3 MFC set to  0.000000
10/26/2010	1:29:19 PM	PHl3 MFC set to  0.000000
10/26/2010	1:29:19 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:29:19 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:29:19 PM	Tube furnace set to 0
10/26/2010	1:30:38 PM	Helium valve closed
10/26/2010	1:30:38 PM	BCl3 valve closed
10/26/2010	1:30:38 PM	PH3 valve closed
10/26/2010	1:30:38 PM	SiCl4 pre valve closed
10/26/2010	1:30:38 PM	SiCl4 post valve closed
10/26/2010	1:30:38 PM	Main Vac valve closed
10/26/2010	1:30:38 PM	Bypass valve closed
10/26/2010	1:30:38 PM	H2 valve opened
10/26/2010	1:30:38 PM	Bubbler valve opened
10/26/2010	1:30:38 PM	Helium MFC set to  0.000000
10/26/2010	1:30:38 PM	H2 MFC set to  500.000000
10/26/2010	1:30:38 PM	BCl3 MFC set to  0.000000
10/26/2010	1:30:38 PM	PHl3 MFC set to  0.000000
10/26/2010	1:30:38 PM	SiCl4 MFC set to  0.000000
10/26/2010	1:30:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:30:38 PM	Tube furnace set to 1000
10/26/2010	1:50:38 PM	Helium valve closed
10/26/2010	1:50:38 PM	PH3 valve closed
10/26/2010	1:50:38 PM	Main Vac valve closed
10/26/2010	1:50:38 PM	Bypass valve closed
10/26/2010	1:50:38 PM	H2 valve opened
10/26/2010	1:50:38 PM	BCl3 valve opened
10/26/2010	1:50:38 PM	SiCl4 pre valve opened
10/26/2010	1:50:38 PM	SiCl4 post valve opened
10/26/2010	1:50:38 PM	Bubbler valve opened
10/26/2010	1:50:38 PM	Helium MFC set to  0.000000
10/26/2010	1:50:38 PM	H2 MFC set to  500.000000
10/26/2010	1:50:38 PM	BCl3 MFC set to  12.000000
10/26/2010	1:50:38 PM	PHl3 MFC set to  0.000000
10/26/2010	1:50:38 PM	SiCl4 MFC set to  50.000000
10/26/2010	1:50:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	1:50:38 PM	Tube furnace set to 1000
10/26/2010	2:10:38 PM	H2 valve closed
10/26/2010	2:10:38 PM	BCl3 valve closed
10/26/2010	2:10:38 PM	PH3 valve closed
10/26/2010	2:10:38 PM	SiCl4 pre valve closed
10/26/2010	2:10:38 PM	SiCl4 post valve closed
10/26/2010	2:10:38 PM	Main Vac valve closed
10/26/2010	2:10:38 PM	Bypass valve closed
10/26/2010	2:10:38 PM	Helium valve opened
10/26/2010	2:10:38 PM	Bubbler valve opened
10/26/2010	2:10:38 PM	Helium MFC set to  500.000000
10/26/2010	2:10:38 PM	H2 MFC set to  0.000000
10/26/2010	2:10:38 PM	BCl3 MFC set to  0.000000
10/26/2010	2:10:38 PM	PHl3 MFC set to  0.000000
10/26/2010	2:10:38 PM	SiCl4 MFC set to  0.000000
10/26/2010	2:10:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	2:10:38 PM	Tube furnace set to 0
10/26/2010	2:30:38 PM	Helium valve closed
10/26/2010	2:30:38 PM	H2 valve closed
10/26/2010	2:30:38 PM	BCl3 valve closed
10/26/2010	2:30:38 PM	PH3 valve closed
10/26/2010	2:30:38 PM	SiCl4 pre valve closed
10/26/2010	2:30:38 PM	SiCl4 post valve closed
10/26/2010	2:30:38 PM	Main Vac valve closed
10/26/2010	2:30:38 PM	Bypass valve closed
10/26/2010	2:30:38 PM	Bubbler valve closed
10/26/2010	2:30:38 PM	Helium MFC set to  0.000000
10/26/2010	2:30:38 PM	H2 MFC set to  0.000000
10/26/2010	2:30:38 PM	BCl3 MFC set to  0.000000
10/26/2010	2:30:38 PM	PHl3 MFC set to  0.000000
10/26/2010	2:30:38 PM	SiCl4 MFC set to  0.000000
10/26/2010	2:30:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	2:30:38 PM	Tube furnace set to 0
10/26/2010	2:30:38 PM	Run finished at 2:30 PM
10/26/2010	3:01:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	3:01:48 PM	Recipe started at 3:01 PM
10/26/2010	3:01:48 PM	Helium valve closed
10/26/2010	3:01:48 PM	H2 valve closed
10/26/2010	3:01:48 PM	BCl3 valve closed
10/26/2010	3:01:48 PM	PH3 valve closed
10/26/2010	3:01:48 PM	SiCl4 pre valve closed
10/26/2010	3:01:48 PM	SiCl4 post valve closed
10/26/2010	3:01:48 PM	Main Vac valve closed
10/26/2010	3:01:48 PM	Bubbler valve closed
10/26/2010	3:01:48 PM	Bypass valve opened
10/26/2010	3:01:48 PM	Helium MFC set to  0.000000
10/26/2010	3:01:48 PM	H2 MFC set to  0.000000
10/26/2010	3:01:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:01:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:01:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:01:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:01:48 PM	Tube furnace set to 0
10/26/2010	3:02:41 PM	Helium valve closed
10/26/2010	3:02:41 PM	H2 valve closed
10/26/2010	3:02:41 PM	BCl3 valve closed
10/26/2010	3:02:41 PM	PH3 valve closed
10/26/2010	3:02:41 PM	SiCl4 pre valve closed
10/26/2010	3:02:41 PM	SiCl4 post valve closed
10/26/2010	3:02:41 PM	Bubbler valve closed
10/26/2010	3:02:41 PM	Main Vac valve opened
10/26/2010	3:02:41 PM	Bypass valve opened
10/26/2010	3:02:41 PM	Helium MFC set to  0.000000
10/26/2010	3:02:41 PM	H2 MFC set to  0.000000
10/26/2010	3:02:41 PM	BCl3 MFC set to  0.000000
10/26/2010	3:02:41 PM	PHl3 MFC set to  0.000000
10/26/2010	3:02:41 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:02:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:02:41 PM	Tube furnace set to 0
10/26/2010	3:02:42 PM	Run finished at 3:02 PM
10/26/2010	3:02:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	3:03:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:03:45 PM	Recipe started at 3:03 PM
10/26/2010	3:03:45 PM	Helium valve closed
10/26/2010	3:03:45 PM	H2 valve closed
10/26/2010	3:03:45 PM	BCl3 valve closed
10/26/2010	3:03:45 PM	PH3 valve closed
10/26/2010	3:03:45 PM	SiCl4 pre valve closed
10/26/2010	3:03:45 PM	SiCl4 post valve closed
10/26/2010	3:03:45 PM	Main Vac valve closed
10/26/2010	3:03:45 PM	Bubbler valve closed
10/26/2010	3:03:45 PM	Bypass valve opened
10/26/2010	3:03:45 PM	Helium MFC set to  0.000000
10/26/2010	3:03:45 PM	H2 MFC set to  0.000000
10/26/2010	3:03:45 PM	BCl3 MFC set to  0.000000
10/26/2010	3:03:45 PM	PHl3 MFC set to  0.000000
10/26/2010	3:03:45 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:03:45 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:03:45 PM	Tube furnace set to 0
10/26/2010	3:03:45 PM	Helium valve closed
10/26/2010	3:03:45 PM	H2 valve closed
10/26/2010	3:03:45 PM	BCl3 valve closed
10/26/2010	3:03:45 PM	PH3 valve closed
10/26/2010	3:03:45 PM	SiCl4 pre valve closed
10/26/2010	3:03:45 PM	SiCl4 post valve closed
10/26/2010	3:03:45 PM	Bubbler valve closed
10/26/2010	3:03:45 PM	Main Vac valve opened
10/26/2010	3:03:45 PM	Bypass valve opened
10/26/2010	3:03:45 PM	Helium MFC set to  0.000000
10/26/2010	3:03:45 PM	H2 MFC set to  0.000000
10/26/2010	3:03:45 PM	BCl3 MFC set to  0.000000
10/26/2010	3:03:45 PM	PHl3 MFC set to  0.000000
10/26/2010	3:03:45 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:03:45 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:03:46 PM	Tube furnace set to 0
10/26/2010	3:04:46 PM	H2 valve closed
10/26/2010	3:04:46 PM	BCl3 valve closed
10/26/2010	3:04:46 PM	PH3 valve closed
10/26/2010	3:04:46 PM	SiCl4 pre valve closed
10/26/2010	3:04:46 PM	SiCl4 post valve closed
10/26/2010	3:04:46 PM	Bubbler valve closed
10/26/2010	3:04:46 PM	Helium valve opened
10/26/2010	3:04:46 PM	Main Vac valve opened
10/26/2010	3:04:46 PM	Bypass valve opened
10/26/2010	3:04:46 PM	Helium MFC set to  100.000000
10/26/2010	3:04:46 PM	H2 MFC set to  0.000000
10/26/2010	3:04:46 PM	BCl3 MFC set to  0.000000
10/26/2010	3:04:46 PM	PHl3 MFC set to  0.000000
10/26/2010	3:04:46 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:04:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:04:46 PM	Tube furnace set to 0
10/26/2010	3:05:46 PM	Helium valve closed
10/26/2010	3:05:46 PM	H2 valve closed
10/26/2010	3:05:46 PM	BCl3 valve closed
10/26/2010	3:05:46 PM	PH3 valve closed
10/26/2010	3:05:46 PM	SiCl4 pre valve closed
10/26/2010	3:05:46 PM	SiCl4 post valve closed
10/26/2010	3:05:46 PM	Bubbler valve closed
10/26/2010	3:05:46 PM	Main Vac valve opened
10/26/2010	3:05:46 PM	Bypass valve opened
10/26/2010	3:05:46 PM	Helium MFC set to  0.000000
10/26/2010	3:05:46 PM	H2 MFC set to  0.000000
10/26/2010	3:05:46 PM	BCl3 MFC set to  0.000000
10/26/2010	3:05:46 PM	PHl3 MFC set to  0.000000
10/26/2010	3:05:46 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:05:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:05:46 PM	Tube furnace set to 0
10/26/2010	3:06:46 PM	H2 valve closed
10/26/2010	3:06:46 PM	BCl3 valve closed
10/26/2010	3:06:46 PM	PH3 valve closed
10/26/2010	3:06:46 PM	SiCl4 pre valve closed
10/26/2010	3:06:46 PM	SiCl4 post valve closed
10/26/2010	3:06:46 PM	Bubbler valve closed
10/26/2010	3:06:46 PM	Helium valve opened
10/26/2010	3:06:46 PM	Main Vac valve opened
10/26/2010	3:06:46 PM	Bypass valve opened
10/26/2010	3:06:46 PM	Helium MFC set to  100.000000
10/26/2010	3:06:46 PM	H2 MFC set to  0.000000
10/26/2010	3:06:46 PM	BCl3 MFC set to  0.000000
10/26/2010	3:06:46 PM	PHl3 MFC set to  0.000000
10/26/2010	3:06:46 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:06:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:06:46 PM	Tube furnace set to 0
10/26/2010	3:07:46 PM	Helium valve closed
10/26/2010	3:07:46 PM	H2 valve closed
10/26/2010	3:07:46 PM	BCl3 valve closed
10/26/2010	3:07:46 PM	PH3 valve closed
10/26/2010	3:07:46 PM	SiCl4 pre valve closed
10/26/2010	3:07:46 PM	SiCl4 post valve closed
10/26/2010	3:07:46 PM	Bubbler valve closed
10/26/2010	3:07:46 PM	Main Vac valve opened
10/26/2010	3:07:46 PM	Bypass valve opened
10/26/2010	3:07:46 PM	Helium MFC set to  0.000000
10/26/2010	3:07:46 PM	H2 MFC set to  0.000000
10/26/2010	3:07:46 PM	BCl3 MFC set to  0.000000
10/26/2010	3:07:46 PM	PHl3 MFC set to  0.000000
10/26/2010	3:07:46 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:07:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:07:46 PM	Tube furnace set to 0
10/26/2010	3:08:46 PM	H2 valve closed
10/26/2010	3:08:46 PM	BCl3 valve closed
10/26/2010	3:08:46 PM	PH3 valve closed
10/26/2010	3:08:46 PM	SiCl4 pre valve closed
10/26/2010	3:08:46 PM	SiCl4 post valve closed
10/26/2010	3:08:46 PM	Bubbler valve closed
10/26/2010	3:08:46 PM	Helium valve opened
10/26/2010	3:08:46 PM	Main Vac valve opened
10/26/2010	3:08:46 PM	Bypass valve opened
10/26/2010	3:08:46 PM	Helium MFC set to  100.000000
10/26/2010	3:08:46 PM	H2 MFC set to  0.000000
10/26/2010	3:08:46 PM	BCl3 MFC set to  0.000000
10/26/2010	3:08:46 PM	PHl3 MFC set to  0.000000
10/26/2010	3:08:46 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:08:46 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:08:47 PM	Tube furnace set to 0
10/26/2010	3:09:47 PM	Helium valve closed
10/26/2010	3:09:47 PM	H2 valve closed
10/26/2010	3:09:47 PM	BCl3 valve closed
10/26/2010	3:09:47 PM	PH3 valve closed
10/26/2010	3:09:47 PM	SiCl4 pre valve closed
10/26/2010	3:09:47 PM	SiCl4 post valve closed
10/26/2010	3:09:47 PM	Bubbler valve closed
10/26/2010	3:09:47 PM	Main Vac valve opened
10/26/2010	3:09:47 PM	Bypass valve opened
10/26/2010	3:09:47 PM	Helium MFC set to  0.000000
10/26/2010	3:09:47 PM	H2 MFC set to  0.000000
10/26/2010	3:09:47 PM	BCl3 MFC set to  0.000000
10/26/2010	3:09:47 PM	PHl3 MFC set to  0.000000
10/26/2010	3:09:47 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:09:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:09:47 PM	Tube furnace set to 0
10/26/2010	3:10:47 PM	H2 valve closed
10/26/2010	3:10:47 PM	BCl3 valve closed
10/26/2010	3:10:47 PM	PH3 valve closed
10/26/2010	3:10:47 PM	SiCl4 pre valve closed
10/26/2010	3:10:47 PM	SiCl4 post valve closed
10/26/2010	3:10:47 PM	Bubbler valve closed
10/26/2010	3:10:47 PM	Helium valve opened
10/26/2010	3:10:47 PM	Main Vac valve opened
10/26/2010	3:10:47 PM	Bypass valve opened
10/26/2010	3:10:47 PM	Helium MFC set to  100.000000
10/26/2010	3:10:47 PM	H2 MFC set to  0.000000
10/26/2010	3:10:47 PM	BCl3 MFC set to  0.000000
10/26/2010	3:10:47 PM	PHl3 MFC set to  0.000000
10/26/2010	3:10:47 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:10:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:10:47 PM	Tube furnace set to 0
10/26/2010	3:11:47 PM	Helium valve closed
10/26/2010	3:11:47 PM	H2 valve closed
10/26/2010	3:11:47 PM	BCl3 valve closed
10/26/2010	3:11:47 PM	PH3 valve closed
10/26/2010	3:11:47 PM	SiCl4 pre valve closed
10/26/2010	3:11:47 PM	SiCl4 post valve closed
10/26/2010	3:11:47 PM	Bubbler valve closed
10/26/2010	3:11:47 PM	Main Vac valve opened
10/26/2010	3:11:47 PM	Bypass valve opened
10/26/2010	3:11:47 PM	Helium MFC set to  0.000000
10/26/2010	3:11:47 PM	H2 MFC set to  0.000000
10/26/2010	3:11:47 PM	BCl3 MFC set to  0.000000
10/26/2010	3:11:47 PM	PHl3 MFC set to  0.000000
10/26/2010	3:11:47 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:11:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:11:47 PM	Tube furnace set to 0
10/26/2010	3:12:47 PM	H2 valve closed
10/26/2010	3:12:47 PM	BCl3 valve closed
10/26/2010	3:12:47 PM	PH3 valve closed
10/26/2010	3:12:47 PM	SiCl4 pre valve closed
10/26/2010	3:12:47 PM	SiCl4 post valve closed
10/26/2010	3:12:47 PM	Bubbler valve closed
10/26/2010	3:12:47 PM	Helium valve opened
10/26/2010	3:12:47 PM	Main Vac valve opened
10/26/2010	3:12:47 PM	Bypass valve opened
10/26/2010	3:12:47 PM	Helium MFC set to  100.000000
10/26/2010	3:12:47 PM	H2 MFC set to  0.000000
10/26/2010	3:12:47 PM	BCl3 MFC set to  0.000000
10/26/2010	3:12:47 PM	PHl3 MFC set to  0.000000
10/26/2010	3:12:47 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:12:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:12:47 PM	Tube furnace set to 0
10/26/2010	3:13:47 PM	Helium valve closed
10/26/2010	3:13:47 PM	H2 valve closed
10/26/2010	3:13:47 PM	BCl3 valve closed
10/26/2010	3:13:47 PM	PH3 valve closed
10/26/2010	3:13:47 PM	SiCl4 pre valve closed
10/26/2010	3:13:47 PM	SiCl4 post valve closed
10/26/2010	3:13:47 PM	Bubbler valve closed
10/26/2010	3:13:47 PM	Main Vac valve opened
10/26/2010	3:13:47 PM	Bypass valve opened
10/26/2010	3:13:47 PM	Helium MFC set to  0.000000
10/26/2010	3:13:47 PM	H2 MFC set to  0.000000
10/26/2010	3:13:47 PM	BCl3 MFC set to  0.000000
10/26/2010	3:13:47 PM	PHl3 MFC set to  0.000000
10/26/2010	3:13:47 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:13:47 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:13:48 PM	Tube furnace set to 0
10/26/2010	3:14:48 PM	H2 valve closed
10/26/2010	3:14:48 PM	BCl3 valve closed
10/26/2010	3:14:48 PM	PH3 valve closed
10/26/2010	3:14:48 PM	SiCl4 pre valve closed
10/26/2010	3:14:48 PM	SiCl4 post valve closed
10/26/2010	3:14:48 PM	Bubbler valve closed
10/26/2010	3:14:48 PM	Helium valve opened
10/26/2010	3:14:48 PM	Main Vac valve opened
10/26/2010	3:14:48 PM	Bypass valve opened
10/26/2010	3:14:48 PM	Helium MFC set to  100.000000
10/26/2010	3:14:48 PM	H2 MFC set to  0.000000
10/26/2010	3:14:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:14:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:14:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:14:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:14:48 PM	Tube furnace set to 0
10/26/2010	3:15:48 PM	Helium valve closed
10/26/2010	3:15:48 PM	H2 valve closed
10/26/2010	3:15:48 PM	BCl3 valve closed
10/26/2010	3:15:48 PM	PH3 valve closed
10/26/2010	3:15:48 PM	SiCl4 pre valve closed
10/26/2010	3:15:48 PM	SiCl4 post valve closed
10/26/2010	3:15:48 PM	Bubbler valve closed
10/26/2010	3:15:48 PM	Main Vac valve opened
10/26/2010	3:15:48 PM	Bypass valve opened
10/26/2010	3:15:48 PM	Helium MFC set to  0.000000
10/26/2010	3:15:48 PM	H2 MFC set to  0.000000
10/26/2010	3:15:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:15:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:15:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:15:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:15:48 PM	Tube furnace set to 0
10/26/2010	3:16:48 PM	H2 valve closed
10/26/2010	3:16:48 PM	BCl3 valve closed
10/26/2010	3:16:48 PM	PH3 valve closed
10/26/2010	3:16:48 PM	SiCl4 pre valve closed
10/26/2010	3:16:48 PM	SiCl4 post valve closed
10/26/2010	3:16:48 PM	Bubbler valve closed
10/26/2010	3:16:48 PM	Helium valve opened
10/26/2010	3:16:48 PM	Main Vac valve opened
10/26/2010	3:16:48 PM	Bypass valve opened
10/26/2010	3:16:48 PM	Helium MFC set to  100.000000
10/26/2010	3:16:48 PM	H2 MFC set to  0.000000
10/26/2010	3:16:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:16:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:16:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:16:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:16:48 PM	Tube furnace set to 0
10/26/2010	3:17:48 PM	Helium valve closed
10/26/2010	3:17:48 PM	H2 valve closed
10/26/2010	3:17:48 PM	BCl3 valve closed
10/26/2010	3:17:48 PM	PH3 valve closed
10/26/2010	3:17:48 PM	SiCl4 pre valve closed
10/26/2010	3:17:48 PM	SiCl4 post valve closed
10/26/2010	3:17:48 PM	Bubbler valve closed
10/26/2010	3:17:48 PM	Main Vac valve opened
10/26/2010	3:17:48 PM	Bypass valve opened
10/26/2010	3:17:48 PM	Helium MFC set to  0.000000
10/26/2010	3:17:48 PM	H2 MFC set to  0.000000
10/26/2010	3:17:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:17:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:17:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:17:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:17:48 PM	Tube furnace set to 0
10/26/2010	3:18:48 PM	H2 valve closed
10/26/2010	3:18:48 PM	BCl3 valve closed
10/26/2010	3:18:48 PM	PH3 valve closed
10/26/2010	3:18:48 PM	SiCl4 pre valve closed
10/26/2010	3:18:48 PM	SiCl4 post valve closed
10/26/2010	3:18:48 PM	Bubbler valve closed
10/26/2010	3:18:48 PM	Helium valve opened
10/26/2010	3:18:48 PM	Main Vac valve opened
10/26/2010	3:18:48 PM	Bypass valve opened
10/26/2010	3:18:48 PM	Helium MFC set to  100.000000
10/26/2010	3:18:48 PM	H2 MFC set to  0.000000
10/26/2010	3:18:48 PM	BCl3 MFC set to  0.000000
10/26/2010	3:18:48 PM	PHl3 MFC set to  0.000000
10/26/2010	3:18:48 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:18:48 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:18:49 PM	Tube furnace set to 0
10/26/2010	3:19:49 PM	Helium valve closed
10/26/2010	3:19:49 PM	H2 valve closed
10/26/2010	3:19:49 PM	BCl3 valve closed
10/26/2010	3:19:49 PM	PH3 valve closed
10/26/2010	3:19:49 PM	SiCl4 pre valve closed
10/26/2010	3:19:49 PM	SiCl4 post valve closed
10/26/2010	3:19:49 PM	Bubbler valve closed
10/26/2010	3:19:49 PM	Main Vac valve opened
10/26/2010	3:19:49 PM	Bypass valve opened
10/26/2010	3:19:49 PM	Helium MFC set to  0.000000
10/26/2010	3:19:49 PM	H2 MFC set to  0.000000
10/26/2010	3:19:49 PM	BCl3 MFC set to  0.000000
10/26/2010	3:19:49 PM	PHl3 MFC set to  0.000000
10/26/2010	3:19:49 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:19:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:19:49 PM	Tube furnace set to 0
10/26/2010	3:20:49 PM	H2 valve closed
10/26/2010	3:20:49 PM	BCl3 valve closed
10/26/2010	3:20:49 PM	PH3 valve closed
10/26/2010	3:20:49 PM	SiCl4 pre valve closed
10/26/2010	3:20:49 PM	SiCl4 post valve closed
10/26/2010	3:20:49 PM	Bubbler valve closed
10/26/2010	3:20:49 PM	Helium valve opened
10/26/2010	3:20:49 PM	Main Vac valve opened
10/26/2010	3:20:49 PM	Bypass valve opened
10/26/2010	3:20:49 PM	Helium MFC set to  100.000000
10/26/2010	3:20:49 PM	H2 MFC set to  0.000000
10/26/2010	3:20:49 PM	BCl3 MFC set to  0.000000
10/26/2010	3:20:49 PM	PHl3 MFC set to  0.000000
10/26/2010	3:20:49 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:20:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:20:49 PM	Tube furnace set to 0
10/26/2010	3:21:49 PM	Helium valve closed
10/26/2010	3:21:49 PM	H2 valve closed
10/26/2010	3:21:49 PM	BCl3 valve closed
10/26/2010	3:21:49 PM	PH3 valve closed
10/26/2010	3:21:49 PM	SiCl4 pre valve closed
10/26/2010	3:21:49 PM	SiCl4 post valve closed
10/26/2010	3:21:49 PM	Bubbler valve closed
10/26/2010	3:21:49 PM	Main Vac valve opened
10/26/2010	3:21:49 PM	Bypass valve opened
10/26/2010	3:21:49 PM	Helium MFC set to  0.000000
10/26/2010	3:21:49 PM	H2 MFC set to  0.000000
10/26/2010	3:21:49 PM	BCl3 MFC set to  0.000000
10/26/2010	3:21:49 PM	PHl3 MFC set to  0.000000
10/26/2010	3:21:49 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:21:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:21:49 PM	Tube furnace set to 0
10/26/2010	3:22:49 PM	H2 valve closed
10/26/2010	3:22:49 PM	BCl3 valve closed
10/26/2010	3:22:49 PM	PH3 valve closed
10/26/2010	3:22:49 PM	SiCl4 pre valve closed
10/26/2010	3:22:49 PM	SiCl4 post valve closed
10/26/2010	3:22:49 PM	Bubbler valve closed
10/26/2010	3:22:49 PM	Helium valve opened
10/26/2010	3:22:49 PM	Main Vac valve opened
10/26/2010	3:22:49 PM	Bypass valve opened
10/26/2010	3:22:49 PM	Helium MFC set to  100.000000
10/26/2010	3:22:49 PM	H2 MFC set to  0.000000
10/26/2010	3:22:49 PM	BCl3 MFC set to  0.000000
10/26/2010	3:22:49 PM	PHl3 MFC set to  0.000000
10/26/2010	3:22:49 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:22:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:22:49 PM	Tube furnace set to 0
10/26/2010	3:23:49 PM	Helium valve closed
10/26/2010	3:23:49 PM	H2 valve closed
10/26/2010	3:23:49 PM	BCl3 valve closed
10/26/2010	3:23:49 PM	PH3 valve closed
10/26/2010	3:23:49 PM	SiCl4 pre valve closed
10/26/2010	3:23:49 PM	SiCl4 post valve closed
10/26/2010	3:23:49 PM	Bubbler valve closed
10/26/2010	3:23:49 PM	Main Vac valve opened
10/26/2010	3:23:49 PM	Bypass valve opened
10/26/2010	3:23:49 PM	Helium MFC set to  0.000000
10/26/2010	3:23:49 PM	H2 MFC set to  0.000000
10/26/2010	3:23:49 PM	BCl3 MFC set to  0.000000
10/26/2010	3:23:49 PM	PHl3 MFC set to  0.000000
10/26/2010	3:23:49 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:23:49 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:23:50 PM	Tube furnace set to 0
10/26/2010	3:23:51 PM	Run finished at 3:23 PM
10/26/2010	3:23:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:24:42 PM	Main Vac valve closed
10/26/2010	3:24:43 PM	Bypass valve closed
10/26/2010	3:25:14 PM	Bypass valve opened
10/26/2010	3:25:14 PM	Main Vac valve opened
10/26/2010	3:25:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:25:32 PM	Recipe started at 3:25 PM
10/26/2010	3:25:32 PM	Helium valve closed
10/26/2010	3:25:32 PM	H2 valve closed
10/26/2010	3:25:32 PM	BCl3 valve closed
10/26/2010	3:25:32 PM	PH3 valve closed
10/26/2010	3:25:32 PM	SiCl4 pre valve closed
10/26/2010	3:25:32 PM	SiCl4 post valve closed
10/26/2010	3:25:32 PM	Main Vac valve closed
10/26/2010	3:25:32 PM	Bubbler valve closed
10/26/2010	3:25:32 PM	Bypass valve opened
10/26/2010	3:25:32 PM	Helium MFC set to  0.000000
10/26/2010	3:25:32 PM	H2 MFC set to  0.000000
10/26/2010	3:25:32 PM	BCl3 MFC set to  0.000000
10/26/2010	3:25:32 PM	PHl3 MFC set to  0.000000
10/26/2010	3:25:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:25:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:25:32 PM	Tube furnace set to 0
10/26/2010	3:25:32 PM	Helium valve closed
10/26/2010	3:25:32 PM	H2 valve closed
10/26/2010	3:25:32 PM	BCl3 valve closed
10/26/2010	3:25:32 PM	PH3 valve closed
10/26/2010	3:25:32 PM	SiCl4 pre valve closed
10/26/2010	3:25:32 PM	SiCl4 post valve closed
10/26/2010	3:25:32 PM	Bubbler valve closed
10/26/2010	3:25:32 PM	Main Vac valve opened
10/26/2010	3:25:32 PM	Bypass valve opened
10/26/2010	3:25:32 PM	Helium MFC set to  0.000000
10/26/2010	3:25:32 PM	H2 MFC set to  0.000000
10/26/2010	3:25:32 PM	BCl3 MFC set to  0.000000
10/26/2010	3:25:32 PM	PHl3 MFC set to  0.000000
10/26/2010	3:25:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:25:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:25:32 PM	Tube furnace set to 0
10/26/2010	3:26:32 PM	H2 valve closed
10/26/2010	3:26:32 PM	BCl3 valve closed
10/26/2010	3:26:32 PM	PH3 valve closed
10/26/2010	3:26:32 PM	SiCl4 pre valve closed
10/26/2010	3:26:32 PM	SiCl4 post valve closed
10/26/2010	3:26:32 PM	Bubbler valve closed
10/26/2010	3:26:32 PM	Helium valve opened
10/26/2010	3:26:32 PM	Main Vac valve opened
10/26/2010	3:26:32 PM	Bypass valve opened
10/26/2010	3:26:32 PM	Helium MFC set to  100.000000
10/26/2010	3:26:32 PM	H2 MFC set to  0.000000
10/26/2010	3:26:32 PM	BCl3 MFC set to  0.000000
10/26/2010	3:26:32 PM	PHl3 MFC set to  0.000000
10/26/2010	3:26:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:26:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:26:33 PM	Tube furnace set to 0
10/26/2010	3:27:33 PM	Helium valve closed
10/26/2010	3:27:33 PM	H2 valve closed
10/26/2010	3:27:33 PM	BCl3 valve closed
10/26/2010	3:27:33 PM	PH3 valve closed
10/26/2010	3:27:33 PM	SiCl4 pre valve closed
10/26/2010	3:27:33 PM	SiCl4 post valve closed
10/26/2010	3:27:33 PM	Bubbler valve closed
10/26/2010	3:27:33 PM	Main Vac valve opened
10/26/2010	3:27:33 PM	Bypass valve opened
10/26/2010	3:27:33 PM	Helium MFC set to  0.000000
10/26/2010	3:27:33 PM	H2 MFC set to  0.000000
10/26/2010	3:27:33 PM	BCl3 MFC set to  0.000000
10/26/2010	3:27:33 PM	PHl3 MFC set to  0.000000
10/26/2010	3:27:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:27:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:27:33 PM	Tube furnace set to 0
10/26/2010	3:28:33 PM	H2 valve closed
10/26/2010	3:28:33 PM	BCl3 valve closed
10/26/2010	3:28:33 PM	PH3 valve closed
10/26/2010	3:28:33 PM	SiCl4 pre valve closed
10/26/2010	3:28:33 PM	SiCl4 post valve closed
10/26/2010	3:28:33 PM	Bubbler valve closed
10/26/2010	3:28:33 PM	Helium valve opened
10/26/2010	3:28:33 PM	Main Vac valve opened
10/26/2010	3:28:33 PM	Bypass valve opened
10/26/2010	3:28:33 PM	Helium MFC set to  100.000000
10/26/2010	3:28:33 PM	H2 MFC set to  0.000000
10/26/2010	3:28:33 PM	BCl3 MFC set to  0.000000
10/26/2010	3:28:33 PM	PHl3 MFC set to  0.000000
10/26/2010	3:28:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:28:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:28:33 PM	Tube furnace set to 0
10/26/2010	3:29:33 PM	Helium valve closed
10/26/2010	3:29:33 PM	H2 valve closed
10/26/2010	3:29:33 PM	BCl3 valve closed
10/26/2010	3:29:33 PM	PH3 valve closed
10/26/2010	3:29:33 PM	SiCl4 pre valve closed
10/26/2010	3:29:33 PM	SiCl4 post valve closed
10/26/2010	3:29:33 PM	Bubbler valve closed
10/26/2010	3:29:33 PM	Main Vac valve opened
10/26/2010	3:29:33 PM	Bypass valve opened
10/26/2010	3:29:33 PM	Helium MFC set to  0.000000
10/26/2010	3:29:33 PM	H2 MFC set to  0.000000
10/26/2010	3:29:33 PM	BCl3 MFC set to  0.000000
10/26/2010	3:29:33 PM	PHl3 MFC set to  0.000000
10/26/2010	3:29:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:29:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:29:33 PM	Tube furnace set to 0
10/26/2010	3:30:33 PM	H2 valve closed
10/26/2010	3:30:33 PM	BCl3 valve closed
10/26/2010	3:30:33 PM	PH3 valve closed
10/26/2010	3:30:33 PM	SiCl4 pre valve closed
10/26/2010	3:30:33 PM	SiCl4 post valve closed
10/26/2010	3:30:33 PM	Bubbler valve closed
10/26/2010	3:30:33 PM	Helium valve opened
10/26/2010	3:30:33 PM	Main Vac valve opened
10/26/2010	3:30:33 PM	Bypass valve opened
10/26/2010	3:30:33 PM	Helium MFC set to  100.000000
10/26/2010	3:30:33 PM	H2 MFC set to  0.000000
10/26/2010	3:30:33 PM	BCl3 MFC set to  0.000000
10/26/2010	3:30:33 PM	PHl3 MFC set to  0.000000
10/26/2010	3:30:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:30:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:30:33 PM	Tube furnace set to 0
10/26/2010	3:31:33 PM	Helium valve closed
10/26/2010	3:31:33 PM	H2 valve closed
10/26/2010	3:31:33 PM	BCl3 valve closed
10/26/2010	3:31:33 PM	PH3 valve closed
10/26/2010	3:31:33 PM	SiCl4 pre valve closed
10/26/2010	3:31:33 PM	SiCl4 post valve closed
10/26/2010	3:31:33 PM	Bubbler valve closed
10/26/2010	3:31:33 PM	Main Vac valve opened
10/26/2010	3:31:33 PM	Bypass valve opened
10/26/2010	3:31:33 PM	Helium MFC set to  0.000000
10/26/2010	3:31:33 PM	H2 MFC set to  0.000000
10/26/2010	3:31:33 PM	BCl3 MFC set to  0.000000
10/26/2010	3:31:33 PM	PHl3 MFC set to  0.000000
10/26/2010	3:31:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:31:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:31:34 PM	Tube furnace set to 0
10/26/2010	3:32:09 PM	Run aborted at 3:32 PM
10/26/2010	3:32:09 PM	Helium valve closed
10/26/2010	3:32:09 PM	H2 valve closed
10/26/2010	3:32:09 PM	BCl3 valve closed
10/26/2010	3:32:09 PM	PH3 valve closed
10/26/2010	3:32:09 PM	SiCl4 pre valve closed
10/26/2010	3:32:09 PM	SiCl4 post valve closed
10/26/2010	3:32:09 PM	Bypass valve closed
10/26/2010	3:32:09 PM	Main Vac valve closed
10/26/2010	3:32:09 PM	Bubbler valve closed
10/26/2010	3:32:09 PM	Helium MFC set to  0.000000
10/26/2010	3:32:09 PM	H2 MFC set to  0.000000
10/26/2010	3:32:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:32:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:32:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:32:09 PM	Tube furnace set to 0
10/26/2010	3:32:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:32:10 PM	Bypass valve opened
10/26/2010	3:32:11 PM	Main Vac valve opened
10/26/2010	3:32:11 PM	Main Vac valve closed
10/26/2010	3:32:12 PM	Main Vac valve opened
10/26/2010	3:33:19 PM	Bypass valve closed
10/26/2010	3:33:20 PM	Main Vac valve closed
10/26/2010	3:33:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	3:33:44 PM	Recipe started at 3:33 PM
10/26/2010	3:33:44 PM	Helium valve closed
10/26/2010	3:33:44 PM	H2 valve closed
10/26/2010	3:33:44 PM	BCl3 valve closed
10/26/2010	3:33:44 PM	PH3 valve closed
10/26/2010	3:33:44 PM	SiCl4 pre valve closed
10/26/2010	3:33:44 PM	SiCl4 post valve closed
10/26/2010	3:33:44 PM	Main Vac valve closed
10/26/2010	3:33:44 PM	Bubbler valve closed
10/26/2010	3:33:44 PM	Bypass valve opened
10/26/2010	3:33:44 PM	Helium MFC set to  0.000000
10/26/2010	3:33:44 PM	H2 MFC set to  0.000000
10/26/2010	3:33:44 PM	BCl3 MFC set to  0.000000
10/26/2010	3:33:44 PM	PHl3 MFC set to  0.000000
10/26/2010	3:33:44 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:33:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:33:44 PM	Tube furnace set to 0
10/26/2010	3:33:44 PM	Helium valve closed
10/26/2010	3:33:44 PM	H2 valve closed
10/26/2010	3:33:44 PM	BCl3 valve closed
10/26/2010	3:33:44 PM	PH3 valve closed
10/26/2010	3:33:44 PM	SiCl4 pre valve closed
10/26/2010	3:33:44 PM	SiCl4 post valve closed
10/26/2010	3:33:44 PM	Bubbler valve closed
10/26/2010	3:33:44 PM	Main Vac valve opened
10/26/2010	3:33:44 PM	Bypass valve opened
10/26/2010	3:33:44 PM	Helium MFC set to  0.000000
10/26/2010	3:33:44 PM	H2 MFC set to  0.000000
10/26/2010	3:33:44 PM	BCl3 MFC set to  0.000000
10/26/2010	3:33:44 PM	PHl3 MFC set to  0.000000
10/26/2010	3:33:44 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:33:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:33:44 PM	Tube furnace set to 0
10/26/2010	3:33:44 PM	Run finished at 3:33 PM
10/26/2010	3:33:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	3:34:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:35:07 PM	Recipe started at 3:35 PM
10/26/2010	3:35:07 PM	Helium valve closed
10/26/2010	3:35:07 PM	H2 valve closed
10/26/2010	3:35:07 PM	BCl3 valve closed
10/26/2010	3:35:07 PM	PH3 valve closed
10/26/2010	3:35:07 PM	SiCl4 pre valve closed
10/26/2010	3:35:07 PM	SiCl4 post valve closed
10/26/2010	3:35:07 PM	Main Vac valve closed
10/26/2010	3:35:07 PM	Bubbler valve closed
10/26/2010	3:35:07 PM	Bypass valve opened
10/26/2010	3:35:07 PM	Helium MFC set to  0.000000
10/26/2010	3:35:07 PM	H2 MFC set to  0.000000
10/26/2010	3:35:07 PM	BCl3 MFC set to  0.000000
10/26/2010	3:35:07 PM	PHl3 MFC set to  0.000000
10/26/2010	3:35:07 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:35:07 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:35:07 PM	Tube furnace set to 0
10/26/2010	3:35:08 PM	Helium valve closed
10/26/2010	3:35:08 PM	H2 valve closed
10/26/2010	3:35:08 PM	BCl3 valve closed
10/26/2010	3:35:08 PM	PH3 valve closed
10/26/2010	3:35:08 PM	SiCl4 pre valve closed
10/26/2010	3:35:08 PM	SiCl4 post valve closed
10/26/2010	3:35:08 PM	Bubbler valve closed
10/26/2010	3:35:08 PM	Main Vac valve opened
10/26/2010	3:35:08 PM	Bypass valve opened
10/26/2010	3:35:08 PM	Helium MFC set to  0.000000
10/26/2010	3:35:08 PM	H2 MFC set to  0.000000
10/26/2010	3:35:08 PM	BCl3 MFC set to  0.000000
10/26/2010	3:35:08 PM	PHl3 MFC set to  0.000000
10/26/2010	3:35:08 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:35:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:35:08 PM	Tube furnace set to 0
10/26/2010	3:36:08 PM	H2 valve closed
10/26/2010	3:36:08 PM	BCl3 valve closed
10/26/2010	3:36:08 PM	PH3 valve closed
10/26/2010	3:36:08 PM	SiCl4 pre valve closed
10/26/2010	3:36:08 PM	SiCl4 post valve closed
10/26/2010	3:36:08 PM	Bubbler valve closed
10/26/2010	3:36:08 PM	Helium valve opened
10/26/2010	3:36:08 PM	Main Vac valve opened
10/26/2010	3:36:08 PM	Bypass valve opened
10/26/2010	3:36:08 PM	Helium MFC set to  100.000000
10/26/2010	3:36:08 PM	H2 MFC set to  0.000000
10/26/2010	3:36:08 PM	BCl3 MFC set to  0.000000
10/26/2010	3:36:08 PM	PHl3 MFC set to  0.000000
10/26/2010	3:36:08 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:36:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:36:08 PM	Tube furnace set to 0
10/26/2010	3:37:08 PM	Helium valve closed
10/26/2010	3:37:08 PM	H2 valve closed
10/26/2010	3:37:08 PM	BCl3 valve closed
10/26/2010	3:37:08 PM	PH3 valve closed
10/26/2010	3:37:08 PM	SiCl4 pre valve closed
10/26/2010	3:37:08 PM	SiCl4 post valve closed
10/26/2010	3:37:08 PM	Bubbler valve closed
10/26/2010	3:37:08 PM	Main Vac valve opened
10/26/2010	3:37:08 PM	Bypass valve opened
10/26/2010	3:37:08 PM	Helium MFC set to  0.000000
10/26/2010	3:37:08 PM	H2 MFC set to  0.000000
10/26/2010	3:37:08 PM	BCl3 MFC set to  0.000000
10/26/2010	3:37:08 PM	PHl3 MFC set to  0.000000
10/26/2010	3:37:08 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:37:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:37:08 PM	Tube furnace set to 0
10/26/2010	3:38:08 PM	H2 valve closed
10/26/2010	3:38:08 PM	BCl3 valve closed
10/26/2010	3:38:08 PM	PH3 valve closed
10/26/2010	3:38:08 PM	SiCl4 pre valve closed
10/26/2010	3:38:08 PM	SiCl4 post valve closed
10/26/2010	3:38:08 PM	Bubbler valve closed
10/26/2010	3:38:08 PM	Helium valve opened
10/26/2010	3:38:08 PM	Main Vac valve opened
10/26/2010	3:38:08 PM	Bypass valve opened
10/26/2010	3:38:08 PM	Helium MFC set to  100.000000
10/26/2010	3:38:08 PM	H2 MFC set to  0.000000
10/26/2010	3:38:08 PM	BCl3 MFC set to  0.000000
10/26/2010	3:38:08 PM	PHl3 MFC set to  0.000000
10/26/2010	3:38:08 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:38:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:38:09 PM	Tube furnace set to 0
10/26/2010	3:39:09 PM	Helium valve closed
10/26/2010	3:39:09 PM	H2 valve closed
10/26/2010	3:39:09 PM	BCl3 valve closed
10/26/2010	3:39:09 PM	PH3 valve closed
10/26/2010	3:39:09 PM	SiCl4 pre valve closed
10/26/2010	3:39:09 PM	SiCl4 post valve closed
10/26/2010	3:39:09 PM	Bubbler valve closed
10/26/2010	3:39:09 PM	Main Vac valve opened
10/26/2010	3:39:09 PM	Bypass valve opened
10/26/2010	3:39:09 PM	Helium MFC set to  0.000000
10/26/2010	3:39:09 PM	H2 MFC set to  0.000000
10/26/2010	3:39:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:39:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:39:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:39:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:39:09 PM	Tube furnace set to 0
10/26/2010	3:40:09 PM	H2 valve closed
10/26/2010	3:40:09 PM	BCl3 valve closed
10/26/2010	3:40:09 PM	PH3 valve closed
10/26/2010	3:40:09 PM	SiCl4 pre valve closed
10/26/2010	3:40:09 PM	SiCl4 post valve closed
10/26/2010	3:40:09 PM	Bubbler valve closed
10/26/2010	3:40:09 PM	Helium valve opened
10/26/2010	3:40:09 PM	Main Vac valve opened
10/26/2010	3:40:09 PM	Bypass valve opened
10/26/2010	3:40:09 PM	Helium MFC set to  100.000000
10/26/2010	3:40:09 PM	H2 MFC set to  0.000000
10/26/2010	3:40:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:40:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:40:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:40:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:40:09 PM	Tube furnace set to 0
10/26/2010	3:41:09 PM	Helium valve closed
10/26/2010	3:41:09 PM	H2 valve closed
10/26/2010	3:41:09 PM	BCl3 valve closed
10/26/2010	3:41:09 PM	PH3 valve closed
10/26/2010	3:41:09 PM	SiCl4 pre valve closed
10/26/2010	3:41:09 PM	SiCl4 post valve closed
10/26/2010	3:41:09 PM	Bubbler valve closed
10/26/2010	3:41:09 PM	Main Vac valve opened
10/26/2010	3:41:09 PM	Bypass valve opened
10/26/2010	3:41:09 PM	Helium MFC set to  0.000000
10/26/2010	3:41:09 PM	H2 MFC set to  0.000000
10/26/2010	3:41:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:41:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:41:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:41:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:41:09 PM	Tube furnace set to 0
10/26/2010	3:42:09 PM	H2 valve closed
10/26/2010	3:42:09 PM	BCl3 valve closed
10/26/2010	3:42:09 PM	PH3 valve closed
10/26/2010	3:42:09 PM	SiCl4 pre valve closed
10/26/2010	3:42:09 PM	SiCl4 post valve closed
10/26/2010	3:42:09 PM	Bubbler valve closed
10/26/2010	3:42:09 PM	Helium valve opened
10/26/2010	3:42:09 PM	Main Vac valve opened
10/26/2010	3:42:09 PM	Bypass valve opened
10/26/2010	3:42:09 PM	Helium MFC set to  100.000000
10/26/2010	3:42:09 PM	H2 MFC set to  0.000000
10/26/2010	3:42:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:42:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:42:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:42:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:42:09 PM	Tube furnace set to 0
10/26/2010	3:43:09 PM	Helium valve closed
10/26/2010	3:43:09 PM	H2 valve closed
10/26/2010	3:43:09 PM	BCl3 valve closed
10/26/2010	3:43:09 PM	PH3 valve closed
10/26/2010	3:43:09 PM	SiCl4 pre valve closed
10/26/2010	3:43:09 PM	SiCl4 post valve closed
10/26/2010	3:43:09 PM	Bubbler valve closed
10/26/2010	3:43:09 PM	Main Vac valve opened
10/26/2010	3:43:09 PM	Bypass valve opened
10/26/2010	3:43:09 PM	Helium MFC set to  0.000000
10/26/2010	3:43:09 PM	H2 MFC set to  0.000000
10/26/2010	3:43:09 PM	BCl3 MFC set to  0.000000
10/26/2010	3:43:09 PM	PHl3 MFC set to  0.000000
10/26/2010	3:43:09 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:43:09 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:43:10 PM	Tube furnace set to 0
10/26/2010	3:44:10 PM	H2 valve closed
10/26/2010	3:44:10 PM	BCl3 valve closed
10/26/2010	3:44:10 PM	PH3 valve closed
10/26/2010	3:44:10 PM	SiCl4 pre valve closed
10/26/2010	3:44:10 PM	SiCl4 post valve closed
10/26/2010	3:44:10 PM	Bubbler valve closed
10/26/2010	3:44:10 PM	Helium valve opened
10/26/2010	3:44:10 PM	Main Vac valve opened
10/26/2010	3:44:10 PM	Bypass valve opened
10/26/2010	3:44:10 PM	Helium MFC set to  100.000000
10/26/2010	3:44:10 PM	H2 MFC set to  0.000000
10/26/2010	3:44:10 PM	BCl3 MFC set to  0.000000
10/26/2010	3:44:10 PM	PHl3 MFC set to  0.000000
10/26/2010	3:44:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:44:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:44:10 PM	Tube furnace set to 0
10/26/2010	3:45:10 PM	Helium valve closed
10/26/2010	3:45:10 PM	H2 valve closed
10/26/2010	3:45:10 PM	BCl3 valve closed
10/26/2010	3:45:10 PM	PH3 valve closed
10/26/2010	3:45:10 PM	SiCl4 pre valve closed
10/26/2010	3:45:10 PM	SiCl4 post valve closed
10/26/2010	3:45:10 PM	Bubbler valve closed
10/26/2010	3:45:10 PM	Main Vac valve opened
10/26/2010	3:45:10 PM	Bypass valve opened
10/26/2010	3:45:10 PM	Helium MFC set to  0.000000
10/26/2010	3:45:10 PM	H2 MFC set to  0.000000
10/26/2010	3:45:10 PM	BCl3 MFC set to  0.000000
10/26/2010	3:45:10 PM	PHl3 MFC set to  0.000000
10/26/2010	3:45:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:45:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:45:10 PM	Tube furnace set to 0
10/26/2010	3:46:10 PM	H2 valve closed
10/26/2010	3:46:10 PM	BCl3 valve closed
10/26/2010	3:46:10 PM	PH3 valve closed
10/26/2010	3:46:10 PM	SiCl4 pre valve closed
10/26/2010	3:46:10 PM	SiCl4 post valve closed
10/26/2010	3:46:10 PM	Bubbler valve closed
10/26/2010	3:46:10 PM	Helium valve opened
10/26/2010	3:46:10 PM	Main Vac valve opened
10/26/2010	3:46:10 PM	Bypass valve opened
10/26/2010	3:46:10 PM	Helium MFC set to  100.000000
10/26/2010	3:46:10 PM	H2 MFC set to  0.000000
10/26/2010	3:46:10 PM	BCl3 MFC set to  0.000000
10/26/2010	3:46:10 PM	PHl3 MFC set to  0.000000
10/26/2010	3:46:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:46:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:46:10 PM	Tube furnace set to 0
10/26/2010	3:47:10 PM	Helium valve closed
10/26/2010	3:47:10 PM	H2 valve closed
10/26/2010	3:47:10 PM	BCl3 valve closed
10/26/2010	3:47:10 PM	PH3 valve closed
10/26/2010	3:47:10 PM	SiCl4 pre valve closed
10/26/2010	3:47:10 PM	SiCl4 post valve closed
10/26/2010	3:47:10 PM	Bubbler valve closed
10/26/2010	3:47:10 PM	Main Vac valve opened
10/26/2010	3:47:10 PM	Bypass valve opened
10/26/2010	3:47:10 PM	Helium MFC set to  0.000000
10/26/2010	3:47:10 PM	H2 MFC set to  0.000000
10/26/2010	3:47:10 PM	BCl3 MFC set to  0.000000
10/26/2010	3:47:10 PM	PHl3 MFC set to  0.000000
10/26/2010	3:47:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:47:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:47:10 PM	Tube furnace set to 0
10/26/2010	3:48:10 PM	H2 valve closed
10/26/2010	3:48:10 PM	BCl3 valve closed
10/26/2010	3:48:10 PM	PH3 valve closed
10/26/2010	3:48:10 PM	SiCl4 pre valve closed
10/26/2010	3:48:10 PM	SiCl4 post valve closed
10/26/2010	3:48:10 PM	Bubbler valve closed
10/26/2010	3:48:10 PM	Helium valve opened
10/26/2010	3:48:10 PM	Main Vac valve opened
10/26/2010	3:48:10 PM	Bypass valve opened
10/26/2010	3:48:10 PM	Helium MFC set to  100.000000
10/26/2010	3:48:10 PM	H2 MFC set to  0.000000
10/26/2010	3:48:10 PM	BCl3 MFC set to  0.000000
10/26/2010	3:48:10 PM	PHl3 MFC set to  0.000000
10/26/2010	3:48:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:48:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:48:10 PM	Tube furnace set to 0
10/26/2010	3:49:11 PM	Helium valve closed
10/26/2010	3:49:11 PM	H2 valve closed
10/26/2010	3:49:11 PM	BCl3 valve closed
10/26/2010	3:49:11 PM	PH3 valve closed
10/26/2010	3:49:11 PM	SiCl4 pre valve closed
10/26/2010	3:49:11 PM	SiCl4 post valve closed
10/26/2010	3:49:11 PM	Bubbler valve closed
10/26/2010	3:49:11 PM	Main Vac valve opened
10/26/2010	3:49:11 PM	Bypass valve opened
10/26/2010	3:49:11 PM	Helium MFC set to  0.000000
10/26/2010	3:49:11 PM	H2 MFC set to  0.000000
10/26/2010	3:49:11 PM	BCl3 MFC set to  0.000000
10/26/2010	3:49:11 PM	PHl3 MFC set to  0.000000
10/26/2010	3:49:11 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:49:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:49:11 PM	Tube furnace set to 0
10/26/2010	3:50:11 PM	H2 valve closed
10/26/2010	3:50:11 PM	BCl3 valve closed
10/26/2010	3:50:11 PM	PH3 valve closed
10/26/2010	3:50:11 PM	SiCl4 pre valve closed
10/26/2010	3:50:11 PM	SiCl4 post valve closed
10/26/2010	3:50:11 PM	Bubbler valve closed
10/26/2010	3:50:11 PM	Helium valve opened
10/26/2010	3:50:11 PM	Main Vac valve opened
10/26/2010	3:50:11 PM	Bypass valve opened
10/26/2010	3:50:11 PM	Helium MFC set to  100.000000
10/26/2010	3:50:11 PM	H2 MFC set to  0.000000
10/26/2010	3:50:11 PM	BCl3 MFC set to  0.000000
10/26/2010	3:50:11 PM	PHl3 MFC set to  0.000000
10/26/2010	3:50:11 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:50:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:50:11 PM	Tube furnace set to 0
10/26/2010	3:51:11 PM	Helium valve closed
10/26/2010	3:51:11 PM	H2 valve closed
10/26/2010	3:51:11 PM	BCl3 valve closed
10/26/2010	3:51:11 PM	PH3 valve closed
10/26/2010	3:51:11 PM	SiCl4 pre valve closed
10/26/2010	3:51:11 PM	SiCl4 post valve closed
10/26/2010	3:51:11 PM	Bubbler valve closed
10/26/2010	3:51:11 PM	Main Vac valve opened
10/26/2010	3:51:11 PM	Bypass valve opened
10/26/2010	3:51:11 PM	Helium MFC set to  0.000000
10/26/2010	3:51:11 PM	H2 MFC set to  0.000000
10/26/2010	3:51:11 PM	BCl3 MFC set to  0.000000
10/26/2010	3:51:11 PM	PHl3 MFC set to  0.000000
10/26/2010	3:51:11 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:51:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:51:11 PM	Tube furnace set to 0
10/26/2010	3:51:41 PM	H2 valve closed
10/26/2010	3:51:41 PM	BCl3 valve closed
10/26/2010	3:51:41 PM	PH3 valve closed
10/26/2010	3:51:41 PM	SiCl4 pre valve closed
10/26/2010	3:51:41 PM	SiCl4 post valve closed
10/26/2010	3:51:41 PM	Bubbler valve closed
10/26/2010	3:51:41 PM	Helium valve opened
10/26/2010	3:51:41 PM	Main Vac valve opened
10/26/2010	3:51:41 PM	Bypass valve opened
10/26/2010	3:51:41 PM	Helium MFC set to  100.000000
10/26/2010	3:51:41 PM	H2 MFC set to  0.000000
10/26/2010	3:51:41 PM	BCl3 MFC set to  0.000000
10/26/2010	3:51:41 PM	PHl3 MFC set to  0.000000
10/26/2010	3:51:41 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:51:41 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:51:41 PM	Tube furnace set to 0
10/26/2010	3:51:42 PM	Helium valve closed
10/26/2010	3:51:42 PM	H2 valve closed
10/26/2010	3:51:42 PM	BCl3 valve closed
10/26/2010	3:51:42 PM	PH3 valve closed
10/26/2010	3:51:42 PM	SiCl4 pre valve closed
10/26/2010	3:51:42 PM	SiCl4 post valve closed
10/26/2010	3:51:42 PM	Bubbler valve closed
10/26/2010	3:51:42 PM	Main Vac valve opened
10/26/2010	3:51:42 PM	Bypass valve opened
10/26/2010	3:51:42 PM	Helium MFC set to  0.000000
10/26/2010	3:51:42 PM	H2 MFC set to  0.000000
10/26/2010	3:51:42 PM	BCl3 MFC set to  0.000000
10/26/2010	3:51:42 PM	PHl3 MFC set to  0.000000
10/26/2010	3:51:42 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:51:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:51:42 PM	Tube furnace set to 0
10/26/2010	3:51:42 PM	H2 valve closed
10/26/2010	3:51:42 PM	BCl3 valve closed
10/26/2010	3:51:42 PM	PH3 valve closed
10/26/2010	3:51:42 PM	SiCl4 pre valve closed
10/26/2010	3:51:42 PM	SiCl4 post valve closed
10/26/2010	3:51:42 PM	Bubbler valve closed
10/26/2010	3:51:42 PM	Helium valve opened
10/26/2010	3:51:42 PM	Main Vac valve opened
10/26/2010	3:51:42 PM	Bypass valve opened
10/26/2010	3:51:42 PM	Helium MFC set to  100.000000
10/26/2010	3:51:42 PM	H2 MFC set to  0.000000
10/26/2010	3:51:42 PM	BCl3 MFC set to  0.000000
10/26/2010	3:51:42 PM	PHl3 MFC set to  0.000000
10/26/2010	3:51:42 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:51:42 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:51:42 PM	Tube furnace set to 0
10/26/2010	3:51:43 PM	Helium valve closed
10/26/2010	3:51:43 PM	H2 valve closed
10/26/2010	3:51:43 PM	BCl3 valve closed
10/26/2010	3:51:43 PM	PH3 valve closed
10/26/2010	3:51:43 PM	SiCl4 pre valve closed
10/26/2010	3:51:43 PM	SiCl4 post valve closed
10/26/2010	3:51:43 PM	Bubbler valve closed
10/26/2010	3:51:43 PM	Main Vac valve opened
10/26/2010	3:51:43 PM	Bypass valve opened
10/26/2010	3:51:43 PM	Helium MFC set to  0.000000
10/26/2010	3:51:43 PM	H2 MFC set to  0.000000
10/26/2010	3:51:43 PM	BCl3 MFC set to  0.000000
10/26/2010	3:51:43 PM	PHl3 MFC set to  0.000000
10/26/2010	3:51:43 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:51:43 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:51:43 PM	Tube furnace set to 0
10/26/2010	3:51:44 PM	Run finished at 3:51 PM
10/26/2010	3:51:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	3:55:04 PM	Recipe started at 3:55 PM
10/26/2010	3:55:04 PM	Helium valve closed
10/26/2010	3:55:04 PM	BCl3 valve closed
10/26/2010	3:55:04 PM	PH3 valve closed
10/26/2010	3:55:04 PM	SiCl4 pre valve closed
10/26/2010	3:55:04 PM	SiCl4 post valve closed
10/26/2010	3:55:04 PM	Main Vac valve closed
10/26/2010	3:55:04 PM	Bypass valve closed
10/26/2010	3:55:04 PM	Bubbler valve closed
10/26/2010	3:55:04 PM	H2 valve opened
10/26/2010	3:55:04 PM	Helium MFC set to  0.000000
10/26/2010	3:55:04 PM	H2 MFC set to  500.000000
10/26/2010	3:55:04 PM	BCl3 MFC set to  0.000000
10/26/2010	3:55:04 PM	PHl3 MFC set to  0.000000
10/26/2010	3:55:04 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:55:04 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:55:04 PM	Tube furnace set to 0
10/26/2010	3:56:22 PM	Helium valve closed
10/26/2010	3:56:22 PM	BCl3 valve closed
10/26/2010	3:56:22 PM	PH3 valve closed
10/26/2010	3:56:22 PM	SiCl4 pre valve closed
10/26/2010	3:56:22 PM	SiCl4 post valve closed
10/26/2010	3:56:22 PM	Main Vac valve closed
10/26/2010	3:56:22 PM	Bypass valve closed
10/26/2010	3:56:22 PM	H2 valve opened
10/26/2010	3:56:22 PM	Bubbler valve opened
10/26/2010	3:56:22 PM	Helium MFC set to  0.000000
10/26/2010	3:56:22 PM	H2 MFC set to  500.000000
10/26/2010	3:56:22 PM	BCl3 MFC set to  0.000000
10/26/2010	3:56:22 PM	PHl3 MFC set to  0.000000
10/26/2010	3:56:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	3:56:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	3:56:22 PM	Tube furnace set to 1000
10/26/2010	4:16:22 PM	Helium valve closed
10/26/2010	4:16:22 PM	PH3 valve closed
10/26/2010	4:16:22 PM	Main Vac valve closed
10/26/2010	4:16:22 PM	Bypass valve closed
10/26/2010	4:16:22 PM	H2 valve opened
10/26/2010	4:16:22 PM	BCl3 valve opened
10/26/2010	4:16:22 PM	SiCl4 pre valve opened
10/26/2010	4:16:22 PM	SiCl4 post valve opened
10/26/2010	4:16:22 PM	Bubbler valve opened
10/26/2010	4:16:22 PM	Helium MFC set to  0.000000
10/26/2010	4:16:22 PM	H2 MFC set to  500.000000
10/26/2010	4:16:22 PM	BCl3 MFC set to  12.000000
10/26/2010	4:16:22 PM	PHl3 MFC set to  0.000000
10/26/2010	4:16:22 PM	SiCl4 MFC set to  50.000000
10/26/2010	4:16:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	4:16:22 PM	Tube furnace set to 1000
10/26/2010	4:36:22 PM	H2 valve closed
10/26/2010	4:36:22 PM	BCl3 valve closed
10/26/2010	4:36:22 PM	PH3 valve closed
10/26/2010	4:36:22 PM	SiCl4 pre valve closed
10/26/2010	4:36:22 PM	SiCl4 post valve closed
10/26/2010	4:36:22 PM	Main Vac valve closed
10/26/2010	4:36:22 PM	Bypass valve closed
10/26/2010	4:36:22 PM	Helium valve opened
10/26/2010	4:36:22 PM	Bubbler valve opened
10/26/2010	4:36:22 PM	Helium MFC set to  500.000000
10/26/2010	4:36:22 PM	H2 MFC set to  0.000000
10/26/2010	4:36:22 PM	BCl3 MFC set to  0.000000
10/26/2010	4:36:22 PM	PHl3 MFC set to  0.000000
10/26/2010	4:36:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	4:36:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	4:36:22 PM	Tube furnace set to 0
10/26/2010	4:56:22 PM	Helium valve closed
10/26/2010	4:56:22 PM	H2 valve closed
10/26/2010	4:56:22 PM	BCl3 valve closed
10/26/2010	4:56:22 PM	PH3 valve closed
10/26/2010	4:56:22 PM	SiCl4 pre valve closed
10/26/2010	4:56:22 PM	SiCl4 post valve closed
10/26/2010	4:56:22 PM	Main Vac valve closed
10/26/2010	4:56:22 PM	Bypass valve closed
10/26/2010	4:56:22 PM	Bubbler valve closed
10/26/2010	4:56:22 PM	Helium MFC set to  0.000000
10/26/2010	4:56:22 PM	H2 MFC set to  0.000000
10/26/2010	4:56:22 PM	BCl3 MFC set to  0.000000
10/26/2010	4:56:22 PM	PHl3 MFC set to  0.000000
10/26/2010	4:56:22 PM	SiCl4 MFC set to  0.000000
10/26/2010	4:56:22 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	4:56:23 PM	Tube furnace set to 0
10/26/2010	4:56:23 PM	Run finished at 4:56 PM
10/26/2010	5:11:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:11:50 PM	Recipe started at 5:11 PM
10/26/2010	5:11:50 PM	Helium valve closed
10/26/2010	5:11:50 PM	H2 valve closed
10/26/2010	5:11:50 PM	BCl3 valve closed
10/26/2010	5:11:50 PM	PH3 valve closed
10/26/2010	5:11:50 PM	SiCl4 pre valve closed
10/26/2010	5:11:50 PM	SiCl4 post valve closed
10/26/2010	5:11:50 PM	Main Vac valve closed
10/26/2010	5:11:50 PM	Bubbler valve closed
10/26/2010	5:11:50 PM	Bypass valve opened
10/26/2010	5:11:50 PM	Helium MFC set to  0.000000
10/26/2010	5:11:50 PM	H2 MFC set to  0.000000
10/26/2010	5:11:50 PM	BCl3 MFC set to  0.000000
10/26/2010	5:11:50 PM	PHl3 MFC set to  0.000000
10/26/2010	5:11:50 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:11:50 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:11:50 PM	Tube furnace set to 0
10/26/2010	5:12:40 PM	Run aborted at 5:12 PM
10/26/2010	5:12:40 PM	Helium valve closed
10/26/2010	5:12:40 PM	H2 valve closed
10/26/2010	5:12:40 PM	BCl3 valve closed
10/26/2010	5:12:40 PM	PH3 valve closed
10/26/2010	5:12:40 PM	SiCl4 pre valve closed
10/26/2010	5:12:40 PM	SiCl4 post valve closed
10/26/2010	5:12:40 PM	Bypass valve closed
10/26/2010	5:12:40 PM	Main Vac valve closed
10/26/2010	5:12:40 PM	Bubbler valve closed
10/26/2010	5:12:40 PM	Helium MFC set to  0.000000
10/26/2010	5:12:40 PM	H2 MFC set to  0.000000
10/26/2010	5:12:40 PM	BCl3 MFC set to  0.000000
10/26/2010	5:12:40 PM	PHl3 MFC set to  0.000000
10/26/2010	5:12:40 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:12:40 PM	Tube furnace set to 0
10/26/2010	5:12:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:12:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:12:44 PM	Recipe started at 5:12 PM
10/26/2010	5:12:44 PM	Helium valve closed
10/26/2010	5:12:44 PM	H2 valve closed
10/26/2010	5:12:44 PM	BCl3 valve closed
10/26/2010	5:12:44 PM	PH3 valve closed
10/26/2010	5:12:44 PM	SiCl4 pre valve closed
10/26/2010	5:12:44 PM	SiCl4 post valve closed
10/26/2010	5:12:44 PM	Main Vac valve closed
10/26/2010	5:12:44 PM	Bubbler valve closed
10/26/2010	5:12:44 PM	Bypass valve opened
10/26/2010	5:12:44 PM	Helium MFC set to  0.000000
10/26/2010	5:12:44 PM	H2 MFC set to  0.000000
10/26/2010	5:12:44 PM	BCl3 MFC set to  0.000000
10/26/2010	5:12:44 PM	PHl3 MFC set to  0.000000
10/26/2010	5:12:44 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:12:44 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:12:44 PM	Tube furnace set to 0
10/26/2010	5:12:56 PM	Run aborted at 5:12 PM
10/26/2010	5:12:56 PM	Helium valve closed
10/26/2010	5:12:56 PM	H2 valve closed
10/26/2010	5:12:56 PM	BCl3 valve closed
10/26/2010	5:12:56 PM	PH3 valve closed
10/26/2010	5:12:56 PM	SiCl4 pre valve closed
10/26/2010	5:12:56 PM	SiCl4 post valve closed
10/26/2010	5:12:56 PM	Bypass valve closed
10/26/2010	5:12:56 PM	Main Vac valve closed
10/26/2010	5:12:56 PM	Bubbler valve closed
10/26/2010	5:12:56 PM	Helium MFC set to  0.000000
10/26/2010	5:12:56 PM	H2 MFC set to  0.000000
10/26/2010	5:12:56 PM	BCl3 MFC set to  0.000000
10/26/2010	5:12:56 PM	PHl3 MFC set to  0.000000
10/26/2010	5:12:56 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:12:56 PM	Tube furnace set to 0
10/26/2010	5:12:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:12:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	5:12:58 PM	Recipe started at 5:12 PM
10/26/2010	5:12:58 PM	H2 valve closed
10/26/2010	5:12:58 PM	BCl3 valve closed
10/26/2010	5:12:58 PM	PH3 valve closed
10/26/2010	5:12:58 PM	SiCl4 pre valve closed
10/26/2010	5:12:58 PM	SiCl4 post valve closed
10/26/2010	5:12:58 PM	Main Vac valve closed
10/26/2010	5:12:58 PM	Bypass valve closed
10/26/2010	5:12:58 PM	Bubbler valve closed
10/26/2010	5:12:58 PM	Helium valve opened
10/26/2010	5:12:58 PM	Helium MFC set to  500.000000
10/26/2010	5:12:58 PM	H2 MFC set to  0.000000
10/26/2010	5:12:58 PM	BCl3 MFC set to  0.000000
10/26/2010	5:12:58 PM	PHl3 MFC set to  0.000000
10/26/2010	5:12:58 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:12:58 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:12:58 PM	Tube furnace set to 0
10/26/2010	5:13:02 PM	Helium valve closed
10/26/2010	5:13:02 PM	H2 valve closed
10/26/2010	5:13:02 PM	BCl3 valve closed
10/26/2010	5:13:02 PM	PH3 valve closed
10/26/2010	5:13:02 PM	SiCl4 pre valve closed
10/26/2010	5:13:02 PM	SiCl4 post valve closed
10/26/2010	5:13:02 PM	Main Vac valve closed
10/26/2010	5:13:02 PM	Bypass valve closed
10/26/2010	5:13:02 PM	Bubbler valve closed
10/26/2010	5:13:02 PM	Helium MFC set to  0.000000
10/26/2010	5:13:02 PM	H2 MFC set to  0.000000
10/26/2010	5:13:02 PM	BCl3 MFC set to  0.000000
10/26/2010	5:13:02 PM	PHl3 MFC set to  0.000000
10/26/2010	5:13:02 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:13:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:13:02 PM	Tube furnace set to 0
10/26/2010	5:13:02 PM	Run finished at 5:13 PM
10/26/2010	5:13:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	5:13:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:13:14 PM	Recipe started at 5:13 PM
10/26/2010	5:13:14 PM	Helium valve closed
10/26/2010	5:13:14 PM	H2 valve closed
10/26/2010	5:13:14 PM	BCl3 valve closed
10/26/2010	5:13:14 PM	PH3 valve closed
10/26/2010	5:13:14 PM	SiCl4 pre valve closed
10/26/2010	5:13:14 PM	SiCl4 post valve closed
10/26/2010	5:13:14 PM	Main Vac valve closed
10/26/2010	5:13:14 PM	Bubbler valve closed
10/26/2010	5:13:14 PM	Bypass valve opened
10/26/2010	5:13:14 PM	Helium MFC set to  0.000000
10/26/2010	5:13:14 PM	H2 MFC set to  0.000000
10/26/2010	5:13:14 PM	BCl3 MFC set to  0.000000
10/26/2010	5:13:14 PM	PHl3 MFC set to  0.000000
10/26/2010	5:13:14 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:13:14 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:13:14 PM	Tube furnace set to 0
10/26/2010	5:13:27 PM	Run aborted at 5:13 PM
10/26/2010	5:13:27 PM	Helium valve closed
10/26/2010	5:13:27 PM	H2 valve closed
10/26/2010	5:13:27 PM	BCl3 valve closed
10/26/2010	5:13:27 PM	PH3 valve closed
10/26/2010	5:13:27 PM	SiCl4 pre valve closed
10/26/2010	5:13:27 PM	SiCl4 post valve closed
10/26/2010	5:13:27 PM	Bypass valve closed
10/26/2010	5:13:27 PM	Main Vac valve closed
10/26/2010	5:13:27 PM	Bubbler valve closed
10/26/2010	5:13:27 PM	Helium MFC set to  0.000000
10/26/2010	5:13:27 PM	H2 MFC set to  0.000000
10/26/2010	5:13:27 PM	BCl3 MFC set to  0.000000
10/26/2010	5:13:27 PM	PHl3 MFC set to  0.000000
10/26/2010	5:13:27 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:13:27 PM	Tube furnace set to 0
10/26/2010	5:13:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:13:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	5:13:29 PM	Recipe started at 5:13 PM
10/26/2010	5:13:29 PM	H2 valve closed
10/26/2010	5:13:29 PM	BCl3 valve closed
10/26/2010	5:13:29 PM	PH3 valve closed
10/26/2010	5:13:29 PM	SiCl4 pre valve closed
10/26/2010	5:13:29 PM	SiCl4 post valve closed
10/26/2010	5:13:29 PM	Main Vac valve closed
10/26/2010	5:13:29 PM	Bypass valve closed
10/26/2010	5:13:29 PM	Bubbler valve closed
10/26/2010	5:13:29 PM	Helium valve opened
10/26/2010	5:13:29 PM	Helium MFC set to  500.000000
10/26/2010	5:13:29 PM	H2 MFC set to  0.000000
10/26/2010	5:13:29 PM	BCl3 MFC set to  0.000000
10/26/2010	5:13:29 PM	PHl3 MFC set to  0.000000
10/26/2010	5:13:29 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:13:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:13:29 PM	Tube furnace set to 0
10/26/2010	5:13:33 PM	Helium valve closed
10/26/2010	5:13:33 PM	H2 valve closed
10/26/2010	5:13:33 PM	BCl3 valve closed
10/26/2010	5:13:33 PM	PH3 valve closed
10/26/2010	5:13:33 PM	SiCl4 pre valve closed
10/26/2010	5:13:33 PM	SiCl4 post valve closed
10/26/2010	5:13:33 PM	Main Vac valve closed
10/26/2010	5:13:33 PM	Bypass valve closed
10/26/2010	5:13:33 PM	Bubbler valve closed
10/26/2010	5:13:33 PM	Helium MFC set to  0.000000
10/26/2010	5:13:33 PM	H2 MFC set to  0.000000
10/26/2010	5:13:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:13:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:13:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:13:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:13:33 PM	Tube furnace set to 0
10/26/2010	5:13:33 PM	Run finished at 5:13 PM
10/26/2010	5:13:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/26/2010	5:16:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:16:10 PM	Recipe started at 5:16 PM
10/26/2010	5:16:10 PM	Helium valve closed
10/26/2010	5:16:10 PM	H2 valve closed
10/26/2010	5:16:10 PM	BCl3 valve closed
10/26/2010	5:16:10 PM	PH3 valve closed
10/26/2010	5:16:10 PM	SiCl4 pre valve closed
10/26/2010	5:16:10 PM	SiCl4 post valve closed
10/26/2010	5:16:10 PM	Main Vac valve closed
10/26/2010	5:16:10 PM	Bubbler valve closed
10/26/2010	5:16:10 PM	Bypass valve opened
10/26/2010	5:16:10 PM	Helium MFC set to  0.000000
10/26/2010	5:16:10 PM	H2 MFC set to  0.000000
10/26/2010	5:16:10 PM	BCl3 MFC set to  0.000000
10/26/2010	5:16:10 PM	PHl3 MFC set to  0.000000
10/26/2010	5:16:10 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:16:10 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:16:10 PM	Tube furnace set to 0
10/26/2010	5:17:11 PM	Helium valve closed
10/26/2010	5:17:11 PM	H2 valve closed
10/26/2010	5:17:11 PM	BCl3 valve closed
10/26/2010	5:17:11 PM	PH3 valve closed
10/26/2010	5:17:11 PM	SiCl4 pre valve closed
10/26/2010	5:17:11 PM	SiCl4 post valve closed
10/26/2010	5:17:11 PM	Bubbler valve closed
10/26/2010	5:17:11 PM	Main Vac valve opened
10/26/2010	5:17:11 PM	Bypass valve opened
10/26/2010	5:17:11 PM	Helium MFC set to  0.000000
10/26/2010	5:17:11 PM	H2 MFC set to  0.000000
10/26/2010	5:17:11 PM	BCl3 MFC set to  0.000000
10/26/2010	5:17:11 PM	PHl3 MFC set to  0.000000
10/26/2010	5:17:11 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:17:11 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:17:11 PM	Tube furnace set to 0
10/26/2010	5:17:11 PM	Run finished at 5:17 PM
10/26/2010	5:17:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:18:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	5:18:23 PM	Recipe started at 5:18 PM
10/26/2010	5:18:23 PM	Helium valve closed
10/26/2010	5:18:23 PM	H2 valve closed
10/26/2010	5:18:23 PM	BCl3 valve closed
10/26/2010	5:18:23 PM	PH3 valve closed
10/26/2010	5:18:23 PM	SiCl4 pre valve closed
10/26/2010	5:18:23 PM	SiCl4 post valve closed
10/26/2010	5:18:23 PM	Main Vac valve closed
10/26/2010	5:18:23 PM	Bubbler valve closed
10/26/2010	5:18:23 PM	Bypass valve opened
10/26/2010	5:18:23 PM	Helium MFC set to  0.000000
10/26/2010	5:18:23 PM	H2 MFC set to  0.000000
10/26/2010	5:18:23 PM	BCl3 MFC set to  0.000000
10/26/2010	5:18:23 PM	PHl3 MFC set to  0.000000
10/26/2010	5:18:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:18:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:18:23 PM	Tube furnace set to 0
10/26/2010	5:18:23 PM	Helium valve closed
10/26/2010	5:18:23 PM	H2 valve closed
10/26/2010	5:18:23 PM	BCl3 valve closed
10/26/2010	5:18:23 PM	PH3 valve closed
10/26/2010	5:18:23 PM	SiCl4 pre valve closed
10/26/2010	5:18:23 PM	SiCl4 post valve closed
10/26/2010	5:18:23 PM	Bubbler valve closed
10/26/2010	5:18:23 PM	Main Vac valve opened
10/26/2010	5:18:23 PM	Bypass valve opened
10/26/2010	5:18:23 PM	Helium MFC set to  0.000000
10/26/2010	5:18:23 PM	H2 MFC set to  0.000000
10/26/2010	5:18:23 PM	BCl3 MFC set to  0.000000
10/26/2010	5:18:23 PM	PHl3 MFC set to  0.000000
10/26/2010	5:18:23 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:18:23 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:18:23 PM	Tube furnace set to 0
10/26/2010	5:19:23 PM	H2 valve closed
10/26/2010	5:19:23 PM	BCl3 valve closed
10/26/2010	5:19:23 PM	PH3 valve closed
10/26/2010	5:19:23 PM	SiCl4 pre valve closed
10/26/2010	5:19:23 PM	SiCl4 post valve closed
10/26/2010	5:19:23 PM	Bubbler valve closed
10/26/2010	5:19:23 PM	Helium valve opened
10/26/2010	5:19:23 PM	Main Vac valve opened
10/26/2010	5:19:23 PM	Bypass valve opened
10/26/2010	5:19:23 PM	Helium MFC set to  100.000000
10/26/2010	5:19:23 PM	H2 MFC set to  0.000000
10/26/2010	5:19:23 PM	BCl3 MFC set to  0.000000
10/26/2010	5:19:23 PM	PHl3 MFC set to  0.000000
10/26/2010	5:19:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:19:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:19:24 PM	Tube furnace set to 0
10/26/2010	5:20:24 PM	Helium valve closed
10/26/2010	5:20:24 PM	H2 valve closed
10/26/2010	5:20:24 PM	BCl3 valve closed
10/26/2010	5:20:24 PM	PH3 valve closed
10/26/2010	5:20:24 PM	SiCl4 pre valve closed
10/26/2010	5:20:24 PM	SiCl4 post valve closed
10/26/2010	5:20:24 PM	Bubbler valve closed
10/26/2010	5:20:24 PM	Main Vac valve opened
10/26/2010	5:20:24 PM	Bypass valve opened
10/26/2010	5:20:24 PM	Helium MFC set to  0.000000
10/26/2010	5:20:24 PM	H2 MFC set to  0.000000
10/26/2010	5:20:24 PM	BCl3 MFC set to  0.000000
10/26/2010	5:20:24 PM	PHl3 MFC set to  0.000000
10/26/2010	5:20:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:20:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:20:24 PM	Tube furnace set to 0
10/26/2010	5:21:24 PM	H2 valve closed
10/26/2010	5:21:24 PM	BCl3 valve closed
10/26/2010	5:21:24 PM	PH3 valve closed
10/26/2010	5:21:24 PM	SiCl4 pre valve closed
10/26/2010	5:21:24 PM	SiCl4 post valve closed
10/26/2010	5:21:24 PM	Bubbler valve closed
10/26/2010	5:21:24 PM	Helium valve opened
10/26/2010	5:21:24 PM	Main Vac valve opened
10/26/2010	5:21:24 PM	Bypass valve opened
10/26/2010	5:21:24 PM	Helium MFC set to  100.000000
10/26/2010	5:21:24 PM	H2 MFC set to  0.000000
10/26/2010	5:21:24 PM	BCl3 MFC set to  0.000000
10/26/2010	5:21:24 PM	PHl3 MFC set to  0.000000
10/26/2010	5:21:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:21:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:21:24 PM	Tube furnace set to 0
10/26/2010	5:22:24 PM	Helium valve closed
10/26/2010	5:22:24 PM	H2 valve closed
10/26/2010	5:22:24 PM	BCl3 valve closed
10/26/2010	5:22:24 PM	PH3 valve closed
10/26/2010	5:22:24 PM	SiCl4 pre valve closed
10/26/2010	5:22:24 PM	SiCl4 post valve closed
10/26/2010	5:22:24 PM	Bubbler valve closed
10/26/2010	5:22:24 PM	Main Vac valve opened
10/26/2010	5:22:24 PM	Bypass valve opened
10/26/2010	5:22:24 PM	Helium MFC set to  0.000000
10/26/2010	5:22:24 PM	H2 MFC set to  0.000000
10/26/2010	5:22:24 PM	BCl3 MFC set to  0.000000
10/26/2010	5:22:24 PM	PHl3 MFC set to  0.000000
10/26/2010	5:22:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:22:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:22:24 PM	Tube furnace set to 0
10/26/2010	5:23:24 PM	H2 valve closed
10/26/2010	5:23:24 PM	BCl3 valve closed
10/26/2010	5:23:24 PM	PH3 valve closed
10/26/2010	5:23:24 PM	SiCl4 pre valve closed
10/26/2010	5:23:24 PM	SiCl4 post valve closed
10/26/2010	5:23:24 PM	Bubbler valve closed
10/26/2010	5:23:24 PM	Helium valve opened
10/26/2010	5:23:24 PM	Main Vac valve opened
10/26/2010	5:23:24 PM	Bypass valve opened
10/26/2010	5:23:24 PM	Helium MFC set to  100.000000
10/26/2010	5:23:24 PM	H2 MFC set to  0.000000
10/26/2010	5:23:24 PM	BCl3 MFC set to  0.000000
10/26/2010	5:23:24 PM	PHl3 MFC set to  0.000000
10/26/2010	5:23:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:23:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:23:24 PM	Tube furnace set to 0
10/26/2010	5:24:24 PM	Helium valve closed
10/26/2010	5:24:24 PM	H2 valve closed
10/26/2010	5:24:24 PM	BCl3 valve closed
10/26/2010	5:24:24 PM	PH3 valve closed
10/26/2010	5:24:24 PM	SiCl4 pre valve closed
10/26/2010	5:24:24 PM	SiCl4 post valve closed
10/26/2010	5:24:24 PM	Bubbler valve closed
10/26/2010	5:24:24 PM	Main Vac valve opened
10/26/2010	5:24:24 PM	Bypass valve opened
10/26/2010	5:24:24 PM	Helium MFC set to  0.000000
10/26/2010	5:24:24 PM	H2 MFC set to  0.000000
10/26/2010	5:24:24 PM	BCl3 MFC set to  0.000000
10/26/2010	5:24:24 PM	PHl3 MFC set to  0.000000
10/26/2010	5:24:24 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:24:24 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:24:25 PM	Tube furnace set to 0
10/26/2010	5:25:25 PM	H2 valve closed
10/26/2010	5:25:25 PM	BCl3 valve closed
10/26/2010	5:25:25 PM	PH3 valve closed
10/26/2010	5:25:25 PM	SiCl4 pre valve closed
10/26/2010	5:25:25 PM	SiCl4 post valve closed
10/26/2010	5:25:25 PM	Bubbler valve closed
10/26/2010	5:25:25 PM	Helium valve opened
10/26/2010	5:25:25 PM	Main Vac valve opened
10/26/2010	5:25:25 PM	Bypass valve opened
10/26/2010	5:25:25 PM	Helium MFC set to  100.000000
10/26/2010	5:25:25 PM	H2 MFC set to  0.000000
10/26/2010	5:25:25 PM	BCl3 MFC set to  0.000000
10/26/2010	5:25:25 PM	PHl3 MFC set to  0.000000
10/26/2010	5:25:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:25:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:25:25 PM	Tube furnace set to 0
10/26/2010	5:26:25 PM	Helium valve closed
10/26/2010	5:26:25 PM	H2 valve closed
10/26/2010	5:26:25 PM	BCl3 valve closed
10/26/2010	5:26:25 PM	PH3 valve closed
10/26/2010	5:26:25 PM	SiCl4 pre valve closed
10/26/2010	5:26:25 PM	SiCl4 post valve closed
10/26/2010	5:26:25 PM	Bubbler valve closed
10/26/2010	5:26:25 PM	Main Vac valve opened
10/26/2010	5:26:25 PM	Bypass valve opened
10/26/2010	5:26:25 PM	Helium MFC set to  0.000000
10/26/2010	5:26:25 PM	H2 MFC set to  0.000000
10/26/2010	5:26:25 PM	BCl3 MFC set to  0.000000
10/26/2010	5:26:25 PM	PHl3 MFC set to  0.000000
10/26/2010	5:26:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:26:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:26:25 PM	Tube furnace set to 0
10/26/2010	5:27:25 PM	H2 valve closed
10/26/2010	5:27:25 PM	BCl3 valve closed
10/26/2010	5:27:25 PM	PH3 valve closed
10/26/2010	5:27:25 PM	SiCl4 pre valve closed
10/26/2010	5:27:25 PM	SiCl4 post valve closed
10/26/2010	5:27:25 PM	Bubbler valve closed
10/26/2010	5:27:25 PM	Helium valve opened
10/26/2010	5:27:25 PM	Main Vac valve opened
10/26/2010	5:27:25 PM	Bypass valve opened
10/26/2010	5:27:25 PM	Helium MFC set to  100.000000
10/26/2010	5:27:25 PM	H2 MFC set to  0.000000
10/26/2010	5:27:25 PM	BCl3 MFC set to  0.000000
10/26/2010	5:27:25 PM	PHl3 MFC set to  0.000000
10/26/2010	5:27:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:27:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:27:25 PM	Tube furnace set to 0
10/26/2010	5:28:25 PM	Helium valve closed
10/26/2010	5:28:25 PM	H2 valve closed
10/26/2010	5:28:25 PM	BCl3 valve closed
10/26/2010	5:28:25 PM	PH3 valve closed
10/26/2010	5:28:25 PM	SiCl4 pre valve closed
10/26/2010	5:28:25 PM	SiCl4 post valve closed
10/26/2010	5:28:25 PM	Bubbler valve closed
10/26/2010	5:28:25 PM	Main Vac valve opened
10/26/2010	5:28:25 PM	Bypass valve opened
10/26/2010	5:28:25 PM	Helium MFC set to  0.000000
10/26/2010	5:28:25 PM	H2 MFC set to  0.000000
10/26/2010	5:28:25 PM	BCl3 MFC set to  0.000000
10/26/2010	5:28:25 PM	PHl3 MFC set to  0.000000
10/26/2010	5:28:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:28:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:28:25 PM	Tube furnace set to 0
10/26/2010	5:29:25 PM	H2 valve closed
10/26/2010	5:29:25 PM	BCl3 valve closed
10/26/2010	5:29:25 PM	PH3 valve closed
10/26/2010	5:29:25 PM	SiCl4 pre valve closed
10/26/2010	5:29:25 PM	SiCl4 post valve closed
10/26/2010	5:29:25 PM	Bubbler valve closed
10/26/2010	5:29:25 PM	Helium valve opened
10/26/2010	5:29:25 PM	Main Vac valve opened
10/26/2010	5:29:25 PM	Bypass valve opened
10/26/2010	5:29:25 PM	Helium MFC set to  100.000000
10/26/2010	5:29:25 PM	H2 MFC set to  0.000000
10/26/2010	5:29:25 PM	BCl3 MFC set to  0.000000
10/26/2010	5:29:25 PM	PHl3 MFC set to  0.000000
10/26/2010	5:29:25 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:29:25 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:29:26 PM	Tube furnace set to 0
10/26/2010	5:30:26 PM	Helium valve closed
10/26/2010	5:30:26 PM	H2 valve closed
10/26/2010	5:30:26 PM	BCl3 valve closed
10/26/2010	5:30:26 PM	PH3 valve closed
10/26/2010	5:30:26 PM	SiCl4 pre valve closed
10/26/2010	5:30:26 PM	SiCl4 post valve closed
10/26/2010	5:30:26 PM	Bubbler valve closed
10/26/2010	5:30:26 PM	Main Vac valve opened
10/26/2010	5:30:26 PM	Bypass valve opened
10/26/2010	5:30:26 PM	Helium MFC set to  0.000000
10/26/2010	5:30:26 PM	H2 MFC set to  0.000000
10/26/2010	5:30:26 PM	BCl3 MFC set to  0.000000
10/26/2010	5:30:26 PM	PHl3 MFC set to  0.000000
10/26/2010	5:30:26 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:30:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:30:26 PM	Tube furnace set to 0
10/26/2010	5:31:26 PM	H2 valve closed
10/26/2010	5:31:26 PM	BCl3 valve closed
10/26/2010	5:31:26 PM	PH3 valve closed
10/26/2010	5:31:26 PM	SiCl4 pre valve closed
10/26/2010	5:31:26 PM	SiCl4 post valve closed
10/26/2010	5:31:26 PM	Bubbler valve closed
10/26/2010	5:31:26 PM	Helium valve opened
10/26/2010	5:31:26 PM	Main Vac valve opened
10/26/2010	5:31:26 PM	Bypass valve opened
10/26/2010	5:31:26 PM	Helium MFC set to  100.000000
10/26/2010	5:31:26 PM	H2 MFC set to  0.000000
10/26/2010	5:31:26 PM	BCl3 MFC set to  0.000000
10/26/2010	5:31:26 PM	PHl3 MFC set to  0.000000
10/26/2010	5:31:26 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:31:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:31:26 PM	Tube furnace set to 0
10/26/2010	5:32:26 PM	Helium valve closed
10/26/2010	5:32:26 PM	H2 valve closed
10/26/2010	5:32:26 PM	BCl3 valve closed
10/26/2010	5:32:26 PM	PH3 valve closed
10/26/2010	5:32:26 PM	SiCl4 pre valve closed
10/26/2010	5:32:26 PM	SiCl4 post valve closed
10/26/2010	5:32:26 PM	Bubbler valve closed
10/26/2010	5:32:26 PM	Main Vac valve opened
10/26/2010	5:32:26 PM	Bypass valve opened
10/26/2010	5:32:26 PM	Helium MFC set to  0.000000
10/26/2010	5:32:26 PM	H2 MFC set to  0.000000
10/26/2010	5:32:26 PM	BCl3 MFC set to  0.000000
10/26/2010	5:32:26 PM	PHl3 MFC set to  0.000000
10/26/2010	5:32:26 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:32:26 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:32:26 PM	Tube furnace set to 0
10/26/2010	5:32:58 PM	Run aborted at 5:32 PM
10/26/2010	5:32:58 PM	Helium valve closed
10/26/2010	5:32:58 PM	H2 valve closed
10/26/2010	5:32:58 PM	BCl3 valve closed
10/26/2010	5:32:58 PM	PH3 valve closed
10/26/2010	5:32:58 PM	SiCl4 pre valve closed
10/26/2010	5:32:58 PM	SiCl4 post valve closed
10/26/2010	5:32:58 PM	Bypass valve closed
10/26/2010	5:32:58 PM	Main Vac valve closed
10/26/2010	5:32:58 PM	Bubbler valve closed
10/26/2010	5:32:58 PM	Helium MFC set to  0.000000
10/26/2010	5:32:58 PM	H2 MFC set to  0.000000
10/26/2010	5:32:58 PM	BCl3 MFC set to  0.000000
10/26/2010	5:32:58 PM	PHl3 MFC set to  0.000000
10/26/2010	5:32:58 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:32:58 PM	Tube furnace set to 0
10/26/2010	5:32:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	5:32:59 PM	Bypass valve opened
10/26/2010	5:33:00 PM	Main Vac valve opened
10/26/2010	5:33:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:33:02 PM	Recipe started at 5:33 PM
10/26/2010	5:33:02 PM	Helium valve closed
10/26/2010	5:33:02 PM	H2 valve closed
10/26/2010	5:33:02 PM	BCl3 valve closed
10/26/2010	5:33:02 PM	PH3 valve closed
10/26/2010	5:33:02 PM	SiCl4 pre valve closed
10/26/2010	5:33:02 PM	SiCl4 post valve closed
10/26/2010	5:33:02 PM	Main Vac valve closed
10/26/2010	5:33:02 PM	Bubbler valve closed
10/26/2010	5:33:02 PM	Bypass valve opened
10/26/2010	5:33:02 PM	Helium MFC set to  0.000000
10/26/2010	5:33:02 PM	H2 MFC set to  0.000000
10/26/2010	5:33:02 PM	BCl3 MFC set to  0.000000
10/26/2010	5:33:02 PM	PHl3 MFC set to  0.000000
10/26/2010	5:33:02 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:33:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:33:02 PM	Tube furnace set to 0
10/26/2010	5:33:02 PM	Helium valve closed
10/26/2010	5:33:02 PM	H2 valve closed
10/26/2010	5:33:02 PM	BCl3 valve closed
10/26/2010	5:33:02 PM	PH3 valve closed
10/26/2010	5:33:02 PM	SiCl4 pre valve closed
10/26/2010	5:33:02 PM	SiCl4 post valve closed
10/26/2010	5:33:02 PM	Bubbler valve closed
10/26/2010	5:33:02 PM	Main Vac valve opened
10/26/2010	5:33:02 PM	Bypass valve opened
10/26/2010	5:33:02 PM	Helium MFC set to  0.000000
10/26/2010	5:33:02 PM	H2 MFC set to  0.000000
10/26/2010	5:33:02 PM	BCl3 MFC set to  0.000000
10/26/2010	5:33:02 PM	PHl3 MFC set to  0.000000
10/26/2010	5:33:02 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:33:02 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:33:03 PM	Tube furnace set to 0
10/26/2010	5:33:03 PM	Run finished at 5:33 PM
10/26/2010	5:33:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	5:33:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	5:33:29 PM	Recipe started at 5:33 PM
10/26/2010	5:33:29 PM	Helium valve closed
10/26/2010	5:33:29 PM	H2 valve closed
10/26/2010	5:33:29 PM	BCl3 valve closed
10/26/2010	5:33:29 PM	PH3 valve closed
10/26/2010	5:33:29 PM	SiCl4 pre valve closed
10/26/2010	5:33:29 PM	SiCl4 post valve closed
10/26/2010	5:33:29 PM	Main Vac valve closed
10/26/2010	5:33:29 PM	Bubbler valve closed
10/26/2010	5:33:29 PM	Bypass valve opened
10/26/2010	5:33:29 PM	Helium MFC set to  0.000000
10/26/2010	5:33:29 PM	H2 MFC set to  0.000000
10/26/2010	5:33:29 PM	BCl3 MFC set to  0.000000
10/26/2010	5:33:29 PM	PHl3 MFC set to  0.000000
10/26/2010	5:33:29 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:33:29 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:33:29 PM	Tube furnace set to 0
10/26/2010	5:33:30 PM	Helium valve closed
10/26/2010	5:33:30 PM	H2 valve closed
10/26/2010	5:33:30 PM	BCl3 valve closed
10/26/2010	5:33:30 PM	PH3 valve closed
10/26/2010	5:33:30 PM	SiCl4 pre valve closed
10/26/2010	5:33:30 PM	SiCl4 post valve closed
10/26/2010	5:33:30 PM	Bubbler valve closed
10/26/2010	5:33:30 PM	Main Vac valve opened
10/26/2010	5:33:30 PM	Bypass valve opened
10/26/2010	5:33:30 PM	Helium MFC set to  0.000000
10/26/2010	5:33:30 PM	H2 MFC set to  0.000000
10/26/2010	5:33:30 PM	BCl3 MFC set to  0.000000
10/26/2010	5:33:30 PM	PHl3 MFC set to  0.000000
10/26/2010	5:33:30 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:33:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:33:30 PM	Tube furnace set to 0
10/26/2010	5:34:30 PM	H2 valve closed
10/26/2010	5:34:30 PM	BCl3 valve closed
10/26/2010	5:34:30 PM	PH3 valve closed
10/26/2010	5:34:30 PM	SiCl4 pre valve closed
10/26/2010	5:34:30 PM	SiCl4 post valve closed
10/26/2010	5:34:30 PM	Bubbler valve closed
10/26/2010	5:34:30 PM	Helium valve opened
10/26/2010	5:34:30 PM	Main Vac valve opened
10/26/2010	5:34:30 PM	Bypass valve opened
10/26/2010	5:34:30 PM	Helium MFC set to  100.000000
10/26/2010	5:34:30 PM	H2 MFC set to  0.000000
10/26/2010	5:34:30 PM	BCl3 MFC set to  0.000000
10/26/2010	5:34:30 PM	PHl3 MFC set to  0.000000
10/26/2010	5:34:30 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:34:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:34:30 PM	Tube furnace set to 0
10/26/2010	5:35:30 PM	Helium valve closed
10/26/2010	5:35:30 PM	H2 valve closed
10/26/2010	5:35:30 PM	BCl3 valve closed
10/26/2010	5:35:30 PM	PH3 valve closed
10/26/2010	5:35:30 PM	SiCl4 pre valve closed
10/26/2010	5:35:30 PM	SiCl4 post valve closed
10/26/2010	5:35:30 PM	Bubbler valve closed
10/26/2010	5:35:30 PM	Main Vac valve opened
10/26/2010	5:35:30 PM	Bypass valve opened
10/26/2010	5:35:30 PM	Helium MFC set to  0.000000
10/26/2010	5:35:30 PM	H2 MFC set to  0.000000
10/26/2010	5:35:30 PM	BCl3 MFC set to  0.000000
10/26/2010	5:35:30 PM	PHl3 MFC set to  0.000000
10/26/2010	5:35:30 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:35:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:35:30 PM	Tube furnace set to 0
10/26/2010	5:36:30 PM	H2 valve closed
10/26/2010	5:36:30 PM	BCl3 valve closed
10/26/2010	5:36:30 PM	PH3 valve closed
10/26/2010	5:36:30 PM	SiCl4 pre valve closed
10/26/2010	5:36:30 PM	SiCl4 post valve closed
10/26/2010	5:36:30 PM	Bubbler valve closed
10/26/2010	5:36:30 PM	Helium valve opened
10/26/2010	5:36:30 PM	Main Vac valve opened
10/26/2010	5:36:30 PM	Bypass valve opened
10/26/2010	5:36:30 PM	Helium MFC set to  100.000000
10/26/2010	5:36:30 PM	H2 MFC set to  0.000000
10/26/2010	5:36:30 PM	BCl3 MFC set to  0.000000
10/26/2010	5:36:30 PM	PHl3 MFC set to  0.000000
10/26/2010	5:36:30 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:36:30 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:36:30 PM	Tube furnace set to 0
10/26/2010	5:37:30 PM	Helium valve closed
10/26/2010	5:37:30 PM	H2 valve closed
10/26/2010	5:37:30 PM	BCl3 valve closed
10/26/2010	5:37:30 PM	PH3 valve closed
10/26/2010	5:37:30 PM	SiCl4 pre valve closed
10/26/2010	5:37:30 PM	SiCl4 post valve closed
10/26/2010	5:37:30 PM	Bubbler valve closed
10/26/2010	5:37:30 PM	Main Vac valve opened
10/26/2010	5:37:30 PM	Bypass valve opened
10/26/2010	5:37:30 PM	Helium MFC set to  0.000000
10/26/2010	5:37:30 PM	H2 MFC set to  0.000000
10/26/2010	5:37:30 PM	BCl3 MFC set to  0.000000
10/26/2010	5:37:30 PM	PHl3 MFC set to  0.000000
10/26/2010	5:37:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:37:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:37:31 PM	Tube furnace set to 0
10/26/2010	5:38:31 PM	H2 valve closed
10/26/2010	5:38:31 PM	BCl3 valve closed
10/26/2010	5:38:31 PM	PH3 valve closed
10/26/2010	5:38:31 PM	SiCl4 pre valve closed
10/26/2010	5:38:31 PM	SiCl4 post valve closed
10/26/2010	5:38:31 PM	Bubbler valve closed
10/26/2010	5:38:31 PM	Helium valve opened
10/26/2010	5:38:31 PM	Main Vac valve opened
10/26/2010	5:38:31 PM	Bypass valve opened
10/26/2010	5:38:31 PM	Helium MFC set to  100.000000
10/26/2010	5:38:31 PM	H2 MFC set to  0.000000
10/26/2010	5:38:31 PM	BCl3 MFC set to  0.000000
10/26/2010	5:38:31 PM	PHl3 MFC set to  0.000000
10/26/2010	5:38:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:38:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:38:31 PM	Tube furnace set to 0
10/26/2010	5:39:31 PM	Helium valve closed
10/26/2010	5:39:31 PM	H2 valve closed
10/26/2010	5:39:31 PM	BCl3 valve closed
10/26/2010	5:39:31 PM	PH3 valve closed
10/26/2010	5:39:31 PM	SiCl4 pre valve closed
10/26/2010	5:39:31 PM	SiCl4 post valve closed
10/26/2010	5:39:31 PM	Bubbler valve closed
10/26/2010	5:39:31 PM	Main Vac valve opened
10/26/2010	5:39:31 PM	Bypass valve opened
10/26/2010	5:39:31 PM	Helium MFC set to  0.000000
10/26/2010	5:39:31 PM	H2 MFC set to  0.000000
10/26/2010	5:39:31 PM	BCl3 MFC set to  0.000000
10/26/2010	5:39:31 PM	PHl3 MFC set to  0.000000
10/26/2010	5:39:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:39:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:39:31 PM	Tube furnace set to 0
10/26/2010	5:40:31 PM	H2 valve closed
10/26/2010	5:40:31 PM	BCl3 valve closed
10/26/2010	5:40:31 PM	PH3 valve closed
10/26/2010	5:40:31 PM	SiCl4 pre valve closed
10/26/2010	5:40:31 PM	SiCl4 post valve closed
10/26/2010	5:40:31 PM	Bubbler valve closed
10/26/2010	5:40:31 PM	Helium valve opened
10/26/2010	5:40:31 PM	Main Vac valve opened
10/26/2010	5:40:31 PM	Bypass valve opened
10/26/2010	5:40:31 PM	Helium MFC set to  100.000000
10/26/2010	5:40:31 PM	H2 MFC set to  0.000000
10/26/2010	5:40:31 PM	BCl3 MFC set to  0.000000
10/26/2010	5:40:31 PM	PHl3 MFC set to  0.000000
10/26/2010	5:40:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:40:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:40:31 PM	Tube furnace set to 0
10/26/2010	5:41:31 PM	Helium valve closed
10/26/2010	5:41:31 PM	H2 valve closed
10/26/2010	5:41:31 PM	BCl3 valve closed
10/26/2010	5:41:31 PM	PH3 valve closed
10/26/2010	5:41:31 PM	SiCl4 pre valve closed
10/26/2010	5:41:31 PM	SiCl4 post valve closed
10/26/2010	5:41:31 PM	Bubbler valve closed
10/26/2010	5:41:31 PM	Main Vac valve opened
10/26/2010	5:41:31 PM	Bypass valve opened
10/26/2010	5:41:31 PM	Helium MFC set to  0.000000
10/26/2010	5:41:31 PM	H2 MFC set to  0.000000
10/26/2010	5:41:31 PM	BCl3 MFC set to  0.000000
10/26/2010	5:41:31 PM	PHl3 MFC set to  0.000000
10/26/2010	5:41:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:41:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:41:31 PM	Tube furnace set to 0
10/26/2010	5:42:31 PM	H2 valve closed
10/26/2010	5:42:31 PM	BCl3 valve closed
10/26/2010	5:42:31 PM	PH3 valve closed
10/26/2010	5:42:31 PM	SiCl4 pre valve closed
10/26/2010	5:42:31 PM	SiCl4 post valve closed
10/26/2010	5:42:31 PM	Bubbler valve closed
10/26/2010	5:42:31 PM	Helium valve opened
10/26/2010	5:42:31 PM	Main Vac valve opened
10/26/2010	5:42:31 PM	Bypass valve opened
10/26/2010	5:42:31 PM	Helium MFC set to  100.000000
10/26/2010	5:42:31 PM	H2 MFC set to  0.000000
10/26/2010	5:42:31 PM	BCl3 MFC set to  0.000000
10/26/2010	5:42:31 PM	PHl3 MFC set to  0.000000
10/26/2010	5:42:31 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:42:31 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:42:32 PM	Tube furnace set to 0
10/26/2010	5:43:32 PM	Helium valve closed
10/26/2010	5:43:32 PM	H2 valve closed
10/26/2010	5:43:32 PM	BCl3 valve closed
10/26/2010	5:43:32 PM	PH3 valve closed
10/26/2010	5:43:32 PM	SiCl4 pre valve closed
10/26/2010	5:43:32 PM	SiCl4 post valve closed
10/26/2010	5:43:32 PM	Bubbler valve closed
10/26/2010	5:43:32 PM	Main Vac valve opened
10/26/2010	5:43:32 PM	Bypass valve opened
10/26/2010	5:43:32 PM	Helium MFC set to  0.000000
10/26/2010	5:43:32 PM	H2 MFC set to  0.000000
10/26/2010	5:43:32 PM	BCl3 MFC set to  0.000000
10/26/2010	5:43:32 PM	PHl3 MFC set to  0.000000
10/26/2010	5:43:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:43:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:43:32 PM	Tube furnace set to 0
10/26/2010	5:44:32 PM	H2 valve closed
10/26/2010	5:44:32 PM	BCl3 valve closed
10/26/2010	5:44:32 PM	PH3 valve closed
10/26/2010	5:44:32 PM	SiCl4 pre valve closed
10/26/2010	5:44:32 PM	SiCl4 post valve closed
10/26/2010	5:44:32 PM	Bubbler valve closed
10/26/2010	5:44:32 PM	Helium valve opened
10/26/2010	5:44:32 PM	Main Vac valve opened
10/26/2010	5:44:32 PM	Bypass valve opened
10/26/2010	5:44:32 PM	Helium MFC set to  100.000000
10/26/2010	5:44:32 PM	H2 MFC set to  0.000000
10/26/2010	5:44:32 PM	BCl3 MFC set to  0.000000
10/26/2010	5:44:32 PM	PHl3 MFC set to  0.000000
10/26/2010	5:44:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:44:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:44:32 PM	Tube furnace set to 0
10/26/2010	5:45:32 PM	Helium valve closed
10/26/2010	5:45:32 PM	H2 valve closed
10/26/2010	5:45:32 PM	BCl3 valve closed
10/26/2010	5:45:32 PM	PH3 valve closed
10/26/2010	5:45:32 PM	SiCl4 pre valve closed
10/26/2010	5:45:32 PM	SiCl4 post valve closed
10/26/2010	5:45:32 PM	Bubbler valve closed
10/26/2010	5:45:32 PM	Main Vac valve opened
10/26/2010	5:45:32 PM	Bypass valve opened
10/26/2010	5:45:32 PM	Helium MFC set to  0.000000
10/26/2010	5:45:32 PM	H2 MFC set to  0.000000
10/26/2010	5:45:32 PM	BCl3 MFC set to  0.000000
10/26/2010	5:45:32 PM	PHl3 MFC set to  0.000000
10/26/2010	5:45:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:45:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:45:32 PM	Tube furnace set to 0
10/26/2010	5:46:32 PM	H2 valve closed
10/26/2010	5:46:32 PM	BCl3 valve closed
10/26/2010	5:46:32 PM	PH3 valve closed
10/26/2010	5:46:32 PM	SiCl4 pre valve closed
10/26/2010	5:46:32 PM	SiCl4 post valve closed
10/26/2010	5:46:32 PM	Bubbler valve closed
10/26/2010	5:46:32 PM	Helium valve opened
10/26/2010	5:46:32 PM	Main Vac valve opened
10/26/2010	5:46:32 PM	Bypass valve opened
10/26/2010	5:46:32 PM	Helium MFC set to  100.000000
10/26/2010	5:46:32 PM	H2 MFC set to  0.000000
10/26/2010	5:46:32 PM	BCl3 MFC set to  0.000000
10/26/2010	5:46:32 PM	PHl3 MFC set to  0.000000
10/26/2010	5:46:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:46:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:46:32 PM	Tube furnace set to 0
10/26/2010	5:47:32 PM	Helium valve closed
10/26/2010	5:47:32 PM	H2 valve closed
10/26/2010	5:47:32 PM	BCl3 valve closed
10/26/2010	5:47:32 PM	PH3 valve closed
10/26/2010	5:47:32 PM	SiCl4 pre valve closed
10/26/2010	5:47:32 PM	SiCl4 post valve closed
10/26/2010	5:47:32 PM	Bubbler valve closed
10/26/2010	5:47:32 PM	Main Vac valve opened
10/26/2010	5:47:32 PM	Bypass valve opened
10/26/2010	5:47:32 PM	Helium MFC set to  0.000000
10/26/2010	5:47:32 PM	H2 MFC set to  0.000000
10/26/2010	5:47:32 PM	BCl3 MFC set to  0.000000
10/26/2010	5:47:32 PM	PHl3 MFC set to  0.000000
10/26/2010	5:47:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:47:32 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:47:33 PM	Tube furnace set to 0
10/26/2010	5:48:33 PM	H2 valve closed
10/26/2010	5:48:33 PM	BCl3 valve closed
10/26/2010	5:48:33 PM	PH3 valve closed
10/26/2010	5:48:33 PM	SiCl4 pre valve closed
10/26/2010	5:48:33 PM	SiCl4 post valve closed
10/26/2010	5:48:33 PM	Bubbler valve closed
10/26/2010	5:48:33 PM	Helium valve opened
10/26/2010	5:48:33 PM	Main Vac valve opened
10/26/2010	5:48:33 PM	Bypass valve opened
10/26/2010	5:48:33 PM	Helium MFC set to  100.000000
10/26/2010	5:48:33 PM	H2 MFC set to  0.000000
10/26/2010	5:48:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:48:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:48:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:48:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:48:33 PM	Tube furnace set to 0
10/26/2010	5:49:33 PM	Helium valve closed
10/26/2010	5:49:33 PM	H2 valve closed
10/26/2010	5:49:33 PM	BCl3 valve closed
10/26/2010	5:49:33 PM	PH3 valve closed
10/26/2010	5:49:33 PM	SiCl4 pre valve closed
10/26/2010	5:49:33 PM	SiCl4 post valve closed
10/26/2010	5:49:33 PM	Bubbler valve closed
10/26/2010	5:49:33 PM	Main Vac valve opened
10/26/2010	5:49:33 PM	Bypass valve opened
10/26/2010	5:49:33 PM	Helium MFC set to  0.000000
10/26/2010	5:49:33 PM	H2 MFC set to  0.000000
10/26/2010	5:49:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:49:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:49:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:49:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:49:33 PM	Tube furnace set to 0
10/26/2010	5:50:33 PM	H2 valve closed
10/26/2010	5:50:33 PM	BCl3 valve closed
10/26/2010	5:50:33 PM	PH3 valve closed
10/26/2010	5:50:33 PM	SiCl4 pre valve closed
10/26/2010	5:50:33 PM	SiCl4 post valve closed
10/26/2010	5:50:33 PM	Bubbler valve closed
10/26/2010	5:50:33 PM	Helium valve opened
10/26/2010	5:50:33 PM	Main Vac valve opened
10/26/2010	5:50:33 PM	Bypass valve opened
10/26/2010	5:50:33 PM	Helium MFC set to  100.000000
10/26/2010	5:50:33 PM	H2 MFC set to  0.000000
10/26/2010	5:50:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:50:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:50:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:50:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:50:33 PM	Tube furnace set to 0
10/26/2010	5:51:33 PM	Helium valve closed
10/26/2010	5:51:33 PM	H2 valve closed
10/26/2010	5:51:33 PM	BCl3 valve closed
10/26/2010	5:51:33 PM	PH3 valve closed
10/26/2010	5:51:33 PM	SiCl4 pre valve closed
10/26/2010	5:51:33 PM	SiCl4 post valve closed
10/26/2010	5:51:33 PM	Bubbler valve closed
10/26/2010	5:51:33 PM	Main Vac valve opened
10/26/2010	5:51:33 PM	Bypass valve opened
10/26/2010	5:51:33 PM	Helium MFC set to  0.000000
10/26/2010	5:51:33 PM	H2 MFC set to  0.000000
10/26/2010	5:51:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:51:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:51:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:51:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:51:33 PM	Tube furnace set to 0
10/26/2010	5:52:33 PM	H2 valve closed
10/26/2010	5:52:33 PM	BCl3 valve closed
10/26/2010	5:52:33 PM	PH3 valve closed
10/26/2010	5:52:33 PM	SiCl4 pre valve closed
10/26/2010	5:52:33 PM	SiCl4 post valve closed
10/26/2010	5:52:33 PM	Bubbler valve closed
10/26/2010	5:52:33 PM	Helium valve opened
10/26/2010	5:52:33 PM	Main Vac valve opened
10/26/2010	5:52:33 PM	Bypass valve opened
10/26/2010	5:52:33 PM	Helium MFC set to  100.000000
10/26/2010	5:52:33 PM	H2 MFC set to  0.000000
10/26/2010	5:52:33 PM	BCl3 MFC set to  0.000000
10/26/2010	5:52:33 PM	PHl3 MFC set to  0.000000
10/26/2010	5:52:33 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:52:33 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:52:34 PM	Tube furnace set to 0
10/26/2010	5:53:34 PM	Helium valve closed
10/26/2010	5:53:34 PM	H2 valve closed
10/26/2010	5:53:34 PM	BCl3 valve closed
10/26/2010	5:53:34 PM	PH3 valve closed
10/26/2010	5:53:34 PM	SiCl4 pre valve closed
10/26/2010	5:53:34 PM	SiCl4 post valve closed
10/26/2010	5:53:34 PM	Bubbler valve closed
10/26/2010	5:53:34 PM	Main Vac valve opened
10/26/2010	5:53:34 PM	Bypass valve opened
10/26/2010	5:53:34 PM	Helium MFC set to  0.000000
10/26/2010	5:53:34 PM	H2 MFC set to  0.000000
10/26/2010	5:53:34 PM	BCl3 MFC set to  0.000000
10/26/2010	5:53:34 PM	PHl3 MFC set to  0.000000
10/26/2010	5:53:34 PM	SiCl4 MFC set to  0.000000
10/26/2010	5:53:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	5:53:34 PM	Tube furnace set to 0
10/26/2010	5:53:35 PM	Run finished at 5:53 PM
10/26/2010	5:53:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	6:10:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	6:10:35 PM	Recipe started at 6:10 PM
10/26/2010	6:10:35 PM	Helium valve closed
10/26/2010	6:10:35 PM	H2 valve closed
10/26/2010	6:10:35 PM	BCl3 valve closed
10/26/2010	6:10:35 PM	PH3 valve closed
10/26/2010	6:10:35 PM	SiCl4 pre valve closed
10/26/2010	6:10:35 PM	SiCl4 post valve closed
10/26/2010	6:10:35 PM	Main Vac valve closed
10/26/2010	6:10:35 PM	Bubbler valve closed
10/26/2010	6:10:35 PM	Bypass valve opened
10/26/2010	6:10:35 PM	Helium MFC set to  0.000000
10/26/2010	6:10:35 PM	H2 MFC set to  0.000000
10/26/2010	6:10:35 PM	BCl3 MFC set to  0.000000
10/26/2010	6:10:35 PM	PHl3 MFC set to  0.000000
10/26/2010	6:10:35 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:10:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:10:35 PM	Tube furnace set to 0
10/26/2010	6:10:36 PM	Helium valve closed
10/26/2010	6:10:36 PM	H2 valve closed
10/26/2010	6:10:36 PM	BCl3 valve closed
10/26/2010	6:10:36 PM	PH3 valve closed
10/26/2010	6:10:36 PM	SiCl4 pre valve closed
10/26/2010	6:10:36 PM	SiCl4 post valve closed
10/26/2010	6:10:36 PM	Bubbler valve closed
10/26/2010	6:10:36 PM	Main Vac valve opened
10/26/2010	6:10:36 PM	Bypass valve opened
10/26/2010	6:10:36 PM	Helium MFC set to  0.000000
10/26/2010	6:10:36 PM	H2 MFC set to  0.000000
10/26/2010	6:10:36 PM	BCl3 MFC set to  0.000000
10/26/2010	6:10:36 PM	PHl3 MFC set to  0.000000
10/26/2010	6:10:36 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:10:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:10:36 PM	Tube furnace set to 0
10/26/2010	6:11:36 PM	H2 valve closed
10/26/2010	6:11:36 PM	BCl3 valve closed
10/26/2010	6:11:36 PM	PH3 valve closed
10/26/2010	6:11:36 PM	SiCl4 pre valve closed
10/26/2010	6:11:36 PM	SiCl4 post valve closed
10/26/2010	6:11:36 PM	Bubbler valve closed
10/26/2010	6:11:36 PM	Helium valve opened
10/26/2010	6:11:36 PM	Main Vac valve opened
10/26/2010	6:11:36 PM	Bypass valve opened
10/26/2010	6:11:36 PM	Helium MFC set to  100.000000
10/26/2010	6:11:36 PM	H2 MFC set to  0.000000
10/26/2010	6:11:36 PM	BCl3 MFC set to  0.000000
10/26/2010	6:11:36 PM	PHl3 MFC set to  0.000000
10/26/2010	6:11:36 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:11:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:11:36 PM	Tube furnace set to 0
10/26/2010	6:12:36 PM	Helium valve closed
10/26/2010	6:12:36 PM	H2 valve closed
10/26/2010	6:12:36 PM	BCl3 valve closed
10/26/2010	6:12:36 PM	PH3 valve closed
10/26/2010	6:12:36 PM	SiCl4 pre valve closed
10/26/2010	6:12:36 PM	SiCl4 post valve closed
10/26/2010	6:12:36 PM	Bubbler valve closed
10/26/2010	6:12:36 PM	Main Vac valve opened
10/26/2010	6:12:36 PM	Bypass valve opened
10/26/2010	6:12:36 PM	Helium MFC set to  0.000000
10/26/2010	6:12:36 PM	H2 MFC set to  0.000000
10/26/2010	6:12:36 PM	BCl3 MFC set to  0.000000
10/26/2010	6:12:36 PM	PHl3 MFC set to  0.000000
10/26/2010	6:12:36 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:12:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:12:36 PM	Tube furnace set to 0
10/26/2010	6:13:36 PM	H2 valve closed
10/26/2010	6:13:36 PM	BCl3 valve closed
10/26/2010	6:13:36 PM	PH3 valve closed
10/26/2010	6:13:36 PM	SiCl4 pre valve closed
10/26/2010	6:13:36 PM	SiCl4 post valve closed
10/26/2010	6:13:36 PM	Bubbler valve closed
10/26/2010	6:13:36 PM	Helium valve opened
10/26/2010	6:13:36 PM	Main Vac valve opened
10/26/2010	6:13:36 PM	Bypass valve opened
10/26/2010	6:13:36 PM	Helium MFC set to  100.000000
10/26/2010	6:13:36 PM	H2 MFC set to  0.000000
10/26/2010	6:13:36 PM	BCl3 MFC set to  0.000000
10/26/2010	6:13:36 PM	PHl3 MFC set to  0.000000
10/26/2010	6:13:36 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:13:36 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:13:37 PM	Tube furnace set to 0
10/26/2010	6:14:37 PM	Helium valve closed
10/26/2010	6:14:37 PM	H2 valve closed
10/26/2010	6:14:37 PM	BCl3 valve closed
10/26/2010	6:14:37 PM	PH3 valve closed
10/26/2010	6:14:37 PM	SiCl4 pre valve closed
10/26/2010	6:14:37 PM	SiCl4 post valve closed
10/26/2010	6:14:37 PM	Bubbler valve closed
10/26/2010	6:14:37 PM	Main Vac valve opened
10/26/2010	6:14:37 PM	Bypass valve opened
10/26/2010	6:14:37 PM	Helium MFC set to  0.000000
10/26/2010	6:14:37 PM	H2 MFC set to  0.000000
10/26/2010	6:14:37 PM	BCl3 MFC set to  0.000000
10/26/2010	6:14:37 PM	PHl3 MFC set to  0.000000
10/26/2010	6:14:37 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:14:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:14:37 PM	Tube furnace set to 0
10/26/2010	6:15:37 PM	H2 valve closed
10/26/2010	6:15:37 PM	BCl3 valve closed
10/26/2010	6:15:37 PM	PH3 valve closed
10/26/2010	6:15:37 PM	SiCl4 pre valve closed
10/26/2010	6:15:37 PM	SiCl4 post valve closed
10/26/2010	6:15:37 PM	Bubbler valve closed
10/26/2010	6:15:37 PM	Helium valve opened
10/26/2010	6:15:37 PM	Main Vac valve opened
10/26/2010	6:15:37 PM	Bypass valve opened
10/26/2010	6:15:37 PM	Helium MFC set to  100.000000
10/26/2010	6:15:37 PM	H2 MFC set to  0.000000
10/26/2010	6:15:37 PM	BCl3 MFC set to  0.000000
10/26/2010	6:15:37 PM	PHl3 MFC set to  0.000000
10/26/2010	6:15:37 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:15:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:15:37 PM	Tube furnace set to 0
10/26/2010	6:16:37 PM	Helium valve closed
10/26/2010	6:16:37 PM	H2 valve closed
10/26/2010	6:16:37 PM	BCl3 valve closed
10/26/2010	6:16:37 PM	PH3 valve closed
10/26/2010	6:16:37 PM	SiCl4 pre valve closed
10/26/2010	6:16:37 PM	SiCl4 post valve closed
10/26/2010	6:16:37 PM	Bubbler valve closed
10/26/2010	6:16:37 PM	Main Vac valve opened
10/26/2010	6:16:37 PM	Bypass valve opened
10/26/2010	6:16:37 PM	Helium MFC set to  0.000000
10/26/2010	6:16:37 PM	H2 MFC set to  0.000000
10/26/2010	6:16:37 PM	BCl3 MFC set to  0.000000
10/26/2010	6:16:37 PM	PHl3 MFC set to  0.000000
10/26/2010	6:16:37 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:16:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:16:37 PM	Tube furnace set to 0
10/26/2010	6:17:37 PM	H2 valve closed
10/26/2010	6:17:37 PM	BCl3 valve closed
10/26/2010	6:17:37 PM	PH3 valve closed
10/26/2010	6:17:37 PM	SiCl4 pre valve closed
10/26/2010	6:17:37 PM	SiCl4 post valve closed
10/26/2010	6:17:37 PM	Bubbler valve closed
10/26/2010	6:17:37 PM	Helium valve opened
10/26/2010	6:17:37 PM	Main Vac valve opened
10/26/2010	6:17:37 PM	Bypass valve opened
10/26/2010	6:17:37 PM	Helium MFC set to  100.000000
10/26/2010	6:17:37 PM	H2 MFC set to  0.000000
10/26/2010	6:17:37 PM	BCl3 MFC set to  0.000000
10/26/2010	6:17:37 PM	PHl3 MFC set to  0.000000
10/26/2010	6:17:37 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:17:37 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:17:37 PM	Tube furnace set to 0
10/26/2010	6:18:32 PM	Run aborted at 6:18 PM
10/26/2010	6:18:32 PM	Helium valve closed
10/26/2010	6:18:32 PM	H2 valve closed
10/26/2010	6:18:32 PM	BCl3 valve closed
10/26/2010	6:18:32 PM	PH3 valve closed
10/26/2010	6:18:32 PM	SiCl4 pre valve closed
10/26/2010	6:18:32 PM	SiCl4 post valve closed
10/26/2010	6:18:32 PM	Bypass valve closed
10/26/2010	6:18:32 PM	Main Vac valve closed
10/26/2010	6:18:32 PM	Bubbler valve closed
10/26/2010	6:18:32 PM	Helium MFC set to  0.000000
10/26/2010	6:18:32 PM	H2 MFC set to  0.000000
10/26/2010	6:18:32 PM	BCl3 MFC set to  0.000000
10/26/2010	6:18:32 PM	PHl3 MFC set to  0.000000
10/26/2010	6:18:32 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:18:32 PM	Tube furnace set to 0
10/26/2010	6:18:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/26/2010	6:18:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	6:18:34 PM	Recipe started at 6:18 PM
10/26/2010	6:18:34 PM	Helium valve closed
10/26/2010	6:18:34 PM	H2 valve closed
10/26/2010	6:18:34 PM	BCl3 valve closed
10/26/2010	6:18:34 PM	PH3 valve closed
10/26/2010	6:18:34 PM	SiCl4 pre valve closed
10/26/2010	6:18:34 PM	SiCl4 post valve closed
10/26/2010	6:18:34 PM	Main Vac valve closed
10/26/2010	6:18:34 PM	Bubbler valve closed
10/26/2010	6:18:34 PM	Bypass valve opened
10/26/2010	6:18:34 PM	Helium MFC set to  0.000000
10/26/2010	6:18:34 PM	H2 MFC set to  0.000000
10/26/2010	6:18:34 PM	BCl3 MFC set to  0.000000
10/26/2010	6:18:34 PM	PHl3 MFC set to  0.000000
10/26/2010	6:18:34 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:18:34 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:18:35 PM	Tube furnace set to 0
10/26/2010	6:18:35 PM	Helium valve closed
10/26/2010	6:18:35 PM	H2 valve closed
10/26/2010	6:18:35 PM	BCl3 valve closed
10/26/2010	6:18:35 PM	PH3 valve closed
10/26/2010	6:18:35 PM	SiCl4 pre valve closed
10/26/2010	6:18:35 PM	SiCl4 post valve closed
10/26/2010	6:18:35 PM	Bubbler valve closed
10/26/2010	6:18:35 PM	Main Vac valve opened
10/26/2010	6:18:35 PM	Bypass valve opened
10/26/2010	6:18:35 PM	Helium MFC set to  0.000000
10/26/2010	6:18:35 PM	H2 MFC set to  0.000000
10/26/2010	6:18:35 PM	BCl3 MFC set to  0.000000
10/26/2010	6:18:35 PM	PHl3 MFC set to  0.000000
10/26/2010	6:18:35 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:18:35 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:18:35 PM	Tube furnace set to 0
10/26/2010	6:18:35 PM	Run finished at 6:18 PM
10/26/2010	6:18:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	6:19:38 PM	Recipe started at 6:19 PM
10/26/2010	6:19:38 PM	Helium valve closed
10/26/2010	6:19:38 PM	BCl3 valve closed
10/26/2010	6:19:38 PM	PH3 valve closed
10/26/2010	6:19:38 PM	SiCl4 pre valve closed
10/26/2010	6:19:38 PM	SiCl4 post valve closed
10/26/2010	6:19:38 PM	Main Vac valve closed
10/26/2010	6:19:38 PM	Bypass valve closed
10/26/2010	6:19:38 PM	Bubbler valve closed
10/26/2010	6:19:38 PM	H2 valve opened
10/26/2010	6:19:38 PM	Helium MFC set to  0.000000
10/26/2010	6:19:38 PM	H2 MFC set to  500.000000
10/26/2010	6:19:38 PM	BCl3 MFC set to  0.000000
10/26/2010	6:19:38 PM	PHl3 MFC set to  0.000000
10/26/2010	6:19:38 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:19:38 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:19:38 PM	Tube furnace set to 0
10/26/2010	6:20:57 PM	Helium valve closed
10/26/2010	6:20:57 PM	BCl3 valve closed
10/26/2010	6:20:57 PM	PH3 valve closed
10/26/2010	6:20:57 PM	SiCl4 pre valve closed
10/26/2010	6:20:57 PM	SiCl4 post valve closed
10/26/2010	6:20:57 PM	Main Vac valve closed
10/26/2010	6:20:57 PM	Bypass valve closed
10/26/2010	6:20:57 PM	H2 valve opened
10/26/2010	6:20:57 PM	Bubbler valve opened
10/26/2010	6:20:57 PM	Helium MFC set to  0.000000
10/26/2010	6:20:57 PM	H2 MFC set to  500.000000
10/26/2010	6:20:57 PM	BCl3 MFC set to  0.000000
10/26/2010	6:20:57 PM	PHl3 MFC set to  0.000000
10/26/2010	6:20:57 PM	SiCl4 MFC set to  0.000000
10/26/2010	6:20:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:20:57 PM	Tube furnace set to 1000
10/26/2010	6:40:57 PM	Helium valve closed
10/26/2010	6:40:57 PM	PH3 valve closed
10/26/2010	6:40:57 PM	Main Vac valve closed
10/26/2010	6:40:57 PM	Bypass valve closed
10/26/2010	6:40:57 PM	H2 valve opened
10/26/2010	6:40:57 PM	BCl3 valve opened
10/26/2010	6:40:57 PM	SiCl4 pre valve opened
10/26/2010	6:40:57 PM	SiCl4 post valve opened
10/26/2010	6:40:57 PM	Bubbler valve opened
10/26/2010	6:40:57 PM	Helium MFC set to  0.000000
10/26/2010	6:40:57 PM	H2 MFC set to  500.000000
10/26/2010	6:40:57 PM	BCl3 MFC set to  12.000000
10/26/2010	6:40:57 PM	PHl3 MFC set to  0.000000
10/26/2010	6:40:57 PM	SiCl4 MFC set to  50.000000
10/26/2010	6:40:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	6:40:57 PM	Tube furnace set to 1000
10/26/2010	7:00:57 PM	H2 valve closed
10/26/2010	7:00:57 PM	BCl3 valve closed
10/26/2010	7:00:57 PM	PH3 valve closed
10/26/2010	7:00:57 PM	SiCl4 pre valve closed
10/26/2010	7:00:57 PM	SiCl4 post valve closed
10/26/2010	7:00:57 PM	Main Vac valve closed
10/26/2010	7:00:57 PM	Bypass valve closed
10/26/2010	7:00:57 PM	Helium valve opened
10/26/2010	7:00:57 PM	Bubbler valve opened
10/26/2010	7:00:57 PM	Helium MFC set to  500.000000
10/26/2010	7:00:57 PM	H2 MFC set to  0.000000
10/26/2010	7:00:57 PM	BCl3 MFC set to  0.000000
10/26/2010	7:00:57 PM	PHl3 MFC set to  0.000000
10/26/2010	7:00:57 PM	SiCl4 MFC set to  0.000000
10/26/2010	7:00:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	7:00:57 PM	Tube furnace set to 0
10/26/2010	7:20:57 PM	Helium valve closed
10/26/2010	7:20:57 PM	H2 valve closed
10/26/2010	7:20:57 PM	BCl3 valve closed
10/26/2010	7:20:57 PM	PH3 valve closed
10/26/2010	7:20:57 PM	SiCl4 pre valve closed
10/26/2010	7:20:57 PM	SiCl4 post valve closed
10/26/2010	7:20:57 PM	Main Vac valve closed
10/26/2010	7:20:57 PM	Bypass valve closed
10/26/2010	7:20:57 PM	Bubbler valve closed
10/26/2010	7:20:57 PM	Helium MFC set to  0.000000
10/26/2010	7:20:57 PM	H2 MFC set to  0.000000
10/26/2010	7:20:57 PM	BCl3 MFC set to  0.000000
10/26/2010	7:20:57 PM	PHl3 MFC set to  0.000000
10/26/2010	7:20:57 PM	SiCl4 MFC set to  0.000000
10/26/2010	7:20:57 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	7:20:58 PM	Tube furnace set to 0
10/26/2010	7:20:58 PM	Run finished at 7:20 PM
10/26/2010	7:24:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/26/2010	7:24:08 PM	Recipe started at 7:24 PM
10/26/2010	7:24:08 PM	Helium valve closed
10/26/2010	7:24:08 PM	H2 valve closed
10/26/2010	7:24:08 PM	BCl3 valve closed
10/26/2010	7:24:08 PM	PH3 valve closed
10/26/2010	7:24:08 PM	SiCl4 pre valve closed
10/26/2010	7:24:08 PM	SiCl4 post valve closed
10/26/2010	7:24:08 PM	Main Vac valve closed
10/26/2010	7:24:08 PM	Bubbler valve closed
10/26/2010	7:24:08 PM	Bypass valve opened
10/26/2010	7:24:08 PM	Helium MFC set to  0.000000
10/26/2010	7:24:08 PM	H2 MFC set to  0.000000
10/26/2010	7:24:08 PM	BCl3 MFC set to  0.000000
10/26/2010	7:24:08 PM	PHl3 MFC set to  0.000000
10/26/2010	7:24:08 PM	SiCl4 MFC set to  0.000000
10/26/2010	7:24:08 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	7:24:08 PM	Tube furnace set to 0
10/26/2010	7:24:59 PM	Helium valve closed
10/26/2010	7:24:59 PM	H2 valve closed
10/26/2010	7:24:59 PM	BCl3 valve closed
10/26/2010	7:24:59 PM	PH3 valve closed
10/26/2010	7:24:59 PM	SiCl4 pre valve closed
10/26/2010	7:24:59 PM	SiCl4 post valve closed
10/26/2010	7:24:59 PM	Bubbler valve closed
10/26/2010	7:24:59 PM	Main Vac valve opened
10/26/2010	7:24:59 PM	Bypass valve opened
10/26/2010	7:24:59 PM	Helium MFC set to  0.000000
10/26/2010	7:24:59 PM	H2 MFC set to  0.000000
10/26/2010	7:24:59 PM	BCl3 MFC set to  0.000000
10/26/2010	7:24:59 PM	PHl3 MFC set to  0.000000
10/26/2010	7:24:59 PM	SiCl4 MFC set to  0.000000
10/26/2010	7:24:59 PM	Bypass solenoid MFC set to  0.000000
10/26/2010	7:24:59 PM	Tube furnace set to 0
10/26/2010	7:24:59 PM	Run finished at 7:24 PM
10/26/2010	7:24:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
